V21 Version … · serves to apply a preload to the piezoelectric actuator. The single hinge and...

V21 Version

Piezo Tip/Tilt/Z Platform Series

Using piezo actuators as the driving

source, Piezo Tip/Tilt Platform can generate

θx, θy tilt, or also Z-direction motion, which is

used to drive the deflection of the reflective/

transmissive lens to change the direction of

the optical path.

Pie

zo T

ip/T

ilt Pla

tform

001

Piezo·Nano·Motion

Piezo Tip/Tilt/Z Platform

Piezoelectric Tip/tilt Platform is using piezoelectric actuators as driving components, and the internal design adopts a flexible

hinge parallel guiding structure. The external mechanical structure realizes single-axis or multi-axis angular deflection motion

through the expansion and contraction of internal multi piezoelectric actuators, and to ensure that the deflection mirror has

excellent motion accuracy and high stability, it can also use closed-loop control with built-in high-precision sensor to achieve

sub-micro-radian resolution and micro-radian positioning accuracy.

For closed-loop control, the sensor output monitoring

voltage is linear with the deflection angle of piezo

platform.

Drived by piezoelectric actuator and high stiffness structural

design make it can carry a len with an outer diameter of

80mm, 150mm or larger.

Three Kinds Motion Ways

Closed Loop Control with Higher Accuracy

High and Low Temperature Test

Large Load Capacity

1 axis motion 3 axes motion2 axes motion

Sensor output voltage [V]

Tilt

angl

e [m

rad]

002

Pie

zo T

ip/T

ilt Pla

tform

Applications

Optical Path Adjustment

Satellite Laser Communication

Michelson Interferometer

Laser Stabilization

Pie

zo T

ip/T

ilt Pla

tform

003

Piezo·Nano·Motion

Typical Application

Product Series

Measuring

Controll

Axis Models Tilt angle Resolution

θx

P22 3mrad（≈ 600"） 0.1 μrad（≈ 0.02"）P33.U2 3mrad（≈ 600"） 0.02 μrad（<0.01"）P33.U3 5mrad（≈ 1000"） 0.05 μrad（≈ 0.01"）P33.U4 6mrad（≈ 1200"） 0.1 μrad（≈ 0.02"）P33.U5 8.5mrad（≈ 1700"） 0.12μrad（≈ 0.02"）P33.U6 9mrad（≈ 1900"） 0.15μrad（≈ 0.03"）P33.U8 12.5mrad（≈ 2500"） 0.2μrad（≈ 0.04"）

θx, θy

P33.T2 3mrad（≈ 600"）/axis 0.02 μrad（<0.01"）P33.T3 5mrad（≈ 1000"）/axis 0.05 μrad（≈ 0.01"）P33.T4 6mrad（≈ 1200"）/axis 0.1 μrad（≈ 0.02"）P33.T5 8.5mrad（≈ 1700"）/axis 0.12μrad（≈ 0.02"）P33.T6 9mrad（≈ 1900"）/axis 0.15μrad（≈ 0.03"）P33.T8 12.5mrad（≈ 2500"）/axis 0.2μrad（≈ 0.04"）P34.T1 1.5mrad（≈ 300"）/axis 0.02 μrad（<0.01"）P34.T2 3mrad（≈ 600"）/axis 0.1 μrad（≈ 0.02"）P34.T4 6mrad（≈ 1200"）/axis 0.2 μrad（≈ 0.04"）

P31 25mrad（≈ 5100"）/axis 1 μrad（≈ 0.2"）P35 40mrad（≈ 8200"）/axis 1 μrad（≈ 0.2"）

XD-301 2.5mrad（≈ 500"）/axis ＜ 1μrad（＜ 0.2"）

θx, θy, ZP32

θx θy 6mrad（≈ 1200"）/axisZ 37.5μm

0.05 μrad（≈ 0.01"）0.5 nm

P36θx θy 0.7mrad（≈ 140"）/axisZ 10μm

0.02 μrad（<0.01"）0.1 nm

• Image processing / stabilization • Interlaced scannign, jitter • beam deflection • Laser micromachining • Light filter / switch

• beam deflection and stabilization • Optics,Laser scanning ,comminication • Image Stabilization and adaptive optics

Time [t]Am

plitu

de [m

rad]

004

Pie

zo T

ip/T

ilt Pla

tform

P22 series Piezo Tip/Tilt Platform is a one-dimensional θx axis deflection

platform. The flexible hinge guiding design has zero friction and static

resistance, excellent guiding precision, nano-radian resolution and

excellent positioning stability. With a beam deflection range of up

to 6mrad, it has an extremely fast response speed (milliseconds to

microseconds) and is ideal for dynamic operation (eg tracking, scanning,

drift and vibration cancellation) and positioning of optics and samples.

P22 Series Piezo Tip/Tilt Platform

Small Size, High Dynamic, Open/Closed-Loop

P22 Piezo tip/tilt platform (also called fast mirror/tilt mirror, beam deflection, phase shifter) provides higher acceleration and bandwidth than voice coil motor products, with a θx axis deflection range of 3mrad and a deflection resolution of 0.1μrad, and optional open or closed loop control, and the optional closed-loop sensor includes a strain sensor and a capacitive sensor for higher positioning accuracy.Ultra-small volume design with very fast response speed, with a Ø15mm lens for a 0.8ms step time.

Typical Application

• Image processing and stabilization • Laser scanning • Beam Deflection

• Interlaced scanning, jitter • Optical Filter / Switch • Sample Detection

Driving Principle

The platform is supported by one hinge and is pushed by a linear piezo actuator. The hinge defines the pivot point and serves to apply a preload to the piezoelectric actuator. The single hinge and single actuator design has the advantages of simple structure, small size, and high cost performance. If the operating environment temperature varies widely during angular deflection, it is recommended to use a differential drive piezoelectric deflection platform.

Recommended ControllersFrequency and Load Curves

• θx tilt • Tilt angle up to 4mrad • Sub-ms response time • High closed loop positioning accuracy

Characteristics

θx Tilt

E01 E72 E53

1 channelsoftware, analog, knob controlOpen/closed loopAve.current to 291mA/58mA

1 channelsoftware, analog controlOpen/closed loopAve.current to 50mA

1 channelsoftware, analog controlOpen/closed loopAve.current to 60mA

Note: please see "Piezo Controller Series" for detailed information.Load [g]

Reso

nant

freq

uenc

y [H

z]

Single hinge and single actuator structure design

Motion surface Body BasePZT

Flexible hinge

Mirror

Pie

zo T

ip/T

ilt Pla

tform

005

Piezo·Nano·Motion

ModelsSuffix S - closed loop Suffix K - open loop

P22.U3SP22.U3K

Units

Active axis θx

Tilt angle（0~120V） 2.5（≈ 520"） mrad±20%

Tilt angle（0~150V） 3（≈ 600"） mrad±20%

Sensor type SGS/-

Resolution （≈ 0.06"）0.3/0.1（≈ 0.02"） μrad

Linearity 0.2/- %F.S.

Repeatability 0.15/- %F.S.

Unloaded resonant frequency 3 kHz±20%

Unloaded step time 3/0.8 ms±20%

Unloaded operating frequency

10% travel 100Hz±20%

100% travel 40

El.capacitance 1.8 μF±20%

Material Steel

Mass 80 g±5%

Technical Data

Dimensions

Note: Above parameters are measured with the E00/E01 series piezo controller. The maximum driving voltage can be -20V~150V; for high reliability long-term use, the recommended driving voltage is 0~120V.

P22

cable length : 1.5m

006

Pie

zo T

ip/T

ilt Pla

tform

E00/E01 E70 E81-D

3 channels（with 1 constant voltage）Digital, analog, knob controlOpen/closed loopAve.current to 291mA

3 channels（with 1 constant voltage）Digital, analog controlOpen/closed loopAve.current to 70mA

3 channels（with 1 constant voltage）Analog controlOpen/closed loopAve.current to 50mA

Note: please see "Piezo Controller Series" for detailed information.

P33 Piezo Tip/Tilt Platform is a deflection platform with fast

response and compact size. It provides high-precision angular

motion of the top platform. Compared with other actuators,

the flexible hinge-guided piezoelectric deflection platform

provides higher acceleration. The step response time is in the

sub-millisecond range. The closed loop and open loop versions

have 6 different deflection ranges and beam deflections up to 25

mrad.


θx、θy Tilt

High Dynamics, Closed-Loop Version with High Precision

P33 series Piezoelectric Tip/Tilt Platform adopts frictionless and flexible hinge guiding structure design, insulated piezoelectric ceramic drive, achieving a deflection range of 12.5mrad, providing higher acceleration, fast response up to milliseconds or faster.Strain sensors are used at appropriate locations in the mechanical structure for high stability and positioning accuracy. They provide higher bandwidth and send position feedback signals to the controller. The sensors are connected in a bridge configuration to eliminate thermal drift and ensure high quality. Stability.It can carry 25.4mm standard diameter lens, and the maximum loadable lens diameter is 50mm, but its operating frequency will be lower.

Typical Application

• Image processing and stabilization • Interlaced scanning, jitter

• Laser scanning • Optical Filter / Switch • Laser Micromachining

• Beam Deflection • Adaptive optics, image stabilization • Interference

Applications

Piezo Tip/Tilt Platform that can offer very high tilt accuracy,

is used in Precision tracking.


• θx or θx、θy tilt • Tilt range to 12.5mrad • Sub-ms response time • High closed loop positioning accuracy • High temperature stability

Characteristics

Load [g]

Reso

nant

freq

uenc

y [H

z]

Rough tracking mechanism Rough tracking

camera

Far target

Telescope

Signal transmission and reception

Fine tracking mechanismFast Steering Mirror

Fine tracking camera

Pie

zo T

ip/T

ilt Pla

tform

007

Piezo·Nano·Motion

Measuring Tilt Angle

Laser collimator measureing the deflection angle of the P33.T2S piezo platform.

Load Step Time

P33.T8S piezoelectric deflection mirror with a 50g load up

to 100% tilt range, step time of about 40ms.

Open-loop Curve

P33.T8K piezoelectric deflection mirror voltage and deflection angle curve.

Closed-loop Curve

P33.T8S Piezoelectric deflection mirror voltage and deflection angle curve.


P33.T2SP33.T2K

P33.T3SP33.T3K

P33.T4SP33.T4K

P33.T5SP33.T5K

P33.T6SP33.T6K

P33.T8SP33.T8K

Units

Active axis θx, θy θx, θy θx, θy θx, θy θx, θy θx, θy

Tilt angle（0~120V）2.5（≈ 520"）

/±1.25( ≈ ±260")4（≈ 820"）

/±2( ≈ ±410")5（≈ 1030"）

/±2.5( ≈ ±520")6.8（≈ 1400"）/±3.4( ≈ ±700")

7.5（≈ 1550"）/±3.75( ≈ ±770")

10（≈ 2060"）/±5( ≈ ±1030")

mrad±20%

Tilt angle（0~150V）3（≈ 600"）

/±1.5( ≈ ±300")5（≈ 1000"）

/±2.5( ≈ ±500")6（≈ 1200"）/±3( ≈ ±600")

8.5（≈ 1700"）/±4.25( ≈ ±850")

9（≈ 1900"）/±4.5( ≈ ±950")

12.5（≈ 2500"）/±6.25(≈±1250")

mrad±20%

Sensor type SGS/- SGS/- SGS/- SGS/- SGS/- SGS/-

Resolution0.05(≈0.01")0.02(＜0.01")

0.15(≈0.03")0.05(≈0.01")

0.25(≈0.05")0.1(≈0.02")

0.35(≈0.07")0.12(≈0.02")

0.45(≈0.09")0.15(≈0.03")

0.5(≈0.1")0.2(≈0.04")

μrad

Linearity 0.1/- 0.15/- 0.2/- 0.25/- 0.25/- 0.25/- %F.S.

Repeatability 0.02/- 0.02/- 0.02/- 0.02/- 0.02/- 0.02/- %F.S.

Unloaded resonant frequency 3.7 3.5 3.4 3.3 3.2 3.1 kHz±20%

Unloaded step time 1.5/1 2.5/1.5 3/2 5/2.5 6/3.5 8/4 ms±20%


10% travel 1000 800 500 400 300 150Hz±20%

100% travel 80 60 40 30 25 15

El.capacitance 3.6/axis 5.2/axis 7.2/axis 9/axis 11/axis 14.5/axis μF±20%

Material Steel Steel Steel Steel Steel Steel

Mass 190 220 240 265 290 340 g±5%

Platform Length L 37 46 55 64 73 91

Technical Data（2-Axisθx Tilt）


Control input voltage[V]

500

1000

1500

2000

2500


Tilt

angl

e["]

Tilt

angl

e["]

008

Pie

zo T

ip/T

ilt Pla

tform

Technical Data（1-Axisθx Tilt）

Dimensions


P33 P33

(with Square side fixed structure)


P33.U2SP33.U2K

P33.U3SP33.U3K

P33.U4SP33.U4K

P33.U5SP33.U5K

P33.U6SP33.U6K

P33.U8SP33.U8K

Units

Active axis θx θx θx θx θx θx

Tilt angle（0~120V）2.5（≈520"）

/±1.25(≈±260")4（≈820"）

/±2(≈±410")5（≈1030"）

/±2.5(≈±520")6.8（≈1400"）/±3.4(≈±700")

7.5（≈1550"）/±3.75(≈±770")

10（≈2060"）/±5(≈±1030")

mrad±20%

Tilt angle（0~150V）3（≈600"）

/±1.5(≈±300")5（≈1000"）

/±2.5(≈±500")6（≈1200"）/±3(≈±600")

8.5（≈1700"）/±4.25 ≈±850")

9（≈1900"）/±4.5(≈±950")

12.5（≈2500"）/±6.25(≈±1250")

mrad±20%

Sensor type SGS/- SGS/- SGS/- SGS/- SGS/- SGS/-

Resolution0.05(≈0.01")0.02(＜0.01")

0.15(≈0.03")0.05(≈0.01")

0.25(≈0.05")0.1(≈0.02")

0.35(≈0.07")0.12(≈0.02")

0.45(≈0.09")0.15(≈0.03")

0.5(≈0.1")0.2(≈0.04")

μrad

Linearity 0.1/- 0.15/- 0.2/- 0.25/- 0.25/- 0.25/- %F.S.

Repeatability 0.02/- 0.02/- 0.02/- 0.02/- 0.02/- 0.02/- %F.S.

Unloaded resonant frequency 3.7 3.5 3.4 3.3 3.2 3.1 kHz±20%

Unloaded step time 1.5/1 2.5/1.5 3/2 5/2.5 6/3.5 8/4 ms±20%


10% travel 1000 800 500 400 300 150Hz±20%

100% travel 80 60 40 30 25 15

El.capacitance 3.6 5.2 7.2 9 11 14.5 μF±20%

Material Steel Steel Steel Steel Steel Steel

Mass 190 220 240 265 290 340 g±5%

Platform length L 37 46 55 64 73 91 mm±0.1

cable length : 1.5m

cable length : 1.5m

Pie

zo T

ip/T

ilt Pla

tform

009

Piezo·Nano·Motion

E00 E70 E72





P34 series piezoelectric deflection mirrors are designed for larger diameter lens and can be loaded with lens up to 80 mm in diameter. Their differential drive exhibits excellent angular positioning stability over a wide temperature range.P34's structure allows the top platform to perform high dynamic precision deflection motion on two orthogonal axes with common pivot points (parallel motion). A variety of lens mounting holders are available to achieve optimal thermal adaptation to different lens materials. Open-loop, closed-loop versions are available, both versions have sub-μrad resolution and tilt angles up to 6mrad (equal to beam deflection of 12mrad).


High Stability, Linearity, Dynamics, Long Life

CoreTomororow's piezo tip/tilt system is based on a parallel kinematic design. The internal four piezo actuators are paired differential controls that determine the platform deflection motion, which makes P34 piezo platform have excellent angular positioning stability in a wide temperature range.The internal piezoelectric actuator ensures maximum reliability. Special resin insulation makes it resistant to environmental humidity and leakage current faults. Therefore, it is far superior to the traditional piezoelectric actuator in reliability and life.

Frequency and Load Curves

Recommended Controllers

Typical Application

• Image processing and stabilization • Optical filters

• Active and adaptive optics • Laser scanning / beam deflection

• Beam stabilization • Error correction for polygon mirrors

Can Load A Mirror with Large Diameter

P34 piezo tip/tilt platform can support lens up to 80mm in

diameter for beam deflection of 12mrad.

• θx, θy tilt • Tilt range to 6mrad • Sub-ms response • High closed loop positioning accuracy • High temperature stability

Characteristics

* Custom large size, large load is available.Closed-loop Curve

The displacement and tilt angle curve of P34.T1S loading

200g.

00

2 4 6 8 10

50

100

150

200

250

300

350


Tilt

angl

e["]

Load [g]

Reso

nant

freq

uenc

y [H

z]

010

Pie

zo T

ip/T

ilt Pla

tform

Technical Data

Dimensions

P34


P34.T1SP34.T1K

P34.T2SP34.T2K

P34.T4SP34.T4K

Units

Active axis θx, θy θx, θy θx, θy

Tilt angle（0~120V）1.2( ≈ 250")

or ±0.6( ≈ 120")2.5( ≈ 520")

or ±1.25( ≈ ±260")5( ≈ 1030")

or ±2.5( ≈ ±520")mrad±20%

Tilt angle（0~150V）1.5( ≈ 310 秒 )

or ±0.75( ≈ ±160")3( ≈ 620")

or ±1.5( ≈ ±310")6( ≈ 1240 秒 )

or ±3( ≈ ±620")mrad±20%

Sensor type SGS/- SGS/- SGS/-

Resolution0.1( ≈ 0.02")

0.02( ＜ 0.01")0.2( ≈ 0.04")0.1( ≈ 0.02")

0.4( ≈ 0.08")0.2( ≈ 0.04")

μrad

Linearity 0.1/- 0.2/- 0.3/- %F.S.

Repeatability 0.02/- 0.02/- 0.02/- %F.S.

Unloaded resonant frequency 2 1.4 0.9 kHz±20%

Unloaded step time 2/1 4/2 10/4 ms±20%


10% travel 1000 500 240Hz±20%

100% travel 100 50 20

El.capacitance 3.6/axis 7.2/axis 14.5/axis μF±20%

Material Aluminum Aluminum Aluminum

Mass 200 400 800 g±5%

Platform length L 38 56 92 mm±0.1


Step Time

Controlled by E51.B piezo controller, P34.T2S piezo tip/tilt platform's step time to 80%

deflection range is 3ms; the step time of loading 200g to 100% tilt range is about 15ms.

Measureing Tilt Angle

The deflection angle range of P34.

T2S is measured by a laser collimator.

cable length : 1.5m

Pie

zo T

ip/T

ilt Pla

tform

011

Piezo·Nano·Motion

E00 E70 E51



3 channels（with 1 constant voltage）Analog controlClosed loopAve.current to 25mA


P31 piezo tip/tilt platform can offer a beam deflection angle

of 50 mrad. This deflection system is based on a proven

parallel kinematics design with two axes of motion being

perpendicular coplanar axes with common fixed points,

featuring high resolution, high Positioning accuracy and so

on.


High reliability, stability, dynamics and long life

P31 platform is equipped with high-reliability piezo actuators with preloaded force that are integrated into a mature hinge guidance system that has been analyzed by FEA. The piezo actuators are stacked co-fired piezoelectric ceramics that provide better stability and reliability.Piezo actuators, flexure guides and sensors are resistant to damage and provide exceptional reliability.The advanced hinge/lever design minimizes inertia, allowing a 25mrad wide-angle deflection range (which deflects the beam by 50mrad) and a very fast response speed in the millisecond range.In addition to large deflection angles and high dynamics, P31 also offers sub-radius resolution. The integrated high-resolution, full-bridge strain sensor (SGS) provides position control with excellent repeatability, typically 0.2% of full stroke.

Typical Application

• Image processing / stabilization • Interlaced scanning, jitter

• Laser scanning / beam deflection and stabilization • Optics

• Light filter / switch • Scanning microscopy

θx,θy Motions

Driving Principle

Piezoelectric Tip/Tilt Platform(2-axis motion) is based on a parallel kinematic design with a coplanar axis and a moving platform. 4 piezo actuators are placed at a 90° angle interval, paired differential control distribution. 2 pairs of differentially driven actuators provide the highest achievable angular stability over a wide temperature range. Its tilt motion is achieved by two pairs of piezo actuators in a push-pull motion, controlled by a bridge connection circuit.


• θx, θy motions • Tilt angle to 25mrad • Sub-ms response time • Closed loop with high accuracy • High temperature stability

Characteristics

0 25 50 75 100

100

150

200

250

300

350

400

450

125

P31

0

50

Constant votlage

Channel 2

Channel 1

Load [g]

Reso

nant

freq

uenc

y [H

z]

012

Pie

zo T

ip/T

ilt Pla

tform

Technical Data

Dimensions

P31


P31.T25SP31.T25K

Units

Active axis θx, θy

Tilt angle（0~120V）20（≈ 4120"）

or ±10（≈ ±2060"）mrad±20%

Tilt angle（0~150V）25（≈ 5160"）

or ±12.5（≈ ±2580"）mrad±20%

Sensor type SGS/-

Resolution2（≈ 0.4"）/1（≈ 0.2"）

μrad



Unloaded resonant frequency 0.4 kHz±20%

Unloaded step time 50/3.2 ms±20%



100% travel 15

El.capacitance 7.2/axis μF±20%

Material Aluminum

Mass 700 g±5%

Platform length L 63 mm±0.1


Load Step Time

P31.T25S piezo platform carrying a load of 60g, its step time of

reaching the full-stroke deflection angle is about 100ms.

Closed-loop Curve


The laser collimator measures the deflection range of the P31.T25S piezoelectric deflection mirror.

Closed Loop Positioning Accuracy

Tilt

angl

e["]

Control anlog input [V]

Cable length:1.5m

Reci

proc

al o

f per

cent

age

Number of test groups

Linearity Repeatability

Pie

zo T

ip/T

ilt Pla

tform

013

Piezo·Nano·Motion

E01 E72 E70

3 channelsDigital, analog, knob controlOpen/closed loopAve.current to 291mA

3 channelsDigital, analog controlOpen/closed loopAve.current to 50mA

3 channelsDigital, analog ontrolOpen/closed loopAve.current to 70mA



• θx, θy tilt • Tilt angle to 40mrad/axis • Resolution to 1μrad

Characteristics

Technical Data

Dimensions Recommended Controllers

ModelsSuffix S - closed loopSuffix K - open loop

P35.T20SP35.T20K

Units

Active axis θx, θy

Tilt angle（0~120V） 32 or ±16（≈ ±3300"） mrad±20%

Tilt angle（0~150V） 40 or ±20（≈ ±4100"） mrad±20%

Sensor type SGS/-

Resolution 2/1（≈ 0.4"/0.2"） μrad

Linearity 0.1 %F.S.

Repeatability 0.01 %F.S.

Unloaded resonant frequency 1.5 kHz±20%


Material Titanium, aluminum

Mass 350 g±5%


P35

Designed for high angle deflection applications, P35 Series Piezo Tip/

Tilt Platforms provide beam deflections up to 80mrad (approximately

4.56 degrees, 16400"), making them ideal for fast deflection

applications with high precision and large angles.

cable length : 1.5m

014

Pie

zo T

ip/T

ilt Pla

tform

XD-301 Series Piezo Tip/Tilt Platform

Linearity is about 0.2%F.S., and repeatability is about 0.1%F.S..

Technical DataClosed Loop Positioning Accuracy

Closed-loop Repeatability

Open/Closed-loop Curve

Resolution<1µrad for Closed loop

Dimensions

Designed for high load and high dynamic applications, the XD-301 Piezo

Tip/Tilt Platform has a deflection angle of up to 2.5mrad and can carry

Φ110×10mm lens (approx. 245g). The response time of the 0.2mrad

deflection angle is 2ms, and the operating frequency at a deflection

angle of ±0.1mrad can reach 250Hz.

ModelsSuffix S - closed loop XD-301.T2S

XD-301.T2KUnits

Suffix K - open loop

Active axis θx θy

Tilt angle（0~120V) 2 mrad±20%，typ.

Tilt angle（0~150V) 2.5 mrad±20%，max

Sensor type SGS/-

Resolution <1 µrad



Unloaded resonant frequency 1700 kHz±20%

Load resonant frequency 740 Hz±20%,loading 245g

Closed loop response 2 (0.2mrad anglar travel) ms±20%

Operating frequency 250 (±0.1mrad anglar travel) Hz±20%

El.capacitance 7.2 µF/axis±20%

Load capacity 245 (Φ110×10mm lens） g

Material Aluminum

Mass about 2 kg±20%

Cable length 1.5 m±10mm


Reci

proc

al o

f per

cent

age


LinearityRepeatability

cable length : 1.5m

AXIS 1

AXIS 2

through hole


Tilt

angl

e(µ

rad)

Tilt

angl

e(")

Control input voltage V

Closed loop

Open loop

Control input voltage V

Repe

atab

ility

dev

iatio

n ("

)

Pie

zo T

ip/T

ilt Pla

tform

015

Piezo·Nano·Motion

P32 series Piezo Tip/Tilt and Z Platform provides high-speed precision

tilt motion of two axes and Z-axis linear motion. The resolution of linear

motion can reach sub-nanometer level, deflection resolution reaches

sub-microradians, and response time can reach milliseconds. The P32

series of piezoelectric deflection mirrors are compact, enabling up to

6mrad deflection and 37.5μm Z-axis linear motion.

P32 Series Piezo Tip/Tilt and Z Platform

High Resolution, Stability and Dynamics

P32 piezo tip/tilt and Z platform is compact and internally assembled with a pre-load, high-reliability piezo actuator integrated into a complex, flexible hinge guidance system that is modeled and analyzed by FEA. Piezoelectric actuators are stacked co-fired piezoelectric ceramics that provide better performance and reliability than conventional piezoelectric actuators.P32 uses a parallel-kinetic direct-drive tripod structure that provides optimum angular stability over a wide temperature range. This design has the advantages of smaller size, the same tilt range and dynamic performance of the two axes, faster response speed and better linearity, and also prevents polarization rotation, making it ideal for industrial applications.

θx,θy and Z Motions

Recommended Controllers

Typical Application

• Image processing and stabilization • Optical capture

• Laser scanning and beam deflection • Laser tuning

• Light filter / optical switch • Optics/beam stabilization

• θx, θy and Z motion • Tilt angle to 6mrad • Sub-ms response time • High closed loop positioning accuracy • High temperature stability

Characteristics

Driving Principle

P32 piezo tip/tilt and Z platform is designed based on the

mechanism drived by three piezo actuators that are placed

at an angle intervals of 120° . In addition to tilting motion,

this structural design also enables linear movement of the

Z-direction, which can be used to correct the optical path

length. In below drawing, A, B, C represent the measured

displacement at the points, and the simple calculation

formulas of the two-axis tilt angle and Z-direction

displacement are as follows.

Custom Integrated Piezoelectric Deflection System

E01 E00 E72





α

β

Y

A

B

a

120

°

ba

2 3

b 2b3 , 3

C

X

016

Pie

zo T

ip/T

ilt Pla

tform

Dimensions

P32

Technical Data


P32.ZT4SP32.ZT4K

Units

Active axis θx, θy, Z

θx, θy Tilt angle（0~120V） 5（≈ 1030"） mrad±20%

Travel in Z（0~120V） 30 μm±20%

θx, θy tilt angle（0~150V） 6（≈ 1240"） mrad±20%

Travel in Z（0~150V） 37.5 μm±20%

Sensor type SGS/-

Resolution in θx, θy0.1（≈ 0.02"）

/0.05（≈ 0.01"）μrad

Resolution in Z 1/0.5 nm



Unloaded resonant frequency（θx, θy） 2 kHz±20%

Unloaded step time 5/2 ms±20%



100% travel 40


Material Steel

Mass 350 g±5%


Frequency and Load Curve Closed-loop Curve

Deflection angle and control analog input voltage curves of P32 piezo platform after loading.

Load Step Time

The step time of the P32.ZT4S piezo platform

reaching the full stroke after loading is about 15ms.


Tilt

angl

e["]

Control analog input [V]

Load [g]

Reso

nant

freq

uenc

y [H

z]

cable length : 1.5m

Pie

zo T

ip/T

ilt Pla

tform

017

Piezo·Nano·Motion

E01 E53.A E70

3 channelsDigital, analog, knob controlOpen/closed loopAve.current to 291mA/58mA

1 channelAnalog inputOpen loopAve.currrent to 60mA



P36 series piezoelectric Tilt/Tip and Z Platform(phase shifter) is θx, θy

deflection/tilt and Z-axis linear motion platform, with a center hole.

The product is compact, and the deflection range can be 0.7mrad.

Z-axis linear motion travel is 10μm. P36 is open-loop version

with high resolution and response speed, it is the first choice for

interference scanning phase shift.


Typical Application

• Image processing and stabilization • Laser scanning / beam deflection

• Active and adaptive optics • Optical filter

• Beam stabilization • Phase shifter

• θx, θy tilt and motion in Z • Center aperture: Ø10mm • 10μm travel in Z • Tilt angle up to 0.7mrad • High temperature stability

Characteristics


Open Loop, High Dynamic, With Aperture

P36 piezo tip/tilt and Z platform / phase shifter is a multi-

axis motion platform with the volume of Ø20 × 19.5mm,

can achieve θx, θy axis of 0.7mrad deflection and 12μm

linear travel in Z. The open-loop version features ultra-

high resolution and ultra-fast response speed. The tripod

structure design has an very wide operating temperature

range.

The center of the platform has a through hole of Ø10mm

diameter, which is suitable for applications requiring light

transmission, such as light filtration.

Motion Control

P36 Piezoelectric Tip/Tilt and Z Platform/Phase Shifter has three piezo actuators connected in parallel to provide the top ring motion. For vertical positioning (piston movement), it requires a controller with only one drive channel and three drive channels are required to provide Z-direction and tip/tilt motion.

Optional Lens Adapter

P36 Piezo tilt/tip platform can be equipped with a matching lens

adapter to facilitate the installation and fixation of the lens.

Load [g]

Reso

nant

freq

uenc

y [H

z]

Lens cover

Lens

Lens holder

018

Pie

zo T

ip/T

ilt Pla

tform

Technical Data

Dimensions

P36

Models Suffix K - open loop P36.Z1K P36.ZT1K Units

Active axis Z θx, θy, Z

θx, θy tilt angle（0~120V） - 0.55（≈ 110"） mrad±20%

Travel in Z（0~120V） 8 8 μm±20%

θx, θy tilt angle（0~150V） - 0.7（≈ 140"） mrad±20%

Travel in Z（0~150V） 10 10 μm±20%

Tilt resolution in θx, θy - 0.02（＜ 0.01"） μrad

Resolution in Z 0.1 0.1 nm

Unloaded resonant frequency 7.5 θx3.2/θy3.5/Z7.5 kHz±20%

Unloaded step time 0.5 0.5 ms±20%


10% travel 2000 1500

Hz±20%

100% travel 200 150

El.capacitance 0.5 0.5/axis μF±20%

Material Steel Steel

Mass 50 80 g±5%


Cable length 1.5 m

through hole

Harbin Core Tomorrow Science & Technology Co., Ltd.Tel：0451-86268790Fax：0451-86267847Postcode：150080Email：[email protected]：www.coremorrow.comAddress：6F, No.41 Hanguang Street Nangang Distric,Harbin Wechat

V21 Version … · serves to apply a preload to the piezoelectric actuator. The single hinge and...

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Transcript of V21 Version … · serves to apply a preload to the piezoelectric actuator. The single hinge and...