A SIMPLE GUIDE TO AEROSOL-DEPOSITION
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A SIMPLE GUIDE TO AEROSOL-DEPOSITION High Performance Coatings
Transcript of A SIMPLE GUIDE TO AEROSOL-DEPOSITION
A SIMPLE GUIDE TO
AEROSOL-DEPOSITION
High Performance Coatings
Heraeus High Performance Coatings
The AD is a coating method based upon the Room Temperature Impact Consolidation
› Particles (sub-μm to several μm) are accelerated to several 100 m/s
and sprayed on the substrate surface
› Particles fracture due to high kinetic energy to nm-sized particles
› Formation and growth of dense films
› Highly vectored particle trajectory with high process stability and reproducibility
due to generic nozzle design
PRINCIPLES OF AEROSOL DEPOSITION
2/4/20212
Heraeus High Performance Coatings
› at room temperature (no post annealing)
(instead of using high evaporation temperatures like for PVD or CVD;
instead of substrate heating)
› low vacuum (1 mbar)
› no chemical reaction or phase transitions (providing final film
material as small particles of the same composition)
› high process stability and reproducibility
CORE FEATURES OF AEROSOL DEPOSITION
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Depositing thin films in the range of 1 – 70 µm
ADM-Al2O3 Steel foil
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› good film adhesion
› very high film density, no cracks
› no pretreatment necessary
› high deposition rate (1-2 µm/min)
› processing of non-temperature stable, reactive or ultra-high
temperature materials
› wide variety of substrates (e.g., ceramics, metals, plastics)
ADVANTAGES OF AEROSOL DEPOSITION
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High performance ceramic coating
Demonstration of anticorrosive coating and film density of AD-film.
Masked and alumina coated copper substrate (left) after coating
and (right) after heat treatment at 400 °C in air.
ADM-Al2O3
Heraeus High Performance Coatings
FILM MATERIALS THAT WORK
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Selection of successfully deposited materials
Functional ceramics:
› e.g., Al2O3, YSZ, AlN, BaTiO3, Y2O3, PbZrTiO3,
Ti3SiC2, Si3N4
Metals:
› e.g., Cu, Ag, W
Components for battery application
Composite materials
(ceramics/metals)
Y2O3 on Al2O3 WO3 on Polyimide
5 mm
Al2O3 on sapphire
1 µm
Lithium garnet on alumina
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SUBSTRATES THAT WORK
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› Metals
e.g., steel, aluminium, copper
› Ceramics
e.g., Al2O3, YSZ, AlN, Si3N4
› Glass, Silicon
› Polymers
› Structured substrates
e.g., gold- or platinum electrodes on ceramics
Selection of successfully used substrates
Al2O3
Glass
Al2O3 (7 µm) on glassAl2O3 (2 µm) on circuit path Al2O3 (2 µm) on PolyimideAl2O3 (6 µm) on silicon
Al2O3 on structured amorphous
metal bolt (Heraeus AMLOY)
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APPLICATION AREAS
2/4/20217
Comparison of different plasma corrosion coatings Drift of temperature after long-term
high temperature exposure
Medical
components
Screen printed ADM PVD
Power
Electronics
Semiconductors Sensors Vacuum
Technologies
AD-Hydroxyapatite coating on dental implants
AD-HPa
coating
Current applications for Aerosol Deposition
Titanium fixture
HAPPY TO HELP WITH MORE
SPECIFIC INFORMATION
Heraeus High Performance Coatings
E-Mail: [email protected]
www.heraeus-high-performance-coatings.com
