National Chiao Tung University, National Chiao Tung University, DepartmentDepartment of Electrical & Control Engineeringof Electrical & Control EngineeringμμSystem & Control LaboratorySystem & Control Laboratory

L-Edit Tutorial

cwchangAdvisor: professor J.C. Chiou

μSystem & Control Lab., Dept. of Electrical & Control Eng.,National Chiao Tung University

2009/10/29

Drawing

Standard

Locator

Editing

Layers palette

Mouse buttons

Status Bar

Layout area

L-Edit Operation Screen

Generate Cross-Section Dialog

gd: grow deposition, e : etching

Process Definition File for Mumps

Clear Dark

Finished Product

layout

Mask define

Mask Definition

1.2 button mouse and 3 button mouse.(Ctrl)2.keyboard

1. Original point transfer (Q)2. zoom window(z)3. zoom in (+)4. zoom out (-)5. move view (←↑→↓)6. exchange view (x)

3.Copy cell in different file (the same setup)4.Copy cell in different file (different setup)5.Array & rotation

Operation

Example: MUMPS

• Multi-User MEMS Process=MUMPS• 3-layer PolySilicon surface micromachining process

Source: MUMPS Design Handbook

Example: MUMPS

Source: MUMPS Design Handbook

Anchor 1

Poly 1, Poly 2 via

Anchor 2

Example: CMOS-MEMS

• TSMC .35um CMOS process

http://www.memscap.com/en_mumps.html

Example: CMOS-MEMS

• Post-micromachining process

Source: tsmc CMOS-MEMS process Source: C.Wang, JMEMS(2007)

Source: CIC

Case Study (I)-Slider

A

A’

BB’

A-A’

B-B’

Movable part = poly1Anchor = poly2

Case Study (II)-Hinge (on the substrate)

Case Study (III)-Hinge (on the poly1)

A A’

B B’

A-A’

B-B’

C

C’

C-C’

Case Study (IV)-Micro Motor

Dimple

Reference

• L-Edit student version & L-Edit manual: http://www.tanner.com.tw/EDA/products/ledit/default.htm

• Poly-Mumps:http://www.memscap.com/en_mumps.html

• Mumps handbook:http://www2.ece.jhu.edu/faculty/andreou/487/Resources/Foundry/PolyMUMPS/PolyMUMPs_DR_v10.pdf

• CIC 國家晶片系統設計中心 CMOS-MEMS platform• www.google.com