20091029%20 l edit%20by%20cwchang%20(for%20std)

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National Chiao Tung University, National Chiao Tung University, Department Department of Electrical & Control Engineering of Electrical & Control Engineering μ μ System & Control Laboratory System & Control Laboratory L-Edit Tutorial cwchang Advisor: professor J.C. Chiou μSystem & Control Lab., Dept. of Electrical & Control Eng., National Chiao Tung University 2009/10/29

Transcript of 20091029%20 l edit%20by%20cwchang%20(for%20std)

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National Chiao Tung University, National Chiao Tung University, DepartmentDepartment of Electrical & Control Engineeringof Electrical & Control EngineeringμμSystem & Control LaboratorySystem & Control Laboratory

L-Edit Tutorial

cwchangAdvisor: professor J.C. Chiou

μSystem & Control Lab., Dept. of Electrical & Control Eng.,National Chiao Tung University

2009/10/29

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Drawing

Standard

Locator

Editing

Layers palette

Mouse buttons

Status Bar

Layout area

L-Edit Operation Screen

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Generate Cross-Section Dialog

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gd: grow deposition, e : etching

Process Definition File for Mumps

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Clear Dark

Finished Product

layout

Mask define

Mask Definition

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1.2 button mouse and 3 button mouse.(Ctrl)2.keyboard

1. Original point transfer (Q)2. zoom window(z)3. zoom in (+)4. zoom out (-)5. move view (←↑→↓)6. exchange view (x)

3.Copy cell in different file (the same setup)4.Copy cell in different file (different setup)5.Array & rotation

Operation

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Example: MUMPS

• Multi-User MEMS Process=MUMPS• 3-layer PolySilicon surface micromachining process

Source: MUMPS Design Handbook

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Example: MUMPS

Source: MUMPS Design Handbook

Anchor 1

Poly 1, Poly 2 via

Anchor 2

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Example: CMOS-MEMS

• TSMC .35um CMOS process

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http://www.memscap.com/en_mumps.html

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Example: CMOS-MEMS

• Post-micromachining process

Source: tsmc CMOS-MEMS process Source: C.Wang, JMEMS(2007)

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Source: CIC

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Case Study (I)-Slider

A

A’

BB’

A-A’

B-B’

Movable part = poly1Anchor = poly2

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Case Study (II)-Hinge (on the substrate)

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Case Study (III)-Hinge (on the poly1)

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A A’

B B’

A-A’

B-B’

C

C’

C-C’

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Case Study (IV)-Micro Motor

Dimple

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Reference

• L-Edit student version & L-Edit manual: http://www.tanner.com.tw/EDA/products/ledit/default.htm

• Poly-Mumps:http://www.memscap.com/en_mumps.html

• Mumps handbook:http://www2.ece.jhu.edu/faculty/andreou/487/Resources/Foundry/PolyMUMPS/PolyMUMPs_DR_v10.pdf

• CIC 國家晶片系統設計中心 CMOS-MEMS platform• www.google.com