FIB-SEM SII Xvision 200TB log sheet - University of Tokyoeric/Equipments/Characterization/...Year:...
Transcript of FIB-SEM SII Xvision 200TB log sheet - University of Tokyoeric/Equipments/Characterization/...Year:...
Year: FIB-SEM SII Xvision 200TB log sheet
DateMM:DD
User LabStart timeEnd time
Main pres. (Pa)FIB pres. (Pa)EB pres. (Pa)
Emi (μA)Ext (kV)Sup (kV)
Apperturecurrent (uA)
Did performHeating
Ext. Auto?
Usedbeam
Usedgas
Remarks or problems Solution
04/23 Eric Mita Lab 8:3011:30
. -2 8e 5
. -2 6e 6
. -8 3e 8
.2 01
.6 62.0 873
View: 10Ufine: 80Fine: 300Mid: 700Rough: 6500Urough: 27000
Heating
Ext. Auto
FIBSEMAr
CWT
View:Ufine:Fine:Mid:Rough:Urough:
Heating
Ext. Auto
FIBSEMAr
View:Ufine:Fine:Mid:Rough:Urough:
Heating
Ext. Auto
FIBSEMAr
View:Ufine:Fine:Mid:Rough:Urough:
Heating
Ext. Auto
FIBSEMAr
View:Ufine:Fine:Mid:Rough:Urough:
Heating
Ext. Auto
FIBSEMAr
View:Ufine:Fine:Mid:Rough:Urough:
Heating
Ext. Auto
FIBSEMAr
View:Ufine:Fine:Mid:Rough:Urough:
Heating
Ext. Auto
FIBSEMAr