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6501Multi-Channel

DC Voltage Current Source/Monitor

4-channel source/monitor suitable for manufacturing and quality control of electronic components

l 4-channel DC voltage current source and measurement functions independently controllable

l Extendable structure by 4 channels

l Output range: ±10 V/100 mA bipolar output Measurement resolution: 1 μV/10 pA

l Isolation: 20 V

l Low-noise output by series power supply method (5 mVp-p at 20 MHz)

© 2013 ADC CORPORATION Printed in Japan 6501-511E Feb. '13 A

Head Office Shoei Bldg, 3-6-12, Kyobashi, Chuo-ku, Tokyo 104-0031, Japan Phone: +81-3-6272-4433 Fax: +81-3-6272-4437

Higashimatsuyama Office (R&D Center) 77-1, Miyako Namegawa-machi, Hiki-gun, Saitama 355-0812, Japan Phone: +81-493-56-4433 Fax: +81-493-57-1092

E-mail : kcc@adcmt.com URL : http://www.adcmt-e.com

The 6501 is a multi-channel DC voltage current source/monitor (SMU) that integrates four source monitors. It is suitable for evaluating semi-conductors such as battery controlling ICs and can work as a bias power supply for communication laser diodes or photodetectors that requires high stability.Each unit can be controlled by GPIB, and the structure is expandable by the unit of four channels as required.Each SMU has eight measurement functions: VSIM, ISVM, VSVM, ISIM VM (voltmeter), IM (ammeter), VSRM (voltage source resis-tance measurement) and ISRM (current source resistance measure-ment) and other effective functions for characteristic evaluation of electronic components such as pulse measurement, sweep measure-ment and suspend functions.The basic analog performance of the 6501 is designed based on the well-established 6241A, allowing low noise and highly stable output and high resolution measurement.

Output noise: Within the range from no load to the maximum load [Vp-p]

Settling time: Time to reach the final value ±0.1% when varying the output from zero to full-scale

Source and Measurement FunctionsNumber of channels: 4 channels (extendable by 4 channels)DC source and measurement: DC voltage and current source and measurementPulse source and measurement: Pulse voltage and current source and measurementDC sweep source and measurement: Linear, Random and Fixed levelsPulse sweep source and measurement: Linear, Random and Fixed levelsIntegration time: 9 types available: 100µs to 200ms and S/HSweep mode: Reverse ON (round) / OFF (one way)Sweep repeat count: 1 to 1000 times or infiniteMaximum number of sweep steps: 8000 stepsMeasurement data memory: 8000 dataCalculation function: NULL calculation, comparator calculation (HI/GO/LO) Scaling calculation, MAX/MIN/AVE/TOTAL

calculationOutput terminal: Front 1 connector 4-channel output (45 pins) Output Signal HI FORCE, HI SENSE, LO

FORCE, LOSE SENSE, DRIVING GUARDMaximum remote sensing voltage: FORCE-SENSE ±1V MaxGPIB interface: Compliant with IEEE-488.2-1978

Setting TimePulse width/measurement delay time: 0.05ms to 59998msPeriod (pulse cycle): 1ms to 59998msSource delay time: 0.03ms to 59998msHold time: 1ms to 60000ms

General SpecificationsOperating environment: Ambient temperature 0˚C to +50˚C Relative humidity 85% or below, no condensationDisplay: Operate and Error display onlyPower supply: AC power supply 100V (fixed)Power frequency: 50 Hz/60 HzPower consumption: 160 VA or lessMass: 16 kg or lessDimensions: Approx. 424 (W) × 177 (H) × 500 (D) mm

◦Allspecificationsaresubjecttochangewithoutnotice.

Specifications (For more information, please contact our sales representatives)

All accuracy specifications are guaranteed for one year at a temperature of 23 ±5°C and a relative humidity of 85% or less.

Voltage and current source/measurement range: 0 to ±10V/0 to ±100mA Voltage range: 300mV/3V/10V Current range: 3µA/30µA/300µA/3mA/30mA/100mA Minimum source resolution Voltage: 10µV, Current: 100pA Minimum measurement resolution Voltage: 1µV, Current: 10pAResistance measurement range:

Voltage limiter (compliance) range: 0V to 10VCurrent limiter (compliance) range: 100nA to 100mA

Overall accuracy（Includes calibration accuracy, 1-day stability, temperature coefficient and linearity）

Auto zero: ON, integration time: 1PLC to 200ms

For Testing Semiconductors and Laser Diodes

Range Voltage source±（％ of setting＋V）

Voltage measurement±（％ of reading＋V）

300mV 0.02＋150µV 0.02＋75µV3V 0.02＋350µV 0.02＋120µV

10V 0.02＋3mV *1 0.02＋1.2mV *1

Range Current source±（％ of setting＋A＋A×Vo/1V）

Current measurement±（%of reading＋A＋A×Vo/1V）

3µA 0.03＋10nA＋300pA 0.03＋8nA＋300pA30µA 0.03＋10nA＋300pA 0.03＋8nA＋300pA

300µA 0.03＋80nA＋3nA 0.03＋70nA＋3nA3mA 0.03＋800nA＋30nA 0.03＋700nA＋30nA

30mA 0.03＋8µA＋300nA 0.03＋7µA＋300nA100mA 0.045＋80µA＋3µA 0.045＋70µA＋3µA

Range Measurement range Minimum measurement resolution

Decided by voltage range/current range calculation 0Ω to 5GΩ 10µΩ

*1： 200μV is added per remote sensing voltage of 0.1V in the 10V range.

Source range DC to 100Hz DC to 10kHz DC to 20MHz300mV,3V 100µV 700µV 4mV

10V 700µV 2mV 5mV

(Typical value) Source range Limiter rangeSettling time

FAST SLOWVoltage source 10V 100mA 600µs or less 2.5ms or lessCurrent source 100mA 10V 1.2ms or less 4ms or less