FIB-SEM SII Xvision 200TB log sheet - University of Tokyoeric/Equipments/Characterization/...Year:...

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Year: FIB-SEM SII Xvision 200TB log sheet Date MM:DD User Lab Start time End time Main pres. (Pa) FIB pres. (Pa) EB pres. (Pa) Emi (μA) Ext (kV) Sup (kV) Apperture current (uA) Did perform Heating Ext. Auto? Used beam Used gas Remarks or problems Solution 04/23 Eric Mita Lab 8:30 11:30 . - 2 8e 5 . - 2 6e 6 . - 8 3e 8 . 2 01 . 6 62 . 0 873 View: 10 Ufine: 80 Fine: 300 Mid: 700 Rough: 6500 Urough: 27000 Heating Ext. Auto FIB SEM Ar C W T View: Ufine: Fine: Mid: Rough: Urough: Heating Ext. Auto FIB SEM Ar View: Ufine: Fine: Mid: Rough: Urough: Heating Ext. Auto FIB SEM Ar View: Ufine: Fine: Mid: Rough: Urough: Heating Ext. Auto FIB SEM Ar View: Ufine: Fine: Mid: Rough: Urough: Heating Ext. Auto FIB SEM Ar View: Ufine: Fine: Mid: Rough: Urough: Heating Ext. Auto FIB SEM Ar View: Ufine: Fine: Mid: Rough: Urough: Heating Ext. Auto FIB SEM Ar

Transcript of FIB-SEM SII Xvision 200TB log sheet - University of Tokyoeric/Equipments/Characterization/...Year:...

Page 1: FIB-SEM SII Xvision 200TB log sheet - University of Tokyoeric/Equipments/Characterization/...Year: FIB-SEM SII Xvision 200TB log sheet Date MM:DD User Lab Start time End time Main

Year: FIB-SEM SII Xvision 200TB log sheet

DateMM:DD

User LabStart timeEnd time

Main pres. (Pa)FIB pres. (Pa)EB pres. (Pa)

Emi (μA)Ext (kV)Sup (kV)

Apperturecurrent (uA)

Did performHeating

Ext. Auto?

Usedbeam

Usedgas

Remarks or problems Solution

04/23 Eric Mita Lab 8:3011:30

. -2 8e 5

. -2 6e 6

. -8 3e 8

.2 01

.6 62.0 873

View: 10Ufine: 80Fine: 300Mid: 700Rough: 6500Urough: 27000

Heating

Ext. Auto

FIBSEMAr

CWT

View:Ufine:Fine:Mid:Rough:Urough:

Heating

Ext. Auto

FIBSEMAr

View:Ufine:Fine:Mid:Rough:Urough:

Heating

Ext. Auto

FIBSEMAr

View:Ufine:Fine:Mid:Rough:Urough:

Heating

Ext. Auto

FIBSEMAr

View:Ufine:Fine:Mid:Rough:Urough:

Heating

Ext. Auto

FIBSEMAr

View:Ufine:Fine:Mid:Rough:Urough:

Heating

Ext. Auto

FIBSEMAr

View:Ufine:Fine:Mid:Rough:Urough:

Heating

Ext. Auto

FIBSEMAr