Submicron structures 26 th January 2004 msc Condensed Matter Physics Photolithography to ~1 μm Used...

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Submicron structures 26 th January 2004 msc Condensed Matter Physics Photolithography to ~1 μm Used for... Spin injection Flux line dynamics Josephson junctions SQUIDs Superconducting mesa structures features to 1-2 μm Device Physics cleanroom
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Transcript of Submicron structures 26 th January 2004 msc Condensed Matter Physics Photolithography to ~1 μm Used...

Page 1: Submicron structures 26 th January 2004 msc Condensed Matter Physics Photolithography to ~1 μm Used for... Spin injection Flux line dynamics Josephson.

Submicron structures 26th January 2004 msc

Condensed Matter Physics

Photolithography to ~1 μmUsed for...

Spin injection Flux line dynamics Josephson junctions SQUIDs Superconducting mesa

structuresfeaturesto 1-2 μm

Device Physics cleanroom

Page 2: Submicron structures 26 th January 2004 msc Condensed Matter Physics Photolithography to ~1 μm Used for... Spin injection Flux line dynamics Josephson.

Submicron structures 26th January 2004 msc

Condensed Matter Physics

Opportunities below 1 μm

Higher interface resistance R simplifies interpretation. Get R > h/e2 : resistance quantum

Measure spin flip length < 1 μm

Isolate individual crystal grains/twins: directions important for d-wave superconductors

Access mesoscopic quantum behaviour: single electron, single spin, single Cooper pair

d d

300 nm

I

Page 3: Submicron structures 26 th January 2004 msc Condensed Matter Physics Photolithography to ~1 μm Used for... Spin injection Flux line dynamics Josephson.

Submicron structures 26th January 2004 msc

Condensed Matter Physics

Focused Ion Beam fabrication

30 kV Gaion source

Focus to ~30 nm.Remove or addmaterial

Observe by SEM while writing,

select desired region of sample

University Nanotechnology Research Centre(Mechanical Engineering)

Page 4: Submicron structures 26 th January 2004 msc Condensed Matter Physics Photolithography to ~1 μm Used for... Spin injection Flux line dynamics Josephson.

Submicron structures 26th January 2004 msc

Condensed Matter Physics

Superconducting wires to 100 nm (so far...) by FIB

Well-controlled structure

Quantum effects easily seen

6 μm photolith.270 nm FIB

Superconducting phase slip

Page 5: Submicron structures 26 th January 2004 msc Condensed Matter Physics Photolithography to ~1 μm Used for... Spin injection Flux line dynamics Josephson.

Submicron structures 26th January 2004 msc

Condensed Matter Physics

Physics << 1 μm

Use quantum effects as a probe of electron systems – e.g. Coulomb blockade to measure energy distribution

Quantum computers motivate study of systems having quantum coherence

Combine mesoscopic conductors with intrinsic Josephson tunnelling

Page 6: Submicron structures 26 th January 2004 msc Condensed Matter Physics Photolithography to ~1 μm Used for... Spin injection Flux line dynamics Josephson.

Submicron structures 26th January 2004 msc

Condensed Matter Physics

Our strengths

Expertise in ultrasensitive electrical measurements: - Shot noise - SQUID detectors

Well-equipped for quantum-dominated measurements: - mK temperatures - 10 T fields

Wide range of interesting material properties - HTc have energy gap > kT & charging energy - HTS have nm-scale laminar structure - Ferromagnetic, unconventional materials available

Page 7: Submicron structures 26 th January 2004 msc Condensed Matter Physics Photolithography to ~1 μm Used for... Spin injection Flux line dynamics Josephson.

Submicron structures 26th January 2004 msc

Condensed Matter Physics