STP-iXA4506 large capacity turbomolecular...
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Vacuum science... product soluon. Edwards STP-iXA4506 series magnecally levitated turbomolecular pump (TMP) uses state-of-the-art technology to provide industry-leading performance, improved gas flow capability and high temperature management for today’s challenging applicaons. • All-in-one soluon ͳ The fully integrated controller and power supply eliminates the need for cables and a separate controller rack, resulng in a cost effecve, compact TMP package that is fast and easy to install in a small footprint. • High performance, high throughput ͳ Maximum connuous flow capability of 4300 sccm (N 2 ), achieving a performance increase of more than 50%, when compared to STP-XA4503. • Energy efficient ͳ The pump will operate efficiently with cooling water supply up to 35°C. Achieving world-class pumping speed of 4300 l/s (N2) and throughput up to 4300 sccm (N2), on a 12-16 inch (300-400 mm) inlet flange, makes the STP-iXA4506 TMP the ideal choice for a wide range of large-volume, high- flow applicaons including semiconductor etch, LCD etch, glass coang, solar PVD and coang PVD. Its ghtly-integrated design includes a completely sealed electronic module for robust, reliable operaon in the most demanding factory environments. And, like all of our magnecally levitated TMPs, the absence of mechanical bearings praccally eliminates the cost of periodic maintenance. Features and benefits • Addional opons ͳ Temperature Management System (TMS) unit is available for processes generang by-products. ͳ Oponal B* Coang can be applicable for high throughput processes with TMS. • Communicaon ͳ I/O Remote, RS232C, RS485, STP-Link are standard ports. ͳ Profibus, DeviceNet, Lonworks and EtherCAT can be selected as oponal alternaves. • Compliant Standards ͳ UL marked, CE marked, SEMI-S2 and RoHS compliant. STP-iXA4506 large capacity turbomolecular pump product datasheet
Transcript of STP-iXA4506 large capacity turbomolecular...
Vacuum science... product solution.
Edwards STP-iXA4506 series magnetically levitated turbomolecular pump (TMP) uses state-of-the-art technology to provide industry-leading performance, improved gas flow capability and high temperature management for today’s challenging applications.
• All-in-onesolutionͳ Thefullyintegratedcontrollerandpowersupplyeliminatestheneedforcablesandaseparatecontrollerrack,resultinginacosteffective,compactTMPpackagethatisfastandeasytoinstallinasmallfootprint.
• Highperformance,highthroughputͳ Maximumcontinuousflowcapabilityof4300sccm(N2),achievingaperformanceincreaseofmorethan50%,whencomparedtoSTP-XA4503.
• Energyefficientͳ Thepumpwilloperateefficientlywithcoolingwatersupplyupto35°C.
Achievingworld-classpumpingspeedof4300l/s(N2)andthroughputupto4300sccm(N2),ona12-16inch(300-400mm)inletflange,makestheSTP-iXA4506TMPtheidealchoiceforawiderangeoflarge-volume,high-flowapplicationsincludingsemiconductoretch,LCDetch,glasscoating,solarPVDandcoatingPVD.
Itstightly-integrateddesignincludesacompletelysealedelectronicmoduleforrobust,reliableoperationinthemostdemandingfactoryenvironments.And,likeallofourmagneticallylevitatedTMPs,theabsenceofmechanicalbearingspracticallyeliminatesthecostofperiodicmaintenance.
Features and benefits
• Additionaloptionsͳ TemperatureManagementSystem(TMS)unitisavailableforprocessesgeneratingby-products.
ͳ OptionalB*CoatingcanbeapplicableforhighthroughputprocesseswithTMS.
• Communicationͳ I/ORemote,RS232C,RS485,STP-Linkarestandardports.
ͳ Profibus,DeviceNet,LonworksandEtherCATcanbeselectedasoptionalalternatives.
• CompliantStandardsͳ ULmarked,CEmarked,SEMI-S2andRoHScompliant.
STP-iXA4506 large capacity turbomolecular pump
product datasheet
Global contacts
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Technical data
PublicationNumber:YT6300895,IssueA©EdwardsLimited2014.Allrightsreserved.
EdwardsandtheEdwardslogoaretrademarksofEdwardsLimited.
Intel port flange VG300 ISO320F VG350 VG400
Outletportflange KF40
PumpSpeed
N2/H2 3800/2700 4000/2700 4300/2700 4300/2700 Litres/second
CompressionratioN2/H2 >108/103
Ultimatepressure 10-7(10-9) Pa(Torr)
Allowablebackingpressure 266(2) Pa(Torr)
MaxgasflowN2*1 4300
(watercooledonly) (7.26) (Pam3/sec)
MaxgasflowAr*1 2600
(watercooledonly) (4.39) (Pam3/sec)
RatedSpeed 24,240 rpm
Startingtime 11 minutes
Mountingposition Anyorientation
Inputvoltage 200-240 V
Maximuminputpower
withoutTMS 1700 VA
withTMS 2200 VA
Weight 109 111 104 111 kg
Dimensions STP-iXA4506Series/PumpingspeedagainstInletPressure
344
167.
515
04057
127
8062
43 101 101 4314.5 14.5
30°
208
A
B
CD
E
F (8)
GH
(1)
I (3)
(6)
(4)
(5)
(2)
VG300 VG350 VG400 ISO320F
φA 400 450 520 425φB 420 420 420 420C 18 18 18 20D 387 332 332 378E 475 420 420 466F 266 211 211 256G 344 289 289 335H 404 349 349 394I 362 307 307 353
Pum
ping
spe
ed [l
s-1]
[Torr] Inlet pressure
1 1 0
1 0 - 4
1 0 2
1 0 3
1 0 4
1 0 - 2 1 0 - 1 1 0 0 1 0 - 3
1 0 - 6 1 0 - 5 1 0 - 4 1 0 - 3 1 0 - 2 [Pa]
VG400/VG350 4300 ls-1 N2
VG400/VG350/ISO320F/VG300 2700 ls-1 H2
ISO320F 4000 ls-1 N2 VG300 3800 ls-1 N2
*1:ThemaximumgasflowvalueappliesforN2orArgaspumpedcontinuously,withwatercoolingtemperatureunder25degreesCandabackingpumpof10,000l/minsizeorlargerused.Thevalueischangedifoperatedunderdifferentconditions
<=
