Download - FIB-SEM SII Xvision 200TB log sheet - University of Tokyoeric/Equipments/Characterization/...Year: FIB-SEM SII Xvision 200TB log sheet Date MM:DD User Lab Start time End time Main

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Page 1: FIB-SEM SII Xvision 200TB log sheet - University of Tokyoeric/Equipments/Characterization/...Year: FIB-SEM SII Xvision 200TB log sheet Date MM:DD User Lab Start time End time Main

Year: FIB-SEM SII Xvision 200TB log sheet

DateMM:DD

User LabStart timeEnd time

Main pres. (Pa)FIB pres. (Pa)EB pres. (Pa)

Emi (μA)Ext (kV)Sup (kV)

Apperturecurrent (uA)

Did performHeating

Ext. Auto?

Usedbeam

Usedgas

Remarks or problems Solution

04/23 Eric Mita Lab 8:3011:30

. -2 8e 5

. -2 6e 6

. -8 3e 8

.2 01

.6 62.0 873

View: 10Ufine: 80Fine: 300Mid: 700Rough: 6500Urough: 27000

Heating

Ext. Auto

FIBSEMAr

CWT

View:Ufine:Fine:Mid:Rough:Urough:

Heating

Ext. Auto

FIBSEMAr

View:Ufine:Fine:Mid:Rough:Urough:

Heating

Ext. Auto

FIBSEMAr

View:Ufine:Fine:Mid:Rough:Urough:

Heating

Ext. Auto

FIBSEMAr

View:Ufine:Fine:Mid:Rough:Urough:

Heating

Ext. Auto

FIBSEMAr

View:Ufine:Fine:Mid:Rough:Urough:

Heating

Ext. Auto

FIBSEMAr

View:Ufine:Fine:Mid:Rough:Urough:

Heating

Ext. Auto

FIBSEMAr

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