Grating Coupler Fabrication

PMMA

Si

SiO2

e-

CF4acetone

Photonic Crystal Fabrication

Si

SiO2

Mo PMMA

e-

CF4SF6dilute aqua regia

Integrated Device

Grating Coupler Geometry

Si

SiO2

θ

Λ

θenλΛsin

For λ = 1.55 µm, ne = 2.83, and θ = 45°, Λ = 730 nm.

Grating Coupler Characterization

PC Waveguide SEM

Integrated Device SEM

730 nm730 nm

360 nm360 nm426 nm426 nm

AFM of ~10 nm Grating

Coupling Efficiency of ~10 nm Grating

Coupling Efficiency of ~20 nm Grating