Volta potential phase plate for in-focus phase contrast transmission electron microscopy ·  ·...

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Volta potential phase plate for in-focus phase contrast transmission electron microscopy Radostin Danev a , Bart Buijsse b , Maryam Khoshouei a , Jürgen M. Plitzko a,c , and Wolfgang Baumeister a,1 a Department of Molecular Structural Biology, Max Planck Institute of Biochemistry, 82152 Martinsried, Germany; b FEI, 5651 GG Eindhoven, The Netherlands; and c Bijvoet Center for Biomolecular Research, Utrecht University, 3584 CH Utrecht, The Netherlands Contributed by Wolfgang Baumeister, September 24, 2014 (sent for review August 20, 2014; reviewed by Dwayne Miller and Wah Chiu) We describe a phase plate for transmission electron microscopy taking advantage of a hitherto-unknown phenomenon, namely a beam-induced Volta potential on the surface of a continuous thin film. The Volta potential is negative, indicating that it is not caused by beam-induced electrostatic charging. The film must be heated to 200 °C to prevent contamination and enable the Volta poten- tial effect. The phase shift is created on the flyby the central diffraction beam eliminating the need for precise phase plate alignment. Images acquired with the Volta phase plate (VPP) show higher contrast and unlike Zernike phase plate images no fringing artifacts. Following installation into the microscope, the VPP has an initial settling time of about a week after which the phase shift behavior becomes stable. The VPP has a long service life and has been used for more than 6 mo without noticeable degradation in performance. The mechanism underlying the VPP is the same as the one responsible for the degradation over time of the perfor- mance of thin-film Zernike phase plates, but in the VPP it is used in a constructive way. The exact physics and/or chemistry behind the process causing the Volta potential are not fully understood, but experimental evidence suggests that radiation-induced surface modification combined with a chemical equilibrium between the surface and residual gases in the vacuum play an important role. TEM | phase plate | Volta potential | phase contrast | cryo-EM R ecent years have shown a steadily growing interest in in-focus phase contrast devices for transmission electron microscopy (TEM). Such devices are commonly referred to as phase plates.The second waveof phase plate research started more than 10 y ago and was motivated mainly by the challenges of biological TEM (1). There are several types of phase plates depending on the design and the physical phenomenon being used: thin film (2), electrostatic (3, 4), magnetic (5), laser (6), tulip(7), etc. However, for practical reasons most of these device types are not yet usable for applications (8, 9). The only phase plate that has demonstrated advantages in real-world cryo-EM applications is the thin-film Zernike phase plate (ZPP) (10, 11). The thin-film ZPP consists of a thin (20 nm) material film, typically amorphous carbon, with a small (1 μm) hole in the center (12). The film thickness is selected such that it causes π/2 phase shift for electrons passing through the film (1). The phase plate is positioned at the back focal plane of the objective lens so that the central beam of unscattered electrons passes through the hole. There have been successful ZPP applications in single- particle analysis (11, 13), cryo-tomography (10, 13, 14), and single- image cryo-EM (15, 16). However, the ZPP has a few limitations that affect its overall performance and ease of use. The main unsolved issue is the short life span of the phase plate (12). Following installation into the TEM, its performance gradually deteriorates independent of its use. This behavior is commonly referred to as agingof the phase plate. The typical usable life- time of a carbon film ZPP is about a week, after which it must be exchanged. Another problem is the hole of the phase plate. Its size is a subject of a compromisea smaller hole provides better contrast for large-specimen features but is more difficult to align and maintain centered on the beam and vice versa. The sharp onset of the contrast transfer function (CTF) at the phase plate hole edge produces fringes around high-contrast features in the image (15, 17). The fringing can be demodulated by software postprocessing, but the results are not perfect (17, 18). Another open issue is the current lack of software and hardware support for automated data acquisition with the ZPP. An ideal phase plate would have a central phase-shifting area with exactly the same size and position as the central diffraction beam. One possibility to realize that in practice is to use the beam itself for the creation of the phase-shifting area. In fact, beam- generated phase plates have been proposed and tested (1921). Early attempts used beam-induced contamination and/or elec- trostatic charging on the surface of a material as the central phase- shifting zone. The results show a significant contrast increase for organic and inorganic samples. However, apart from the improved contrast, all previous reports share a common problemCTF distortion due to electrostatic charging characterized by rapid oscil- lations near the Fourier space center (21, 22). Such a CTF does not correspond to the theoretical phase-CTF model and cannot be easily fitted or corrected. Here, we present a new type of beam-created phase plate that we call the Volta phase plate (VPP). The name was chosen in accordance with our hypothesis that a beam-induced Volta po- tential resulting from changes in the properties of the film is the main source of the phase shift. Unlike previously reported beam- created phase plates, the VPP does not suffer from CTF defor- mations and it does not change its properties over time. Results and Discussion Heated Amorphous Carbon Films Show an Unusual Beam-Induced Phase Shift Behavior. To test the performance of various materi- als for the preparation of ZPPs, we developed the beam-induced Significance Biological electron cryomicroscopy is limited by the radiation sensitivity of the samples and the consequent need to minimize exposure to the beam. This, in turn, results in low-contrast images with a poor signal-to-noise ratio. The current practice to improve phase contrast by defocusing results in contrast transfer functions necessitating image restoration to provide interpretable data. Phase plates enable in-focus phase contrast, but the existing ones, including the thin film Zernike-type phase plate, suffer from se- vere limitations, such as a short usable life span, fringing artifacts, and problems in using them in automated data acquisition pro- cedures. The Volta phase plate presented here solves those problems and has the potential to become a practical solution for in-focus phase contrast in transmission electron microscopy. Author contributions: R.D., B.B., J.M.P., and W.B. designed research; R.D., B.B., and M.K. performed research; B.B. contributed new reagents/analytic tools; R.D., B.B., and M.K. analyzed data; and R.D. and W.B. wrote the paper. Reviewers: D.M., Max Planck Institute for the Structure and Dynamics of Matter; and W.C., Baylor College of Medicine. Conflict of interest statement: B.B. is a full-time employee of FEI. Freely available online through the PNAS open access option. 1 To whom correspondence should be addressed. Email: [email protected]. This article contains supporting information online at www.pnas.org/lookup/suppl/doi:10. 1073/pnas.1418377111/-/DCSupplemental. www.pnas.org/cgi/doi/10.1073/pnas.1418377111 PNAS | November 4, 2014 | vol. 111 | no. 44 | 1563515640 APPLIED PHYSICAL SCIENCES BIOPHYSICS AND COMPUTATIONAL BIOLOGY

Transcript of Volta potential phase plate for in-focus phase contrast transmission electron microscopy ·  ·...

Page 1: Volta potential phase plate for in-focus phase contrast transmission electron microscopy ·  · 2014-10-31Volta potential phase plate for in-focus phase contrast transmission electron

Volta potential phase plate for in-focus phase contrasttransmission electron microscopyRadostin Daneva, Bart Buijsseb, Maryam Khoshoueia, Jürgen M. Plitzkoa,c, and Wolfgang Baumeistera,1

aDepartment of Molecular Structural Biology, Max Planck Institute of Biochemistry, 82152 Martinsried, Germany; bFEI, 5651 GG Eindhoven, The Netherlands;and cBijvoet Center for Biomolecular Research, Utrecht University, 3584 CH Utrecht, The Netherlands

Contributed by Wolfgang Baumeister, September 24, 2014 (sent for review August 20, 2014; reviewed by Dwayne Miller and Wah Chiu)

We describe a phase plate for transmission electron microscopytaking advantage of a hitherto-unknown phenomenon, namelya beam-induced Volta potential on the surface of a continuous thinfilm. The Volta potential is negative, indicating that it is not causedby beam-induced electrostatic charging. The film must be heatedto ∼200 °C to prevent contamination and enable the Volta poten-tial effect. The phase shift is created “on the fly” by the centraldiffraction beam eliminating the need for precise phase platealignment. Images acquired with the Volta phase plate (VPP) showhigher contrast and unlike Zernike phase plate images no fringingartifacts. Following installation into the microscope, the VPP hasan initial settling time of about a week after which the phase shiftbehavior becomes stable. The VPP has a long service life and hasbeen used for more than 6 mo without noticeable degradation inperformance. The mechanism underlying the VPP is the same asthe one responsible for the degradation over time of the perfor-mance of thin-film Zernike phase plates, but in the VPP it is used ina constructive way. The exact physics and/or chemistry behind theprocess causing the Volta potential are not fully understood, butexperimental evidence suggests that radiation-induced surfacemodification combined with a chemical equilibrium between thesurface and residual gases in the vacuum play an important role.

TEM | phase plate | Volta potential | phase contrast | cryo-EM

Recent years have shown a steadily growing interest in in-focusphase contrast devices for transmission electron microscopy

(TEM). Such devices are commonly referred to as “phase plates.”The “second wave” of phase plate research started more than 10 yago and was motivated mainly by the challenges of biologicalTEM (1). There are several types of phase plates dependingon the design and the physical phenomenon being used: thin film(2), electrostatic (3, 4), magnetic (5), laser (6), “tulip” (7), etc.However, for practical reasons most of these device types are notyet usable for applications (8, 9). The only phase plate that hasdemonstrated advantages in real-world cryo-EM applications isthe thin-film Zernike phase plate (ZPP) (10, 11).The thin-film ZPP consists of a thin (∼20 nm) material film,

typically amorphous carbon, with a small (∼1 μm) hole in thecenter (12). The film thickness is selected such that it causes ∼π/2phase shift for electrons passing through the film (1). The phaseplate is positioned at the back focal plane of the objective lens sothat the central beam of unscattered electrons passes through thehole. There have been successful ZPP applications in single-particle analysis (11, 13), cryo-tomography (10, 13, 14), and single-image cryo-EM (15, 16). However, the ZPP has a few limitationsthat affect its overall performance and ease of use. The mainunsolved issue is the short life span of the phase plate (12).Following installation into the TEM, its performance graduallydeteriorates independent of its use. This behavior is commonlyreferred to as “aging” of the phase plate. The typical usable life-time of a carbon film ZPP is about a week, after which it must beexchanged. Another problem is the hole of the phase plate. Its sizeis a subject of a compromise—a smaller hole provides bettercontrast for large-specimen features but is more difficult to alignand maintain centered on the beam and vice versa. The sharponset of the contrast transfer function (CTF) at the phase plate

hole edge produces fringes around high-contrast features in theimage (15, 17). The fringing can be demodulated by softwarepostprocessing, but the results are not perfect (17, 18). Anotheropen issue is the current lack of software and hardware support forautomated data acquisition with the ZPP.An ideal phase plate would have a central phase-shifting area

with exactly the same size and position as the central diffractionbeam. One possibility to realize that in practice is to use the beamitself for the creation of the phase-shifting area. In fact, beam-generated phase plates have been proposed and tested (19–21).Early attempts used beam-induced contamination and/or elec-trostatic charging on the surface of a material as the central phase-shifting zone. The results show a significant contrast increase fororganic and inorganic samples. However, apart from the improvedcontrast, all previous reports share a common problem—CTFdistortion due to electrostatic charging characterized by rapid oscil-lations near the Fourier space center (21, 22). Such a CTF doesnot correspond to the theoretical phase-CTF model and cannotbe easily fitted or corrected.Here, we present a new type of beam-created phase plate that

we call the Volta phase plate (VPP). The name was chosen inaccordance with our hypothesis that a beam-induced Volta po-tential resulting from changes in the properties of the film is themain source of the phase shift. Unlike previously reported beam-created phase plates, the VPP does not suffer from CTF defor-mations and it does not change its properties over time.

Results and DiscussionHeated Amorphous Carbon Films Show an Unusual Beam-InducedPhase Shift Behavior. To test the performance of various materi-als for the preparation of ZPPs, we developed the beam-induced

Significance

Biological electron cryomicroscopy is limited by the radiationsensitivity of the samples and the consequent need to minimizeexposure to the beam. This, in turn, results in low-contrast imageswith a poor signal-to-noise ratio. The current practice to improvephase contrast by defocusing results in contrast transfer functionsnecessitating image restoration to provide interpretable data.Phase plates enable in-focus phase contrast, but the existing ones,including the thin film Zernike-type phase plate, suffer from se-vere limitations, such as a short usable life span, fringing artifacts,and problems in using them in automated data acquisition pro-cedures. The Volta phase plate presented here solves thoseproblems and has the potential to become a practical solution forin-focus phase contrast in transmission electron microscopy.

Author contributions: R.D., B.B., J.M.P., and W.B. designed research; R.D., B.B., and M.K.performed research; B.B. contributed new reagents/analytic tools; R.D., B.B., and M.K.analyzed data; and R.D. and W.B. wrote the paper.

Reviewers: D.M., Max Planck Institute for the Structure and Dynamics of Matter; andW.C.,Baylor College of Medicine.

Conflict of interest statement: B.B. is a full-time employee of FEI.

Freely available online through the PNAS open access option.1To whom correspondence should be addressed. Email: [email protected].

This article contains supporting information online at www.pnas.org/lookup/suppl/doi:10.1073/pnas.1418377111/-/DCSupplemental.

www.pnas.org/cgi/doi/10.1073/pnas.1418377111 PNAS | November 4, 2014 | vol. 111 | no. 44 | 15635–15640

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phase shift (BIPS) method (Materials and Methods). It measuresthe phase shift experienced by the central diffraction beam when acontinuous film of the material is placed at the back-focal planeof the objective lens. The resulting phase shift vs. dose curve is aquantitative measure of the stability of the film to electron beamirradiation. During testing of heated amorphous carbon filmswith the BIPS method, we noticed a rather peculiar behavior.Fig. 1A shows BIPS curves for a 12-nm amorphous carbon film.Movie S1 shows the typical evolution of the CTF during a BIPSseries. Both the curves in Fig. 1A and Movie S1 indicate that,after the film has been in the microscope for more than a fewdays, the central beam experiences a phase advance relative tothe scattered beams. This result is opposite in sign to what wouldbe expected if beam-induced electrostatic charging would causeit. Beam irradiation produces positive charges on nonconductingsurfaces (21, 22), which leads to phase retardation (22). Thephase advance observed here means that the irradiated areahas a negative potential, which cannot be a result of beam-induced electrostatic charging. Fig. S1 illustrates the differentpotentials associated with a conducting material in vacuum. TheVolta potential is the potential immediately above the surface ofthe material and is equal to the difference between the inner andthe surface potentials. A negative Volta potential can explain theobserved phase shift. Fig. S2A shows the result from a numericalsimulation of the 3D potential distribution above a groundedconductor with a constant potential patch on the surface. Fig.S2B contains a plot of the integrated along z potential profile.An electron traveling along z will experience a phase shift pro-portional to the integrated potential (22). Our hypothesis is thatthe strong irradiation by the central diffraction beam causes localchanges in the properties of the carbon film that lead to changesin the inner and/or surface potentials. Such changes will lead toa local modification of the Volta potential, which in turn willcause a phase shift. A variation of the inner potential will alsocause a phase shift difference within the film, but because thefilm thickness is very small compared with the 3D potentialdistribution above and below the film, the effect will be negli-gible compared with that of the Volta potential (the phase shift isproportional to the path integrated potential). The curve in Fig.S2B shows that the phase shift is highly localized and thus willnot influence and cause deformation to the CTF outside thecentral potential patch. The size of the 3D distribution scaleslinearly with the size of the patch, so the phase shift will also belinearly proportional to the patch size, e.g., keeping the potentialconstant a twofold bigger patch will produce twice the phaseshift. It must be noted that, unlike the beam-induced chargingmodels (21, 22), in the Volta potential model the net charge ofthe film is zero and the potential change is a result of changes inthe surface and/or inner potentials.

The BIPS Is Responsible for the Aging of ZPPs. The evolution of the“on-plane” (25-nm beam) BIPS curves in Fig. 1A with timeclearly illustrates the aging behavior of amorphous carbon. Onday 1 after installation into the microscope (black squares), therewas very little negative phase shift. After a week (blue circles),the phase shift had changed its sign and increased. The sub-sequent tests show that, with time, the BIPS behavior stabilizes.This closely matches and can explain the aging behavior of ZPPs,whereas in the first few days the phase shift is solely caused bythe inner potential within the film after which an additionalparasitic phase shift develops around the central hole probablydue to Volta potential effects.

Effect of Temperature on the BIPS. Fig. 1B shows BIPS measure-ments at different temperatures. The curves indicate that in-creasing the film temperature reduces the BIPS. These resultssuggest that temperature can in principle be used to control thephase shift albeit within a limited range.

The BIPS Is a Function of the Total Dose and Not of the Dose Rate.BIPS data for different beam currents are plotted in Fig. 1C. The

Fig. 1. Beam-induced phase shift (BIPS) as a function of the total dose fora 12-nm–thick amorphous carbon film. The phase shift plotted is that of thecentral beam relative to the scattered beams and a positive value meansphase advance. Experimental data are shown with symbols; the solid linesrepresent double asymptotic exponential fits. (A) BIPS curves for a filmheated to 225 °C, beam current of 1 nA. The legend shows the film age,measured from the moment it was inserted into the microscope, and thebeam diameter on the film (25 nm, on-plane; 1,000 nm, off-plane). (B) BIPScurves on-plane (25-nm beam diameter) at different temperatures; filmage was 51 d, and beam current was 1 nA. The film was kept for ∼24 h at150 °C before the first measurement and then for ∼1 h at the other twotemperatures before their respective measurements. (C ) BIPS curves on-plane (25-nm beam diameter) with different beam currents; film age was52 d, and temperature was 225 °C.

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beam current was varied by changing the spot size setting of themicroscope. Apart from small deviations, the curves indicate thatthe BIPS is a function of the total dose and does not dependnoticeably on the dose rate. It must be noted that, at the lowerbeam currents (0.5 and 0.25 nA), the beam diameter on the filmwas smaller than the beam diameter of the 1-nA beam, but thisdid not produce a significant change in the behavior of the BIPS.

The Buildup of BIPS Contains at Least Two Components. Good fits(solid lines) of the BIPS data in Fig. 1 A and B could be obtainedwith a function comprising the sum of two asymptotic exponentssuggesting that there are at least two processes involved (DoubleAsymptotic Exponent Fits of the BIPS Data). The first process hasa small characteristic dose of a few nanocoulombs and is re-sponsible for the steep rise of the phase shift in the beginning. Thesecond process governs the slow gradual increase of the phaseshift after the first process. The results of the fits are presented inTables S1 and S2.

Relaxation Behavior of Phase Shift Patches on Heated AmorphousCarbon Films. The phase shift patches created by the beam canbe observed in a low-magnification mode if sufficient defocusis applied (a few millimeters underfocus). Fig. 2 shows low-magnification images of 1-μm–diameter beam spots on the carbonfilm. Beam-created spots have been reported in the past and areknown as the “Berriman effect” (23). The Berriman effect isrelated to beam-induced charging and the spots appear darkerthan the background. The spots in Fig. 2 are brighter than thebackground, which is another confirmation that the BIPS has anopposite sign to and is not due to beam-induced charging. Fig. 2 Aand B contains images of a beam spot (white arrow) with 15-mmunderfocus and in-focus, respectively. The spot is not visible in thein-focus image (Fig. 2B), which confirms that the effect is purelydue to phase shift and not due to beam-induced etching of the film.Fig. 2 C and D shows a beam spot (black arrow) in the vicinity ofa focused ion beam (FIB)-milled hole in the film (white arrow).The first image (Fig. 2C) was taken immediately after creating thebeam spot. The second one (Fig. 2D) was taken 5 d later. Thebeam spot had disappeared after 5 d, suggesting that the filmproperties recover after a period. Furthermore, Fig. 2E shows animage of a freshly created beam spot (white arrow) next to beamspots created more than 10 d earlier (black arrows). The old beamspots have not just recovered but also show a slight overshoot ina sense that they are slightly darker than the surroundings. Thissuggests that, in the long term, the changes induced by electronirradiation result in a slightly different state of the film with a phaseshift marginally higher than the original one. The contrast of thedarker spots is less than 1/10 of the contrast of the freshly createdspot, which means that the overshoot in terms of phase shift is∼π/20 (assuming the original spot was π/2). Such a phase shift willnot produce a noticeable CTF distortion if an old spot happensto be in the vicinity of the central beam.

The Recovery Speed of Phase Shift Patches Is Temperature Independentbut Is Influenced by Residual Gas Concentration. The long-termbehavior of beam-created spots is shown in Fig. 3. The results arequite surprising in that the recovery time of the phase shiftpatches does not seem to depend on the temperature of the film.One would expect that a higher temperature will speed up therecovery process but that is not the case. Unlike temperature, theuse or not use of the liquid nitrogen-cooled anticontaminationdevice (ACD) of the microscope had a significant impact on therecovery speed. Using the ACD slowed down the process ∼1.4times. This suggests that residual gases in the vacuum, such aswater, vacuum oils, etc., play an important role in the recoveryprocess. This also provides an indirect indication that the BIPS isprobably due to changes in surface chemistry rather than changesinside the bulk film. The solid curves in Fig. 3 are double-expo-nential decay fits of the 225 °C data. With the ACD OFF, the twotime constants are 47 and 1,180 min. With the ACD ON, bothconstants increase ∼1.4 times to 65 and 1,650 min. It is not clear

whether the two recovery time constants are related to the twocomponents of the phase shift buildup.

A Surface Chemistry Hypothesis About the Volta Potential and theBIPS. The most interesting question concerning the BIPS is aboutthe mechanism underlying it. The experimental facts suggest thatit is not beam-induced electrostatic charging. An obvious ex-planation would be beam-induced etching of the film, but theimages in Fig. 2 A and B disprove that. The strong dependenceof the beam spot recovery time on the use or not of the ACD(Fig. 3) indicates that most probably the phenomenon is relatedto the surface chemistry of the film. Our hypothesis is that beamirradiation causes local desorption of the chemisorbed species,which leads to a local change in the work function and thus theVolta potential. The negative sign of the observed Volta po-tential indicates that the work function in the irradiated area islower than in the surroundings. Oxidation of graphene (24) andcarbon nanotubes (25) can significantly increase (up to 60%)their work functions, and thus an oxidized equilibrium stateoutside the central beam area in combination with a local beam-induced reduction are a good candidate for explaining the ob-served lowering of the work function at the beam spot. The lackof dependence of the recovery speed on the temperature ofthe phase plate is rather puzzling and cannot be explained bya simple adsorption model. In general, the adsorption rate isproportional to the bombardment rate of gas molecules on the

Fig. 2. Low-magnification images of 1-μm beam spots on 12-nm–thickamorphous carbon film kept at 225 °C. The spots were created with a beamcurrent of 1 nA and a dose of 100 nC (100 s of irradiation). (A and B) Thesame spot observed with (A) 15-mm underfocus and (B) in-focus. (C and D)A beam spot (black arrow) next to a FIB-produced hole in the film (whitearrow). The first image (C) was taken immediately after the spot was created.The second image (D) was taken 5 d later. (E) A freshly created beam spot(white arrow) next to beam spots created more than 10 d earlier (blackarrows). Defocus for C–E: 50-mm underfocus. (Scale bars: 5 μm.)

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surface and to the sticking probability. The bombardment rate isa function of the gas temperature and pressure and is thus af-fected mainly by the ACD. On the other hand, the stickingprobability should be affected by the temperature of the film, butthe experimental data show no such effect. Based on the limiteddata, we can only conclude that in microscopes with good vac-uum and/or with large cryoshields beam-created spots will takelonger to recover.The “development” of the BIPS with time (Fig. 1A) and the

aging of the ZPP in the first week after installation suggest thatthe initial state of the film surface is different from the equilib-rium state. It takes about a week for the carbon film to transitionfrom its initial state after preparation to its equilibrium stateinside the microscope possibly due to a change in the chemicalcomposition of the surface.The dynamics of BIPS buildup indicate that there are at least

two characteristic processes involved—one fast and one slow(Double Asymptotic Exponent Fits of the BIPS Data). This can beexplained by another hypothesis—the fast process is the surfacetransition at the central beam spot where the current density isvery high followed by a second process of gradual enlargement ofthe surface potential patch. The enlargement could be due to low-angle scattered electrons from the specimen and/or secondary/auger electrons emitted from the central beam spot on the phaseplate reacting and modifying the surface around the central spot.Without additional experimental evidence from other analyt-

ical methods, we can only speculate about the exact physics orchemistry behind the observed behavior of the carbon film.Techniques such as tip-enhanced Raman spectroscopy, Kelvinprobe force microscopy, high-resolution electron energy lossspectroscopy, or X-ray photoelectron spectroscopy may be ableto provide the necessary information. However, observations willbe quite challenging because the specimen is in the form ofa very thin free-standing film that must be kept heated in a vac-uum for several days before it reaches the equilibrium stateshowing the Volta potential effect.

The BIPS of Heated Amorphous Carbon Films Is Suitable for a PhasePlate. As shown by the curves in Fig. 1, the phase shift has theproper sign, with the central beam experiencing phase advance,and the proper magnitude of approximately π/2. This makes itsuitable for a phase plate—the VPP. Before its use, a phase-shifting spot must be created by preirradiation with the central

diffraction beam for a period. The necessary time to reach adesired phase shift with a given beam current can be calculatedfrom the data in Fig. 1C.

CTF Performance of the VPP. The fast Fourier transforms (FFTs) ofhigh-magnification images of a thin amorphous carbon filmspecimen taken without and with a VPP are shown side by side inFig. 4A. The CTFs show a very good complementary match witha phase shift close to π/2 and no distortions in the phase plateCTF. Fig. 4B shows rotationally averaged and background nor-malized profiles of the FFTs in Fig. 4A. CTF fits of both profilesare shown with thin black lines and are difficult to see becausefor the most part they overlap with the experimental data, in-dicating a good fit. The CTF model for the VPP image includedphase shift as an additional parameter. The fitted defocus valueswere 487 nm without VPP and 482 nm with VPP, both under-focus. The practically negligible defocus difference of 5 nmconfirms that the VPP does not suffer from beam-inducedcharging and its consequent CTF deformation. The fit of theVPP CTF gave a phase shift value of 0.54π, which is very close tothe ideal π/2. The curves and the fits also indicated that the signal

Fig. 3. Long-term behavior of beam-created spots on amorphous carbonfilm. The average intensity of a 0.5-μm beam spot was measured relative tothe background and then normalized by the original spot intensity. All spotswere created at 225 °C after which the temperature was set to the indicatedin the legend temperature for each measurement. The legend also indicateswhether the anticontamination device (ACD) was used (ON) or not (OFF)during the relaxation period.

Fig. 4. (A) Side-by-side FFTs of high-magnification images taken withoutand with a VPP. The CTFs demonstrate a very good complementary matchwith no deformation. (B) Rotationally averaged and background normalizedprofiles of the FFTs in A. Both profiles fit very well the theoretical CTF model(black lines), which confirms the absence of electrostatic charging distortion.The VPP CTF (red line) indicates about 18% signal loss compared with thatwithout a phase plate (blue line). Defocus: 500 nm. (Scale bar: 1 nm−1.)

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with a VPP is ∼18% less than the signal without a phase plate.This value is higher than what would be expected based onscattering by the phase plate film. The total mean free pathof amorphous carbon for 200-kV electrons is ∼92 nm (17). A12-nm–thick film will thus scatter ∼12% of the incident elec-trons. Without a specimen, we measured a 7% drop in beamintensity when the phase plate was inserted. This drop is mainlydue to elastic scattering by the phase plate because of the higherscattering angles for elastic events. The higher than expectedsignal loss of ∼18% is probably a combination of several factors.The first one is the increase of the noise background due toinelastic scattering by the phase plate. A second noise source isthe “phase noise” due to roughness of the phase plate film, but thisis a minor effect: 10% roughness of a 12-nm–thick film is 1.2 nmvalley to peak and will result in ∼0.02π phase modulation, which ispractically negligible. A third factor with the VPP is the fact thatthe central beam passes through the film rather than througha hole as is the case for ZPPs. Thermal noise or oscillations of theVolta potential at the position of the central beam could be con-tributing to the noise in the image, but without additional experi-mental evidence it is difficult to speculate about such factors.

The VPP Works Best On-Plane. Fig. S3 shows the low-frequencyportions of rotationally averaged FFTs of images taken with theVPP on-plane and off-plane with the same central beam sizes (25and 1,000 nm) as the BIPS curves in Fig. 1A. The solid arrowsindicate the expected cut-on periodicities based on the beam size(from equation 3 in ref. 1). The dashed arrows point at the ap-proximate positions of the observed cut-on periodicities. Thephase shift patch of the smaller beam (dashed red arrow) is ∼11times larger (∼285-nm patch diameter) than the beam itself(25 nm; solid red arrow), and from the simulations in Fig. S2 itmust have a Volta potential of approximately −1.1 V to produceπ/2 phase shift. The enlargement of the patch could be due to

low-angle scattered electrons and/or secondary/auger electronsactivating the area around the central beam as already discussedin the hypothesis part. The effective patch size of the large beam(dashed blue arrow) is ∼0.6 times the size of the beam (solid bluearrow), which can be explained by the fact that the phase plateis off-plane, which causes blurring of the phase shift profile inFourier space. The curves in Fig. S3 show that using the VPP on-plane provides better performance in terms of lower cut-on peri-odicity (dashed arrows), which will result in better contrast for large-specimen features. The curves also illustrate the soft cut-on of theVPP with the CTF raising smoothly toward the first maximum,which prevents fringing artifacts from appearing in the image. An-other advantage of using the VPP on-plane is the proper phase shiftof ∼π/2. When used off-plane (Fig. 1A, hollow green triangles), theVPP produces too much phase shift, which is undesirable becauseit produces reduced or even inverted contrast (17).

Heating of the Carbon Film Is Essential for the Proper Operation ofthe VPP. Fig. S4 shows side-by-side FFTs from BIPS series ac-quired with the film at 60 °C. Movie S2 contains the completeseries. Early in the series, a zero appears close to the center ofthe FFT and moves outward as the series progress. This is atypical behavior for beam-induced contamination and charging.The CTF maxima move outward, indicating that the central beamexperiences phase retardation relative to the scattered beams. Theretardation is caused by the increase in thickness and/or positivecharging at the position of the beam. Images taken in such a re-gime may show overall increase in contrast, but the CTF is de-formed and cannot be fitted or corrected using the standard phase-CTF model. Previous attempts with beam-created phase plates(19–21) did not use heating, which led to a poor CTF performance.

The VPP Performs Better than a ZPP. A comparison between a ZPPand a VPP images of lacey carbon film is presented in Fig. 5. TheZPP image (Fig. 5A) has lower overall contrast than the VPPimage (Fig. 5C) and shows fringing artifacts, especially around thefilm edges. The image in Fig. 5B is a fringe reduction software-filtered (18) version of the image in Fig. 5A. The overall contrastand the fringing over the film were improved, but the fringinginside the holes remains visible. Even after software filtrationtheZPP image (Fig. 5B) cannotmatch the contrast and the fidelityof the VPP image (Fig. 5C).

The VPP Is Suitable for Cryo-EM Observations. Cryo-EM images ofthe tip of a vitrified worm sperm flagellum (Lumbricus terrestris)are shown in Fig. 6. The conventional image (Fig. 6A) was ac-quired with a relatively high defocus of 5 μm but still has loweroverall contrast than the VPP image (Fig. 6B). The microtubules

Fig. 5. Images of lacey carbon film acquired with (A) a ZPP and (C) a VPP. Theimage in B is a fringe reduction software-filtered version of the ZPP image in A.(Scale bar: 20 nm.)

Fig. 6. Cryo-EM images of vitrified worm sperm flagellum (A) without and (B) with a VPP. The black solid arrows indicate microtubules inside the flagellum.The black dashed arrows point to proteins on the outside and the inside of the membrane. The white arrows point at a gold fiducial marker and a con-taminant. Defocus: (A) 5-μm underfocus, (B) close to focus. (Scale bar: 100 nm.)

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inside the flagellum are well visualized in both images (solidblack arrows). However, low-density proteins on the outside andon the inside of the cell membrane (dashed black arrows) areeasier to see and locate in the VPP image. The VPP image alsodoes not exhibit defocus artifacts, such as the Fresnel fringesaround the gold nanoparticles and a contaminant particle(white arrows).

ConclusionsHeated amorphous carbon films display a peculiar behavior ofa negative Volta potential at the place of electron beam irradi-ation. This behavior is responsible for the reduced performancewith age of thin film ZPPs. The newly proposed VPP uses thisbehavior constructively to generate a phase shift with the samesign and similar magnitude to that of a ZPP. The phase shift iscreated at the position of the central diffraction beam anddevelops with the accumulated dose. Before use, the VPP mustbe preconditioned by continuous irradiation on a fresh area ofthe film for about a minute to generate the phase shift. The VPPsolves two major issues of the ZPP—the aging and the fringing.Images taken with the VPP do not show fringing artifacts but justa smooth bright halo around high-contrast edges due to thesmooth onset of the phase shift. The best operation mode for theVPP is “on-plane” with the central diffraction beam crossover onthe phase plate plane. In this mode, the phase shift is close to π/2and the phase plate has the lowest possible cut-on frequency.Because the phase shift is created at the position of the beam,the VPP does not require precise alignment, which means thatautomation of the VPP will be much easier than other types ofphase plates. Heating of the carbon film is crucial for the properoperation of the VPP. Without or with insufficient (<100 °C)heating, beam-induced contamination and charging become thedominant effect, resulting in a phase shift with opposite signto what is desired and CTF deformation. The CTF of the VPPshows an excellent agreement with the theoretical model con-firming the absence of beam-induced electrostatic charging. Thephase shift patches created on the VPP during use disappearafter a few days, and the same areas of the phase plate can bereused. The VPP has a very long usable life and we expect thatexchanges of the phase plate will only be necessary in case of anaccidental physical damage to the film or dust/particulate con-tamination introduced when the microscope column is vented forservicing. There are still open questions that require further in-vestigation. The exact physics and chemistry behind the negative

Volta potential are unknown. Experimental evidence suggeststhat the effect is probably related to a chemical equilibriumbetween the surface of the carbon film and the residual gases inthe vacuum. Another issue that must be studied further is thehigher than expected signal loss with the VPP. Apart from that,the VPP promises to be a user friendly and maintenance-freesolution for in-focus phase contrast imaging in TEM.

Materials and MethodsAll experiments were performed on an FEI Tecnai F20 (FEI) 200-kV electronmicroscope equipped with an FEI Eagle 4K CCD camera. The objective ap-erture holder was replaced with a newly designed ceramic phase plate holderwith built-in heater (Fig. S5). The holder can accommodate one heated phaseplate and two nonheated objective lens apertures, all 3 mm in diameter. Thephase plates were prepared by vacuum evaporation of carbon on a freshlycleaved mica surface by a BAL-TEC MED-020 (currently Leica Microsystems)electron beam evaporator. The films were transferred onto 3-mm titanium TEMgrids, Agar G2462TI (Agar Scientific), by floating off on a water surface followedby lowering of the water level to gently deposit the films onto the preimmersedgrids. The thickness of the film on the prepared grids was measured to be 12 ± 1nm by TEM observation of the film profile at a folded edge (12).

The BIPS series method for characterization of the performance of thinfilms as phase plate candidates was as follows. The film under investigationwas positioned at the back focal plane of the objective lens and heated to∼200 °C. The spot size, the condenser aperture, and the field emission gunextraction voltage were selected to provide 1-nA beam current. The secondcondenser lens was adjusted for either on-plane condition (central diffrac-tion beam crossover on the phase plate plane) or with an offset value fromthe on-plane condition so that the central beam spot at the back-focal planewas 1 μm in diameter (off-plane condition). The offset value (approximately−0.2% with a 50-μm condenser aperture) was initially determined by com-paring the beam spot to a 1-μm FIB-prepared hole in the film. An amorphouscarbon film was used as a specimen and the objective lens defocus was ad-justed for the FFT of the image to show ∼10 CTF maxima (∼15-μm underfocus).The microscope magnification was 29,000×, resulting in a pixel size of 0.75 nmwith one time binning on the camera. Image series were then collected froma fresh (nonirradiated) area of the film under investigation positioned at theback focal plane. The series consisted of 50 images with 2-s exposure each,which resulted in a total dose for the series of 100 nC. The rotationally aver-aged FFT of each image in the series was fitted with an extended CTF model,which included phase shift in addition to defocus and spherical aberration. Thefinal result is in the form of a phase shift vs. accumulated dose curve.

ACKNOWLEDGMENTS. We thank Günther Gerisch and Maria Ecke for pro-viding the worm sperm sample. We are grateful to FEI for providing materialand financial support for this project.

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