STP-iXR1606 integrated turbomolecular pump - Ideal Vac science... product solution. STP-iXR1606...
2
Vacuum science... product soluon. STP-iXR1606 series magnecally levitated turbo-molecular pump provides industry-leading performance and incorporates latest technology small power supply into the onboard control. • All-in-One (Fully Integrated Onboard Controller) ͳ Eliminates connecon cable between pump and control unit ͳ Eliminates installaon space and cost required by convenonal rack type control unit ͳ Compact design results in easy installaon and small foot print • High Performance ͳ Highest pumping speed in the 8″ TMP class ͳ Significantly improved throughput performance in high flow gas range ͳ Maximum allowable flow is 88% over the exisng model • Energy saving ͳ 32% reduced power consumpon in the high gas flow area The pumping performance is improved with a revoluonary, newly developed rotor design. This fully integrated product offers easy installaon and small footprint as an all-in-one soluon for all applicaon tools. Features and benefits • Communicaon ͳ I/O Remote, RS232C, RS485, STP-Link are standard ports ͳ Profibus oponal variant • Compliant Standards ͳ UL marked, CE marked, SEMI-S2 compliant with RoHS direcve ͳ IP54 equivalent as standard • Contact Edwards if other opons are required, such as: ͳ Corrosion resistance ͳ Temperature Management System (TMS) ͳ Other communicaons protocol STP-iXR1606 integrated turbomolecular pump product datasheet
Transcript of STP-iXR1606 integrated turbomolecular pump - Ideal Vac science... product solution. STP-iXR1606...
Vacuum science... product solution.
STP-iXR1606 series magnetically levitated turbo-molecular pump provides industry-leading performance and incorporates latest technology small power supply into the onboard control.
• All-in-One(FullyIntegratedOnboardController)ͳ Eliminatesconnectioncablebetweenpumpandcontrolunit
ͳ Eliminatesinstallationspaceandcostrequiredbyconventionalracktypecontrolunit
ͳ Compactdesignresultsineasyinstallationandsmallfootprint
• HighPerformanceͳ Highestpumpingspeedinthe8″TMPclassͳ Significantlyimprovedthroughputperformanceinhighflowgasrange
ͳ Maximumallowableflowis88%overtheexistingmodel
• Energysavingͳ 32%reducedpowerconsumptioninthehighgasflowarea
Thepumpingperformanceisimprovedwitharevolutionary,newlydevelopedrotordesign.Thisfullyintegratedproductofferseasyinstallationandsmallfootprintasanall-in-onesolutionforallapplicationtools.
Features and benefits
• Communicationͳ I/ORemote,RS232C,RS485,STP-Linkarestandardports
ͳ Profibusoptionalvariant
• CompliantStandardsͳ ULmarked,CEmarked,SEMI-S2compliantwithRoHSdirective
ͳ IP54equivalentasstandard
• ContactEdwardsifotheroptionsarerequired,suchas:ͳ Corrosionresistanceͳ TemperatureManagementSystem(TMS)ͳ Othercommunicationsprotocol
STP-iXR1606 integrated turbomolecular pump
product datasheet
Global contacts
EUROPEUK Crawley+441293528844UK (local rate)08459212223BelgiumBrussels+3223000730FranceParis+33141211256GermanyMunich08000001456ItalyMilan+3902484471
USANiagara (toll free)+18008489800BRAZILSao Paulo+551139525000ISRAELQiryat-Gat+97286810633
ASIA PACIFICChina (toll free)+864001119618India,Pune+912040752222Japan,Yachiyo+81474588831Korea,Bundang+82317167070Singapore+6565468408Taiwan R.O.C.JhunanTown+88637581000
Technical data
PublicationNumber:YT7900895,IssueB©EdwardsLimited2013.Allrightsreserved.
EdwardsandtheEdwardslogoaretrademarksofEdwardsLimited.
Inletportflange
VG150 VG200 VG250 ISO160F ISO200F ISO250F ICF203 ICF253 ICF305
ØA 235 300 350 225 285 335 203 253 305ØB 237 237 237 237 237 237 237 237 237C 15 16 16 15 16 16 22 25 28D 420 380 380 420 380 380 420 418 380ØE 210 270 320 200 260 310 181 231.8 284F 22.5 22.5 15 22.5 15 15 9 7.5 5.625G 8-Ø12 8-Ø15 12-Ø15 8-Ø12 12-Ø11 12-Ø11 20-Ø8.4 24-Ø8.4 32-Ø8.4H 313 273 273 313 273 273 313 311 273J 263 223 223 263 223 223 263 261 223
Inletflangesize VG200/VG250ISO200F/ISO250FICF253/ICF305
VG150ISO160FICF203
Backingportsize KF40
PumpingspeedN2 1600 1000 Litres/second
PumpingspeedH2 1200 800 Litres/second
CompressionratioN2/H2 >108/1x103
Ultimatepressure 10-7(10-9) Pa(Torr)
Allowablebackingpressure 266(2) Pa(Torr)
MaxgasflowN2*1(watercooledonly) 4700(7.94) sccm(Pam3/sec)
MaxgasflowAr*1(watercooledonly) 1800(3.04) sccm(Pam3/sec)
Ratedspeed 36,500 rpm
Startingtime <8 minutes
Mountingposition Anyorientation
Inputvoltage 200-240 V
Maxinputpower 750 VA
Weight 48 kg
*1:The maximum gas flow value applies for N2 or Ar gas pumped continuously, with water cooling temperature under 25 degree C and a backing pump of 10,000 l/min size or larger used. The value is changed if operated under different conditions
ØA
ØB
Ø300 D
C
G
ØE
F F
H
I
22.5
º
45º
22.5º 22.5º166
Ø239
Pumping speed of STP-iXR1606(Backing pump: 10000L/min, Inlet : without inlet screen)
10
100
1000
10000
1.0E-04 1.0E-03 1.0E-02 1.0E-01 1.0E+00Inlet pressure [Pa]
Pum
ping
spe
ed [
L/se
c]
N2/Ar ISO200
H2 ISO200
N2/Ar ISO160
H2 ISO160
Pumpingspeed
Dimensions
