X-Ray Reflection Data Analysis UpdateInformation can be extracted from XRR data: - Film thickness - Roughness

Ki is the direction of incident X-ray, pointing to sample.The recorded image is the reflected beam intensity imageSchematic of Experiment Geometry

Pilatus 100K Detector SystemPixel size 172 x 172 m2Format 487 x 195 = 94 965 pixels Active area 83.8 x 33.5 mm2Counting rate > 2x106 counts/s/pixel Energy range 3 30 keV Readout time < 2.7 ms Framing rate > 200 Hz

Sb thickness: t = (# of intensity peaks* Sb film lattice) =21*1.1273 nm = 23.7 nmSpecular reflection peak

The movie is in the link, watch the oscillation of the specular reflection peak during Sb growthIntensity of the peakMonitor Oscillation of Specular Reflection Peak during Sb Growth

Film Thickness vs Growth TimeFilm thickness obtained methods:

Quartz crystal microbalance: Directly from the calibrated QCM read out. Specular Reflection beam: Count the peak number and calculate the thicknessTwo methods agree well, Confirm the Sb film growth is layer by layer

Slice 1Linear scale Intensity vs pixel #Log scale Intensity vs pixel #Convert pixel # to Qz value, plot Intensity vs Qz.Note that the x axis is reversed due to the experiment set up, fringes along Qz can be observed.Background AreaBackground was subtracted to obtain accurate data.Analysis of the image frame after deposition:off-specular reflection peak

Fourier Transform 23 nm Transformed peak position tells Sb film thickness around 23 nm, agree well with thickness obtained from quartz crystal microbalance monitor during growth.

The signal is not so clear, may due to the background is not perfectly handled. Need to further modify the codes for background consideration.

Roughness (peak broaden), will be easier when the peak is sharper.

FFTConsider background and different data analysis methods to improve the resultClearer peak

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