[High Precision] Motorized X-Axis, Linear Ball Slide...

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1445 [High Precision] Motorized X-Axis, Linear Ball Slide Stages Similar Products Comparison Points Travel Accuracy One Side Positioning Accuracy: 5μm Q X-Axis Q Features: Motor is selectable and can be easily upgraded. Clean grease is applied to the drive section. 50 4-4.5 Through, Ø8 Counterbore (M4 Screw Hole) 7 8-M4 Depth 5.5 8-M3 Depth 5.5 60 25 25 16 16 116 60 50 25 25 16 16 Ø12 Handle 30 17 MAX126 50 16 35 30 56 50 7 4-4.5 Through, Ø8 Counterbore (M4 Screw Hole) 8-M4 Depth 5.5 8-M3 Depth 5.5 150.5 75.5 75 69.5 70 25 25 16 16 60 25 25 16 Ø12 16 Handle 30 17 MAX165.5 50 30 16 50 4-4.5 Through, Ø8 Counterbore (M4 Screw Hole) 7 8-M4 Depth 5.5 8-M2 Depth 5.5 60 25 25 16 16 135.5 75.5 69.5 60 25 25 16 16 Ø12 Handle 30 30 16 17 50 MAX145.5 50 4-4.5 Through, Ø8 Counterbore (M4 Screw Hole) 7 8-M4 Depth 5.5 8-M3 Depth 5.5 131 75 56 50 70 25 25 16 16 60 25 25 16 16 Handle Ø12 30 17 16 35 30 50 MAX146 50 4-4.5 Through, Ø8 Counterbore (M4 Screw Hole) 7 8-M4 Depth 5.5 8-M3 Depth 5.5 60 25 25 16 16 116 60 50 25 25 16 16 Ø12 Handle 30 17 MAX126 50 16 35 30 56 50 4-4.5 Through, Ø8 Counterbore (M4 Screw Hole) 7 8-M4 Depth 5.5 8-M3 Depth 5.5 131 75 50 70 25 25 16 16 60 25 25 16 16 Handle Ø12 30 17 16 35 30 50 MAX146 56 XCV620-C-N XCV630-C-N XCV620-F-N XCV630-F-N XCV620-G-N XCV630-G-N M Material SUS440C Equivalent S Surface Treatment Electroless Nickel Plating A Accessory SCB4-12 4 pcs. When ordering, select Part Number and Values from Selection Steps 1 ~ 3 . 1 Part Number - 2 Motor - 3 Cable XCV620 - C - N 1446 1 Part Number 2 Motor 3 Cable Mechanical Specification Accuracy Standards Stage (mm) Travel Distance (mm) Weight (kg) One-Way Positioning Accuracy Moment Rigidity ("/N·cm) Pitching Yawing Pitching Yawing Rolling XCV620 C (Standard) F (High Torque) G (High Resolution) N (None) Cable is sold separately. Please refer to P.1462 MSCB # Selection. 60x60 20 0.78 (0.87* 1 ) 5μm 0.08 0.05 0.05 20" 15" XCV630 60x70 30 0.9 (0.99* 1 ) 5μm 0.08 0.05 0.05 20" 15" *1 When Motor F (High Torque) is selected E " A value varies depending on the motor. Q Common Specifications Feed Screw Ball Screw Ø8, Lead 1 Guide Linear Ball Guide Resolution *2 Full 2μm/Pulse (1μm/Pulse) * 3 Half 1μm/Pulse (0.5μm/Pulse) * 3 Fine Feed (when 1/20 resolution) 0.1μm(0.05μm) Max. Speed *4 20mm/sec (30mm/sec)* 5 (Pulse Rate of motor: 5kHz) Repeatability ±0.5μm Load Capacity 49N Lost Motion 1μm Backlash 1μm Motion Straightness 3μm Parallelism 15μm Motion Parallelism 10μm *2 Stage travel distance per one pulse. *3 Values in ( ) are for values when Motor Option G (High Resolution) is selected. *4 Max. speed capable with recommended controller driving in Full Step mode, when stage loaded at a max load capacity. (A value varies depending on the driving controller or load.) *5 Value in ( ) is when Motor Option F (High Resolution) is selected. " A value varies depending on motors. Q Connector Pin Configuration 1 2 3 4 11 5 10 9 8 6 12 7 Q Wiring Diagram Sensor Circuit Board 1 2 3 4 5 6 7 8 9 10 11 12 Blue Red Orenge Green Black Motor Lead Motor Lead Motor Lead Motor Lead Motor Lead CWLS Output CCWLS Output Spare Power Input (+) ORG Output Power Input (-) F.G. MOTOR CWLS ORG1 CCWLS Vin GND Regulator Q Electrical Specifications Motor C F G Motor Type 5-Phase Stepping Motor 0.75A/Phase (Oriental Motor Co., Ltd.) Step Angle 0.72° 0.72° 0.36° Connector Recipient Side Applicable Connector HR10A-10P-12S (73) (Hirose Electric Co., Ltd.) Sensor Limit Sensor Provided Home Sensor Photomicro Sensors EE-SX4134 (OMRON Corp.) Near Home Sensor - Power Supply Voltage DC5~24V ±10% Current Consumption Total 60mA or less Control Output NPN Open Collector Output DC5 ~ 24V, 8mA or less Residual Voltage 0.3V or less (when load current is 2mA) Output Logic When Detecting (Dark), Output Transistor is OFF. (Non-Conducting) Q Timing Chart XCV620 CW Limit CCW Limit Opposite of Home Edge Home Position Edge (Stroke Center) XCV630 CCW Limit CW Limit Opposite of Home Edge Home Position Edge (Stroke Center) Mechanical Stopper CCW Limit CW Limit Home Position Sensor Not detected (Light seen) Detected (Light blocked) Not detected (Light seen) Detected (Light blocked) Not detected (Light seen) Detected (Light blocked) Mechanical Limit Mechanical Limit Opposite of Home Edge Home Edge CW Limit Stroke Center CCW Limit (Unit: mm) CWDirection CCWDirection Coordinate Position Mechanical Limit CW Limit Home Position Edge Stroke Center Other Signal Edge CCW Limit Mechanical Limit XCV620 Homing 11 10.5 0 5 10.5 13 XCV630 Homing 16 15.5 0 5 15.5 18 · Homing is: When MSCTL102 controller is used, and Homing of Type 4 is executed. · The coordinates shown are design values. There may be approx. ±0.5mm on the physical dimensions. Q Recommended Homing Method Type3 Inspection in CCW direction is conducted, and inspection process of CCW side of ORG Signal is performed. Type4 Inspection in CW direction is conducted, and inspection process of CW side of ORG Signal is performed. Type9 After completion of inspection of Type 3, inspection process of CCW side of TIMING Signal is performed. Type10 After completion of inspection of Type 4, inspection process of CW side of TIMING Signal is conducted.

Transcript of [High Precision] Motorized X-Axis, Linear Ball Slide...

Page 1: [High Precision] Motorized X-Axis, Linear Ball Slide Stagessg.misumi-ec.com/pdf/fa/2013/p1445.pdf · [High Precision] Motorized X-Axis, Linear Ball Slide Stages A ... Regulator Q

1445

[High Precision] Motorized X-Axis, Linear Ball Slide Stages

Similar Products Comparison Points Travel Accuracy One Side Positioning Accuracy: 5μm

Q X-Axis

Q Features: Motor is selectable and can be easily upgraded. Clean grease is applied to the drive section.

50

4-4.5 Through, Ø8 Counterbore (M4 Screw Hole)

7

8-M4 Depth 5.5

8-M3 Depth 5.5

6025

2516

16

11660

50252516 16

Ø12

Handle

30 17

MAX12650

1635

30

56

50

7

4-4.5 Through, Ø8 Counterbore (M4 Screw Hole)

8-M4 Depth 5.5

8-M3 Depth 5.5

150.575.575

69.57025 25

1616

6025

2516

Ø1216

Handle

30 17

MAX165.550

3016

50

4-4.5 Through, Ø8 Counterbore(M4 Screw Hole)

7

8-M4 Depth 5.5

8-M2 Depth 5.5

6025

2516

16

135.575.5

69.560

252516 16

Ø12

Handle

30 301617

50MAX145.5

50

4-4.5 Through, Ø8 Counterbore (M4 Screw Hole)

7

8-M4 Depth 5.5

8-M3 Depth 5.5

13175 56

507025 25

1616

6025

2516

16

Handle

Ø12

30 17 1635

30

50MAX146

50

4-4.5 Through, Ø8 Counterbore (M4 Screw Hole)

7

8-M4 Depth 5.5

8-M3 Depth 5.5

6025

2516

16

11660

50252516 16

Ø12

Handle

30 17

MAX12650

1635

30

56

50

4-4.5 Through, Ø8 Counterbore (M4 Screw Hole)

7

8-M4 Depth 5.5

8-M3 Depth 5.5

13175

507025 25

1616

6025

2516

16

Handle

Ø12

30 17 1635

30

50MAX146

56

XCV620-C-N XCV630-C-N

XCV620-F-N XCV630-F-N

XCV620-G-N XCV630-G-N

MMaterial SUS440C Equivalent

SSurface Treatment Electroless Nickel Plating

AAccessory SCB4-12 4 pcs.

When ordering, select Part Number and Values from Selection Steps 1~3.

1Part Number - 2Motor - 3Cable

XCV620 - C - N

1446

CAD Data Folder Name: 28_Stages

1Part Number 2Motor 3Cable

Mechanical Specification Accuracy Standards

Stage (mm)

Travel Distance (mm)

Weight (kg)

One-Way Positioning Accuracy

Moment Rigidity ("/N·cm)Pitching Yawing

Pitching Yawing Rolling

XCV620C

(Standard) F

(High Torque) G

(High Resolution)

N (None)

Cable is sold separately. Please refer to P.1462

MSCB# Selection.

60x60 20 0.78 (0.87*1) 5μm 0.08 0.05 0.05 20" 15"

XCV630 60x70 30 0.9 (0.99*1) 5μm 0.08 0.05 0.05 20" 15"

*1 When Motor F (High Torque) is selected E" A value varies depending on the motor.

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Order Quantity

Standard Service Non-Standard Service

Regular Quantity Large Quantity Large Quantity

Quantity 1~3 4~10 11~Days to ship Standard +5 Days To Be Quoted

Q Common Specifications

Feed Screw Ball Screw Ø8, Lead 1Guide Linear Ball Guide

Resolution *2

Full 2μm/Pulse (1μm/Pulse) *3

Half 1μm/Pulse (0.5μm/Pulse) *3

Fine Feed (when 1/20 resolution)

0.1μm(0.05μm)

Max. Speed *420mm/sec (30mm/sec)*5

(Pulse Rate of motor: 5kHz)

Repeatability ±0.5μmLoad Capacity 49NLost Motion 1μm

Backlash 1μmMotion Straightness 3μmParallelism 15μm

Motion Parallelism 10μm

*2 Stage travel distance per one pulse.*3 Values in ( ) are for values when Motor Option G (High Resolution) is selected.*4 Max. speed capable with recommended controller driving in Full Step mode, when stage loaded

at a max load capacity. (A value varies depending on the driving controller or load.)

*5 Value in ( ) is when Motor Option F (High Resolution) is selected. " A value varies depending on motors.

Q Connector Pin Configuration

1

2

3

4

11

5

10

9

8

6

12

7

Q Wiring Diagram

Sensor Circuit Board123456789

101112

BlueRedOrengeGreenBlack

Motor LeadMotor LeadMotor LeadMotor LeadMotor LeadCWLS OutputCCWLS OutputSparePower Input (+)ORG OutputPower Input (-)F.G.

MOTOR

CWLS

ORG1

CCWLSVin

GND

Regulator

Q Electrical Specifications

Motor C F G

MotorType 5-Phase Stepping Motor 0.75A/Phase (Oriental Motor Co., Ltd.)

Step Angle 0.72° 0.72° 0.36°

ConnectorRecipient Side

Applicable ConnectorHR10A-10P-12S (73) (Hirose Electric Co., Ltd.)

Sensor

Limit Sensor Provided

Home Sensor Photomicro Sensors EE-SX4134 (OMRON Corp.)

Near Home Sensor -

Power Supply Voltage DC5~24V ±10%

Current Consumption Total 60mA or less

Control OutputNPN Open Collector Output DC5 ~ 24V, 8mA or less

Residual Voltage 0.3V or less (when load current is 2mA)

Output Logic When Detecting (Dark), Output Transistor is OFF. (Non-Conducting)

Q Timing Chart

XCV620

CW Limit CCW Limit

Opposite of Home Edge Home Position Edge (Stroke Center)

XCV630

CCW Limit CW Limit

Opposite of Home Edge Home Position Edge (Stroke Center)

Mechanical Stopper

CCW Limit

CW Limit

Home Position Sensor

Not detected (Light seen)Detected (Light blocked)

Not detected (Light seen)Detected (Light blocked)

Not detected (Light seen)Detected (Light blocked)

Mechanical Limit Mechanical LimitOpposite of Home EdgeHome Edge

CW Limit Stroke Center CCW Limit

(Unit: mm) CWDirection CCWDirection

Coordinate

Position

Mechanical

LimitCW Limit

Home Position Edge Stroke Center

Other

Signal EdgeCCW Limit

Mechanical

Limit

XCV620 Homing 11 10.5 0 5 10.5 13

XCV630 Homing 16 15.5 0 5 15.5 18

· Homing is: When MSCTL102 controller is used, and Homing of Type 4 is executed. · The coordinates shown are design values. There may be approx. ±0.5mm on the physical dimensions.

Q Recommended Homing Method

Type3 Inspection in CCW direction is conducted, and inspection process of CCW side of ORG Signal is performed.

Type4 Inspection in CW direction is conducted, and inspection process of CW side of ORG Signal is performed.

Type9 After completion of inspection of Type 3, inspection process of CCW side of TIMING Signal is performed.

Type10 After completion of inspection of Type 4, inspection process of CW side of TIMING Signal is conducted.

+5 4~10