Laser Scan Micrometer - Bengatouch

8
G-31 G Laser Scan Micrometer Non-contact, high-speed, high-precision measurement Mitutoyo reserves the right to change any or all aspects of any product specification, including prices, designs and service content, without notice. Cable space Measuring range (Measuring position) M3, depth 6 (×4) ø3.1, depth 6 55 126 181 2 1 34 32 46 103 70min 25 32.5 84 40 15.5 10.5 17.5 11 11 Working distance 40 LSM-500S Measuring Unit SERIES 544 — 5 μm to 2 mm Measuring Unit • Capable of measuring down to 5 µm outside diameter* 1 . • Provides ultra-high accuracy of ±0.3 µm over the entire measuring range (5 µm to 2 mm). Optional Accessories Multifunctional display unit, LSM-6200: Easy-to-operate display unit, LSM-5200: Standard calibration gage set (ø0.1, ø2.0) : 02AGD110 Guide pulley : 02AGD200 Air blower : 02AGD220 Order No. Cable length 02AGN780A 5m 02AGN780B 10 m 02AGN780C 15 m Order No. Remarks 544-046 Japanese user's manual 544-047 English user's manual Order No. Display type Remarks 544-071 Japanese mm/E Japanese user's manual 544-071* English mm/E English user's manual 544-072* English mm/inch * To denote your AC power cable add the following suffixes to the order No.: A for UL/CSA, D for CEE, DC for CCC, E for BS, F for SAA, K for KC, C and No suffix are required for PSE." SPECIFICATIONS Order No. 544-531 544-532 Applicable laser standards JIS IEC, FDA User's Manual Japanese version English version Measuring range 0.005 to 2 mm* 1 Resolution 0.01 to 10 µm (selectable) Repeatability* 2 ±0.03 µm Accuracy (20 °C)* 3 ±0.3 µm Positional error* 4 ±0.4 µm Measuring range* 5 1×2 mm (0.005 to 2 mm) Scanning rate 3200 scans/s Laser wavelength 650 nm (Visible) Laser scanning speed 76 m/s Operating environment Temperature 0 to 40 °C Humidity RH 35 to 85 % (non-condensing) Protection Level IP64* 6 *1: The measuring range for a transparent object is 0.05 mm to 2 mm. Please consult your local Mitutoyo office for objects smaller than 0.05 mm. The measuring range is 0.1 mm to 2 mm in the 1 to 255 edge measurement mode or when activating automatic workpiece detection. If using the optional dual connection unit for LSM-6200, the measuring range will be 0.05 mm to 2 mm. *2: Determined at the level of ±2 ( : standard deviation) when measuring ø2 mm at the interval of 0.32 sec. (average 1024 times). *3: Applies at the center of the measuring range when measuring outside diameters. *4: An error in outside diameter measurement due to variation in workpiece position either in the optical axis direction or in the scanning direction. *5: The area given by [optical axis direction]×[scanning direction]. *6: The protection level provided for the interior. If the workpiece or glass of the measuring unit window is soiled by water or dust, the unit may malfunction. Note: When using the extra-fine line measurement function (FINE), guide messages for setting the following will not be displayed: dual-measurement, segment designation, automatic workpiece detection, and group judgment. 8-M3 42 64 53 10.5 15.5 22 50 20 84 104 57.5 230 70 min 123 39 68 34 34* 7 10 4 8 8 18.5 40 40 110 40.5 38.5 30 9.5 9.5 14.5 9.5 150 6 40 40 157 73 ø3.1 hole, depth 6 (Measuring position) Signal cable Cable space Relay cable Emission Unit Base Max. 100 Measuring range Reception Unit Measuring position M4, depth 8 (×3) M4, depth 8 (×3) To Reception Unit (Cable length 0.6m) ø3.1 hole, depth 6 ø3.1 hole, depth 6 Dimension when disconnected (bottom view) <Mass> Emission Unit: 0.7kg Reception Unit: 0.4kg Base: 0.3kg Signal cable (5m): 0.5kg *7: Extendable up to 66mm. DIMENSIONS Unit: mm DIMENSIONS Unit: mm LSM-501S Measuring Unit SERIES 544 — 50 μm to 10 mm Measuring Unit • Provides ultra-high accuracy of ±0.5 µm over the entire measuring range (0.05 to 10 mm). • Narrow range accuracy of ±(0.3+0.1 D) µm for high-precision measurement. Optional Accessories Multifunctional display unit, LSM-6200: Easy-to-operate display unit, LSM-5200: Standard calibration gage set (ø0.1, ø10.0) : 02AGD120 Wire guiding pulley : 02AGD210 • Adjustable workstage : 02AGD400 • Air blower : 02AGD230 Workstage : 02AGD270 • Extension signal cable SPECIFICATIONS Order No. 544-533 544-534 Applicable laser standards JIS IEC, FDA User's Manual Japanese version English version Measuring range 0.05 to 10 mm Resolution 0.01 to 10 µm (selectable) Repeatability* 1 ±0.04 µm Accuracy* 2 (20 °C) Whole range ±0.5 µm Narrow range ±(0.3+0.1 D) µm* 3 Positional error* 4 ±0.5 µm Measuring range* 5 2×10 mm (ø0.05 to ø0.1 mm) 4×10 mm (ø0.1 to ø10 mm) Scanning rate 3200 scans/s Laser wavelength 650 nm (Visible) Laser scanning speed 113 m/s Operating environment Temperature 0 to 40 °C Humidity RH 35 to 85 % (non-condensing) Protection Level IP64* 6 *1: Determined at the level of ±2 ( : standard deviation) when measuring ø10 mm at the interval of 0.32 sec. (average 1024 times). *2: Applies at the center of the measuring range when measuring outside diameters. *3: D=Difference in diameter between the master gage and workpiece. (Unit: mm) *4: An error in outside diameter measurement due to variation in workpiece position either in the optical axis direction or in the scanning direction. *5: The area given by [optical axis direction]×[scanning direction]. *6: The protection level provided for the interior. If the workpiece or glass of the measuring unit window is soiled by water or dust, the unit may malfunction. Order No. Cable length 02AGN780A 5m 02AGN780B 10 m 02AGN780C 15 m • Extension relay cable Order No. Cable length 02AGC150A 1 m Order No. Remarks 544-046 Japanese user's manual 544-047 English user's manual Order No. Display type Remarks 544-071 Japanese mm/E Japanese user's manual 544-071* English mm/E English user's manual 544-072* English mm/inch * To denote your AC power cable add the following suffixes to the order No.: A for UL/CSA, D for CEE, DC for CCC, E for BS, F for SAA, K for KC, C and No suffix are required for PSE."

Transcript of Laser Scan Micrometer - Bengatouch

Page 1: Laser Scan Micrometer - Bengatouch

G-31

G

Laser Scan MicrometerNon-contact, high-speed, high-precision measurement

Mitutoyo reserves the right to change any or all aspects of any product specification, including prices, designs and service content, without notice.

Cable space

Measuring range

(Measuring position)

M3, depth 6 (×4)ø3.1, depth 6

55126181

2

1

34324610370min

2532

.5

8440

15.5

10.5 17.5

1111

Working distance

40

LSM-500S Measuring UnitSERIES 544 — 5 μm to 2 mm Measuring Unit

•Capableofmeasuringdownto5µmoutsidediameter*1.

•Providesultra-highaccuracyof±0.3µmovertheentiremeasuringrange(5µmto2mm).

Optional Accessories• Multifunctional display unit, LSM-6200:

• Easy-to-operate display unit, LSM-5200:

• Standardcalibrationgageset(ø0.1,ø2.0) : 02AGD110• Guide pulley : 02AGD200• Air blower : 02AGD220Order No. Cablelength02AGN780A 5m02AGN780B 10m02AGN780C 15m

Order No. Remarks544-046 Japanese user's manual544-047 English user's manual

Order No. Display type Remarks544-071 Japanese mm/E Japanese user's manual544-071* English mm/E English user's manual544-072* English mm/inch*TodenoteyourACpowercableaddthefollowingsuffixesto

theorderNo.:AforUL/CSA,DforCEE,DCforCCC,EforBS,FforSAA,KforKC,CandNosuffixarerequiredforPSE."

SPECIFICATIONSOrder No. 544-531 544-532Applicablelaserstandards JIS IEC,FDAUser's Manual Japanese version English versionMeasuring range 0.005to2mm*1

Resolution 0.01to10µm(selectable)Repeatability*2 ±0.03µmAccuracy(20°C)*3 ±0.3µmPositionalerror*4 ±0.4µmMeasuring range*5 1×2mm(0.005to2mm)Scanning rate 3200scans/sLaser wavelength 650nm(Visible)Laser scanning speed 76 m/sOperating environment

Temperature 0to40°CHumidity RH35to85%(non-condensing)

ProtectionLevel IP64*6

*1:Themeasuringrangeforatransparentobjectis0.05mmto2mm.PleaseconsultyourlocalMitutoyoofficeforobjectssmallerthan0.05mm.

Themeasuringrangeis0.1mmto2mminthe1to255edgemeasurementmodeorwhenactivatingautomaticworkpiecedetection.IfusingtheoptionaldualconnectionunitforLSM-6200,themeasuringrangewillbe0.05mmto2mm.*2:Determinedatthelevelof±2 ( :standarddeviation)whenmeasuringø2mmattheintervalof0.32sec.(average1024times).*3: Applies at the center of the measuring range when measuring outside diameters.*4:Anerrorinoutsidediametermeasurementduetovariationinworkpiecepositioneitherintheopticalaxisdirectionorinthe

scanning direction.*5:Theareagivenby[opticalaxisdirection]×[scanningdirection].*6:Theprotectionlevelprovidedfortheinterior.Iftheworkpieceorglassofthemeasuringunitwindowissoiledbywaterordust,

the unit may malfunction.Note:Whenusingtheextra-finelinemeasurementfunction(FINE),guidemessagesforsettingthefollowingwillnotbedisplayed:

dual-measurement,segmentdesignation,automaticworkpiecedetection,andgroupjudgment.

8-M3

42 6453

10.5

15.5

2250

2084

104

57.5

23070min123 3968

34 34*7

10

48 8

18.5

4040

110 40.5 38.5 30

9.5

9.5

14.5

9.5

150

6

40 40

157 73

ø3.1 hole, depth 6(Measuring position)

Signal cableCable space

Relay cableEmission Unit Base

Max. 100

Measuring range

Reception Unit

Measuring position

M4, depth 8 (×3) M4, depth 8 (×3)

To Reception Unit(Cable length 0.6m)

ø3.1 hole, depth 6

ø3.1 hole, depth 6

Dimension when disconnected (bottom view)

<Mass>Emission Unit: 0.7kgReception Unit: 0.4kgBase: 0.3kgSignal cable (5m): 0.5kg*7: Extendable up to 66mm.

DIMENSIONS Unit: mm

DIMENSIONS Unit: mm

LSM-501S Measuring UnitSERIES 544 — 50 μm to 10 mm Measuring Unit

•Providesultra-highaccuracyof±0.5µmovertheentiremeasuringrange(0.05to10mm).

•Narrowrangeaccuracyof±(0.3+0.1 D)µmfor high-precision measurement.

Optional Accessories• Multifunctional display unit, LSM-6200:

• Easy-to-operate display unit, LSM-5200:

• Standardcalibrationgageset(ø0.1,ø10.0) : 02AGD120• Wire guiding pulley : 02AGD210•Adjustableworkstage : 02AGD400•Airblower : 02AGD230• Workstage : 02AGD270•Extensionsignalcable

SPECIFICATIONSOrder No. 544-533 544-534Applicablelaserstandards JIS IEC,FDAUser's Manual Japanese version English versionMeasuring range 0.05to10mmResolution 0.01to10µm(selectable)Repeatability*1 ±0.04µmAccuracy*2 (20°C)

Whole range ±0.5µmNarrow range ±(0.3+0.1 D)µm*3

Positionalerror*4 ±0.5µmMeasuring range*5 2×10mm(ø0.05toø0.1mm)4×10mm(ø0.1toø10mm)Scanning rate 3200scans/sLaser wavelength 650nm(Visible)Laser scanning speed 113 m/sOperating environment

Temperature 0to40°CHumidity RH35to85%(non-condensing)

ProtectionLevel IP64*6

*1: Determinedatthelevelof±2 ( :standarddeviation)whenmeasuringø10mmattheintervalof0.32sec.(average1024times).*2:Appliesatthecenterofthemeasuringrangewhenmeasuringoutsidediameters.*3: D=Differenceindiameterbetweenthemastergageandworkpiece.(Unit:mm)*4: Anerrorinoutsidediametermeasurementduetovariationinworkpiecepositioneitherintheopticalaxisdirectionorinthe

scanning direction.*5:Theareagivenby[opticalaxisdirection]×[scanningdirection].*6:Theprotectionlevelprovidedfortheinterior.Iftheworkpieceorglassofthemeasuringunitwindowissoiledbywaterordust,

the unit may malfunction.

Order No. Cablelength02AGN780A 5m02AGN780B 10m02AGN780C 15m•ExtensionrelaycableOrder No. Cablelength02AGC150A 1 m

Order No. Remarks544-046 Japanese user's manual544-047 English user's manual

Order No. Display type Remarks544-071 Japanese mm/E Japanese user's manual544-071* English mm/E English user's manual544-072* English mm/inch*TodenoteyourACpowercableaddthefollowingsuffixesto

theorderNo.:AforUL/CSA,DforCEE,DCforCCC,EforBS,FforSAA,KforKC,CandNosuffixarerequiredforPSE."

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Mitutoyo reserves the right to change any or all aspects of any product specification, including prices, designs and service content, without notice.

ø3.1

8-M3

805.

5

10525054.584.5

42 42

70 min

170 5580 50*7

88

482594857202

6

18.5

5022

10.5

15.5

9.5

9.5

14.5

9.5

415790

12 11090

20

10

30

355

46

53 6842

95.5 65.5

150

57.5

130

(Measuring position)

Signal cable

Cable space

Relay cable

Emission Unit

Max. 350

Measuring range

Measuring range

Reception Unit

Base

M4, depth 8, ø3.3 through hole (×3)For mounting side plate (same in the back)

M4, depth 8, ø3.3 through hole (×2)For mounting side plate (same in the back)

To Reception Unit(Cable length 1.4m)

ø3.1, depth 6 (Reference hole)

M4, depth 8 (×3)For mounting base

ø3.1, depth 6 (Reference hole)

M4, depth 8 (×3)For mounting base

Dimension when disconnected (bottom view)

<Mass>Emission Unit: 1.1kgReception Unit: 0.6kgBase: 0.5kgSignal cable (5m): 0.5kg*7: Extendable up to 270mm

12-M3

ø3.1

15.5

10.5

110*716388

192348

66

20

60

42

4218

.5

90 360 90

2250

100

58 70

7

258 102

540

185 82

70min

2011

013

0

12

115.5 71

797

168.587 87

42

14.5

9.5

162 174.5 121 63

9.5

9.5

273

(Measuring position)

Signal cable

Cable space Reception

Unit

Relay cable

Emission Unit

Max. 700

Measuring range

Measuring range

Base

M5, depth 10, ø4.2 through hole (×3)For mounting side plate (same in the back)

M5, depth 10, ø4.2 through hole (×2)For mounting side plate (same in the back)

To Reception Unit(Cable length 1.4m)

ø3.1, depth 6 (Reference hole)

M5, depth 10 (×3)For mounting base

ø3.1, depth 6 (Reference hole)

M5, depth 10 (×3)For mounting base

Dimension when disconnected (bottom view)

<Mass>Emission Unit: 1.4kgReception Unit: 0.8kgBase: 0.8kgSignal cable (5m): 0.5kg*7: Extendable up to 537mm

DIMENSIONS Unit: mm

DIMENSIONS Unit: mm

LSM-503S Measuring UnitSERIES 544 — 0.3 mm to 30 mm Measuring Unit

•Ensures±1.0µmaccuracyovertheentiremeasuringrange(0.3to30mm).

•Narrowrangeaccuracyof±(0.6+0.1 D)µmfor high-precision measurement.

Optional Accessories• Multifunctional display unit, LSM-6200:

• Easy-to-operate display unit, LSM-5200:

• Standardcalibrationgageset(ø0.1,ø30.0) : 02AGD130•Adjustableworkstage : 02AGD490•Airblower : 02AGD240• Workstage : 02AGD270•Extensionsignalcable

Optional Accessories• Multifunctional display unit, LSM-6200:

• Easy-to-operate display unit, LSM-5200:

• Standardcalibrationgageset(ø0.1,ø60.0) : 02AGD140•Adjustableworkstage : 02AGD520•Airblower : 02AGD250•Extensionsignalcable

Order No. Cablelength02AGN780A 5m02AGN780B 10m02AGN780C 15m02AGN780D 20m

Order No. Cablelength02AGN780A 5m02AGN780B 10m02AGN780C 15m02AGN780D 20m

•Extensionrelaycable02AGC150A 1 m02AGC150B 3 m02AGC150C 5m

•Extensionrelaycable02AGC150A 1 m02AGC150B 3 m02AGC150C 5m

SPECIFICATIONSOrder No. 544-535 544-536Applicablelaserstandards JIS IEC,FDAUser's Manual Japanese version English versionMeasuring range 0.3to30mmResolution 0.02to100µm(selectable)Repeatability*1 ±0.11µmAccuracy*2

(20°C)Whole range ±1.0µmNarrow range ±(0.6+0.1 D)µm*3

Positionalerror*4 ±1.5µmMeasuring range*5 10×30mm(0.3to30mm)Scanning rate 3200scans/sLaser wavelength 650nm(Visible)Laser scanning speed 226 m/sOperating environment

Temperature 0to40°CHumidity RH35to85%(non-condensing)

ProtectionLevel IP64*6

*1: Determinedatthelevelof±2 ( :standarddeviation)whenmeasuringø30mmattheintervalof0.32sec.(average1024times).*2:Appliesatthecenterofthemeasuringrangewhenmeasuringoutsidediameters.*3: D=Differenceindiameterbetweenthemastergageandworkpiece(Unit:mm)*4: Anerrorinoutsidediametermeasurementduetovariationinworkpiecepositioneitherintheopticalaxisdirectionorinthe

scanning direction.*5:Theareagivenby[opticalaxisdirection]×[scanningdirection].*6:Theprotectionlevelprovidedfortheinterior.Iftheworkpieceorglassofthemeasuringunitwindowissoiledbywaterordust,

the unit may malfunction.

Order No. Remarks544-046 Japanese user's manual544-047 English user's manual

Order No. Remarks544-046 Japanese user's manual544-047 English user's manual

Order No. Display type Remarks544-071 Japanese mm/E Japanese user's manual544-071* English mm/E English user's manual544-072* English mm/inch*TodenoteyourACpowercableaddthefollowingsuffixesto

theorderNo.:AforUL/CSA,DforCEE,DCforCCC,EforBS,FforSAA,KforKC,CandNosuffixarerequiredforPSE."

Order No. Display type Remarks544-071 Japanese mm/E Japanese user's manual544-071* English mm/E English user's manual544-072* English mm/inch*TodenoteyourACpowercableaddthefollowingsuffixesto

theorderNo.:AforUL/CSA,DforCEE,DCforCCC,EforBS,FforSAA,KforKC,CandNosuffixarerequiredforPSE."

LSM-506S Measuring UnitSERIES 544 — 1 mm to 60 mm Measuring Unit

•Ensures±3µmaccuracyovertheentiremeasuringrange(1to60mm).

•Narrowrangeaccuracyof±(1.5+0.5 D)µmfor high-precision measurement.

SPECIFICATIONSOrder No. 544-537 544-538Applicablelaserstandards JIS IEC,FDAUser's Manual Japanese version English versionMeasuring range 1to60mmResolution 0.05to100µm(selectable)Repeatability*1 ±0.36µmAccuracy*2

(20°C)Whole range ±3µmNarrow range ±(1.5+0.5 D)µm*3

Positionalerror*4 ±4µmMeasuring range*5 20×60mm(1to60mm)Scanning rate 3200scans/sLaser wavelength 650nm(Visible)Laser scanning speed 452 m/sOperating environment

Temperature 0to40°CHumidity RH35to85%(non-condensing)

ProtectionLevel IP64*6

*1: Determinedatthelevelof±2 ( :standarddeviation)whenmeasuringø60mmattheintervalof0.32sec.(average1024times).*2:Appliesatthecenterofthemeasuringrangewhenmeasuringoutsidediameters.*3: D=Differenceindiameterbetweenthemastergageandworkpiece(Unit:mm)*4: Anerrorinoutsidediametermeasurementduetovariationinworkpiecepositioneitherintheopticalaxisdirectionorinthe

scanning direction.*5:Theareagivenby[opticalaxisdirection]×[scanningdirection].*6:Theprotectionlevelprovidedfortheinterior.Iftheworkpieceorglassofthemeasuringunitwindowissoiledbywaterordust,

the unit may malfunction.

Page 3: Laser Scan Micrometer - Bengatouch

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Laser Scan MicrometerNon-contact, high-speed, high-precision measurement

Mitutoyo reserves the right to change any or all aspects of any product specification, including prices, designs and service content, without notice.

LSM-512S Measuring UnitSERIES 544 — 1 mm to 120 mm Measuring Unit

•Ensures±6µmaccuracyovertheentiremeasuringrange(1to120mm).

•Narrowrangeaccuracyof±(4.0+0.5 D)µmfor high-precision measurement.

SPECIFICATIONSOrder No. 544-539 544-540Applicablelaserstandards JIS IEC,FDAUser's Manual Japanese version English versionMeasuring range 1to120mmResolution 0.1to100µm(selectable)Repeatability*1 ±0.85µmAccuracy*2 (20°C)

Whole range ±6µmNarrow range ±(4.0+0.5 D)µm*3

Positionalerror*4 ±8µmMeasuring range*5 30×120mm(1to120mm)Scanning rate 3200scans/sLaser wavelength 650nm(Visible)Laser scanning speed 904 m/sOperating environment

Temperature 0to40°CHumidity RH35to85%(non-condensing)

ProtectionLevel IP64*6

*1: Determinedatthelevelof±2 ( :standarddeviation)whenmeasuringø120mmattheintervalof0.32sec.(average1024times).*2:Appliesatthecenterofthemeasuringrangewhenmeasuringoutsidediameters.*3: D=Differenceindiameterbetweenthemastergageandworkpiece(Unit:mm)*4: Anerrorinoutsidediametermeasurementduetovariationinworkpiecepositioneitherintheopticalaxisdirectionorinthe

scanning direction.*5:Theareagivenby[opticalaxisdirection]×[scanningdirection].*6:Theprotectionlevelprovidedfortheinterior.Iftheworkpieceorglassofthemeasuringunitwindowissoiledbywaterordust,

the unit may malfunction.

8-M4

ø3.1

312 88

48

7

48

146

9

146

9

200100

521379696 263

8068

18.5

4816

230

192

84

99131*7190

700107321272

238462

70 min

19

819

8

85144256192

198

150400150

120

30

(Measuring position)

Signal cable

Cable space

Relay cable

Emission Unit

Max. 700

Measuring range

Measuring range

Reception Unit

Base

M6, depth 12, ø5 through hole (×3)For mounting side plate (same in the back)

M6, depth 12, ø5 through hole (×3)For mounting side plate (same in the back)

M6, depth 12 (×3)For mounting base

M6, depth 12 (×3)For mounting base

To Reception Unit(Cable length 1.4m)

ø3.1, depth 6 (Reference hole)

ø3.1, depth 6 (Reference hole)

Dimension when disconnected (bottom view)

<Mass>Emission Unit: 3.0kgReception Unit: 1.2kgBase: 1.8kgSignal cable (5m): 0.5kg*7: Extendable up to 510mm

ø3.1 (Measuring position)8-M4

84110 10

841

9 9

378

170 110600350 250

9

200100

120

100

7420

.5

880320 160400

8.7200 200

8.7

224

2524

9

206 87.5360520

306107100

40

200400 13 13688218

160

208

208

Min. 70

Cable space

Measuring range

M6, depth 12, ø5 through hole (×3)For mounting side plate (same in the back)

M6, depth 12, ø5 through hole (×3)For mounting side plate (same in the back)

M6, depth 12 (×3)For mounting base

M6, depth 12 (×3)For mounting base

Measuring position ø3.1 hole, depth 6(Reference hole)

Note1: Distance between emission unit and reception unit: 400mm to 800mm

Note1

Optional Accessories• Multifunctional display unit, LSM-6200:

• Easy-to-operate display unit, LSM-5200:

•Standardcalibrationgageset(ø20.0,ø120.0) : 02AGD150•Airblower : 02AGD260•Extensionsignalcable

Optional Accessories• Multifunctional display unit, LSM-6200:

• Easy-to-operate display unit, LSM-5200:

• Standardcalibrationgageset(ø20.0,ø160.0) : 02AGM300•Extensionsignalcable

Order No. Cablelength02AGN780A 5m02AGN780B 10m02AGN780C 15m02AGN780D 20m

Order No. Cablelength02AGN780A 5m02AGN780B 10m02AGN780C 15m02AGN780D 20m

•Extensionrelaycable02AGC150A 1 m02AGC150B 3 m02AGC150C 5m

•Extensionrelaycable02AGC150A 1 m02AGC150B 3 m02AGC150C 5m

Order No. Remarks544-046 Japanese user's manual544-047 English user's manual

Order No. Remarks544-046 Japanese user's manual544-047 English user's manual

Order No. Display type Remarks544-071 Japanese mm/E Japanese user's manual544-071* English mm/E English user's manual544-072* English mm/inch*TodenoteyourACpowercableaddthefollowingsuffixesto

theorderNo.:AforUL/CSA,DforCEE,DCforCCC,EforBS,FforSAA,KforKC,CandNosuffixarerequiredforPSE."

Order No. Display type Remarks544-071 Japanese mm/E Japanese user's manual544-071* English mm/E English user's manual544-072* English mm/inch*TodenoteyourACpowercableaddthefollowingsuffixesto

theorderNo.:AforUL/CSA,DforCEE,DCforCCC,EforBS,FforSAA,KforKC,CandNosuffixarerequiredforPSE."

DIMENSIONS Unit: mm

DIMENSIONS Unit: mm

LSM-516S Measuring UnitSERIES 544 — 1 mm to 160 mm Measuring Unit

•Ensures±7µmaccuracyovertheentiremeasuringrange(1to160mm).

•Narrowrangeaccuracyof±(4.0+2.0 D)µmfor high-precision measurement.

SPECIFICATIONSOrder No. 544-541 544-542Applicablelaserstandards JIS IEC,FDAUser's Manual Japanese version English versionMeasuring range 1to160mmResolution 0.1to100µm(selectable)Repeatability*1 ±1.4µmAccuracy*2 (20°C)

Whole range ±7µmNarrow range ±(4.0+2.0 D)µm*3

Positionalerror*4 ±8µmMeasuring range*5 40×160mm(1to160mm)Scanning rate 3200scans/sLaser wavelength 650nm(Visible)Laser scanning speed 1206 m/sOperating environment

Temperature 0to40°CHumidity RH35to85%(non-condensing)

ProtectionLevel IP64*6

*1: Determinedatthelevelof±2 ( :standarddeviation)whenmeasuringø160mmattheintervalof0.32sec.(average1024times).*2:Appliesatthecenterofthemeasuringrangewhenmeasuringoutsidediameters.*3: D=Differenceindiameterbetweenthemastergageandworkpiece(Unit:mm)*4: Anerrorinoutsidediametermeasurementduetovariationincylinderpositioneitherintheopticalaxisdirectionorinthescanning

direction.*5:Theareagivenby[opticalaxisdirection]×[scanningdirection].*6:Theprotectionlevelprovidedfortheinterior.Iftheworkpieceorglassofthemeasuringunitwindowissoiledbywaterordust,

the unit may malfunction.

Page 4: Laser Scan Micrometer - Bengatouch

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Mitutoyo reserves the right to change any or all aspects of any product specification, including prices, designs and service content, without notice.

ø3.1

70minCablespace

10.5 7

705635

25

58

5017

0

15.5

90

200

190420

70

70

70 90

74

11 3 11

Measuring range

10012060 60

50228×M3

15(Measuring position)

ø3.1 (Measuring position)

12-M3

Measuring range

80Ca

ble

spac

e18

0

11

25

60

98

1005022

647

60

120

1011 882365

52.540

382 85180

528

202

11

10.5

15.5

1010

0

10150

83 97

100 100

172 13.5

Optional Accessories (Refer to page G-36fordetails.)•Standardcalibrationgageset(ø1.0,ø25.0) : 02AGD180•Workstage : 02AGD270•Adjustableworkstage : 02AGD280•Digimaticcodeoutputunit(2-ch) : 02AGC840

Measuring Unit External Dimensions Unit: mm

DIMENSIONS Unit: mm

LSM-6902H Measuring Unit and 6900 DisplaySERIES 544 — 0.1 mm to 25 mm High Accuracy

•Demonstratesthebestrepeatabilityavailableinthe25mmclass.

•Theultra-precisescanningmotorenablesthehighestmeasurementaccuracytoberealized.

•Thankstoexcellentlinearity,anaccuracyof±0.5µmovertheentiremeasuringrangeandahigheraccuracyof±(0.3+0.1 D)overanarrowrange are guaranteed.

•Theoptimalsolutionformeasuringtheoutsidediameter of pin gages or plug gages.

SPECIFICATIONSSet Order No. 544-497 544-498 544-499Measuring unitType mm mm inch/mmApplicablestandards JIS IEC,FDAMeasuring range 0.1to25mm(0.004to1.0in)Resolution 0.01to 10µm(selectable) (0.000001 to 0.0005in)

Repeatability*1 Whole range ±0.045 µm(±0.0000018in)(ø25mm)Narrow range ±0.03 µm(±0.0000012in)(ø10mm)

Accuracy*2 (20°C)

Whole range ±0.5µm(±0.000020in)

Narrow range ±(0.3+0.1 D)[D:mm]±(0.000012+0.01 D)[D:inch]*5

Positionalerror*3 ±0.5µm(±0.000020in)Measuring range*4 ±1.5mm×25mm(±0.006×1.0in)Scanning rate 1600scans/sLaser wavelength 650nm(Visible)Laser scanning speed 112 m/sOperating environment

Temperature 0to40°CHumidity RH35to85%(non-condensing)

*1:Atthe2 levelinthecasewhereø25mmandø10mmdiametersaremeasuredusingameasurementtimeof1.28seconds(2048scansonaverage).

*2:Thevalueatthecenterofthemeasuringrange.*3:Theadditionalerror(inoutsidediameter)causedby

workpiece movement within the measuring envelope during the measuring cycle.

*4: Lengthalongopticalaxis × Scanninglength(Measuringrange)*5: Disthedifferenceinoutsidediameterbetweenthemaster

gage and workpiece.Note:TodenoteyourACpowercableaddthefollowingsuffixes

totheorderNo.:AforUL/CSA,DforCEE,DCforCCC,EforBS,FforSAA,KforKC,CandNosuffixarerequiredforPSE.

Display unit

Display 16-digit plus 11-digit fluorescent display, and guide message LED

Segment 1to7(1to3,transparent)or1to255edgesAveraging times

Arithmeticaverage:1to2048scans.Movingaverage:32to2048scans.

JudgmentSelectionfrom"targetvalue+tolerance",

"lowertolerance+uppertolerance",or"7classesmultilimittolerancezone".

Measurement mode

Standby,Singlemeasurement,Continuousmeasurement

Statistical analysis Maximum,Minimum,Average,Dispersion,(S.D)

Externaldimensions 335(W)×134(H)×250(D)mm

Powersupply 100to240VAC±10%50W50/60HzStandard I/F RS-232C,AnalogI/O

Optional I/F Digimaticcodeoutputunit(2-ch),2ndI/OanalogI/F,BCDI/F

Operating environment 0to40°C,RH35to85%(non-condensing)

Others

Nominal setting, sample setting, suppression of unnecessarydigits,transparentobjectmeasurement,automatic measurement in edge mode, output timer,abnormaldataelimination,SHLchange,groupjudgment,simultaneousmeasurement,statisticalprocessing,mastering,buzzerfunction,automaticworkpiece detection (dimension/position),zero-set/offsetNote: In the case of dual measuring-unit connection, extra-finelinemeasurementandsomeofthecommunicationcommandsarenotavailable

LSM-9506 Integrated Display/Measuring UnitSERIES 544 — 0.5 mm to 60 mm High Accuracy

•Highaccuracyof±2.5µm,integrateddisplayunitwithmanyfunctionsequivalenttothemulti-function display unit.

Optional Accessories• Standardcalibrationgageset(ø1,ø60): 02AGD170

SPECIFICATIONSOrder No. 544-115* 544-116**Type mm inch/mmMeasuring range 0.5to60mm 0.02into2.36in/0.5to60mmResolution 0.05to100µm(selectable) 0.000002into0.005/0.00005to0.1mmRepeatability*1 ±0.6µm(±0.00003in)Accuracy*2(20°C) ±2.5µm(±0.0001in)Positionalerror*3

(opticalaxis/scanningdirection)±2.5µm(±0.0001in)

L:DisplacementbetweenworkpiececenterandopticalaxiscenterMeasuring range*4 ±5×60mm(±0.2×2.36in)Scanning rate 1600scans/sLaser wavelength 650nm(Visible)*5

Laser scanning speed 226 m/s(8900in/s)Display unit 16-digitdotmatrix(uppercolumn)+7segment11-digit(lowercolumn),guidanceLEDsStandard interface RS-232C,Digimaticcodeoutputunit(1ch)Optional interface NoPowersupply AC100Vto240V±10%,40VA,50/60HzOperating environment 0to40°C,RH35to85%(non-condensing)*1: Determined at the level of ±2 ( :standarddeviation)whenmeasuringø10mmattheintervalof0.32sec. (average512times).*2:Appliesatthecenterofthemeasuringrangewhenmeasuringoutsidediameters.*3: D=Differenceindiameterbetweenthemastergageandworkpiece(Unit:mm)*4: Anerrorinoutsidediametermeasurementduetovariationinworkpiecepositioneitherintheopticalaxisdirectionorinthescanningdirection.*5:FDAClassII(544-116-1A)/IECClass2(Allmodelsexcept544-116-1A)semiconductorlaserforscanning(Maximumpower:1.0mW)*TodenoteyourACpowercableaddthefollowingsuffixestotheorderNo.:DforCEE,DCforCCC,EforBS,FforSAA,KforKC,

CandNosuffixarerequiredforPSE.**TodenoteyourACpowercableaddthefollowingsuffixestotheorderNo.:AforUL/CSA,DforCEE,DCforCCC,EforBS,Kfor

KC,CandNosuffixarerequiredforPSE.

6900LSM-6902H

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G

Laser Scan MicrometerNon-contact, high-speed, high-precision measurement

Mitutoyo reserves the right to change any or all aspects of any product specification, including prices, designs and service content, without notice.

•2-axisdisplayunitenables2itemsbedisplayedsimultaneously.•Capableofstatisticalanalysissuchas:average,maximum

value,minimumvalue,range(max.tomin.).•Segmentmeasurement(7points)oredgemeasurement(1to

255edges)canbeselected.•Afunctiontoeliminateabnormalvaluesisstandard.•100tolerancevalues,presetvalues,orsettingscanbestored.

LSM-5200 Display UnitSERIES 544 — Panel-mount Type

•Acompactcontrollerwhichcouldbeusedformulti-unitsystemconfigurations.

•A panel-mount type display unit designed for the LSM-S series.•AnalogI/OandRS-232Cisstandard.•Measurement of odd fluted parts, and simultaneous

measurement/2-programfunctionareequipped.

LSM-6200 Display UnitSERIES 544 — Multi-function Type

138 0+1

72

144

140.4

68

138 (Aluminum case)

197.1 (20.5)

Front view

Rear view

68+0

.7 0

Dimensions of panel mounting slot (DIN 43 700-144×76)Panel thickness: 1.6mm to 6mmMass: 1.4kg

Support for mounting plate

Bottom view

Panel thickness: 1.6mm to 6mm

*240

.3 +

(t-

0.6)

(4.4

)

(Alum

inum

case

)

Side view

SPECIFICATIONSOrder No. 544-071 544-072Type mm inch/mmDisplay 16-digit plus 11-digit fluorescent display, and guide message LEDSegment 1to7(1to3,transparent)or1to255edges*1

Averaging times Arithmeticaverage:per2to2048/Movingaverage:per32to2048(Arithmeticaverageisper16to2048when using 544-531, 544-532)

Judgment Selection from"targetvalue+tolerance", "lowertolerance+upper tolerance", or "7classesmulti-limittolerancezone".

Measurement mode Standby,Singlemeasurement,ContinuousmeasurementStatistical analysis Maximum,Minimum,Average,Dispersion, (S.D)Size 335(W)×134(H)×250(D)mmPowersupply 100to240VAC±10%,40VA,50/60HzStandard I/F RS-232C,AnalogI/OOptional I/F Digimaticcodeoutputunit(2-ch),2ndI/OanalogI/F,BCDI/FOperating environment 0to+40°C,RH35to85%(non-condensing)

Other functions

Nominalsetting,samplesetting,selectionofunnecessarydigits,transparentobjectmeasurement*2, measurementofoddflutedparts,automaticmeasurementinedgemode,outputtimer,abnormaldata

elimination,SHLchange,groupjudgment,simultaneousmeasurement,statisticalprocessing,mastering,buzzerfunction,automaticworkpiecedetection(dimension/position)*1,zero-set/offset,dualmeasurement(optional)

*1:Themeasuringrangewillbe0.1mmto2mminthe1to255edgemeasurementmodeorwhenactivatingautomaticworkpiecedetection with 544-531, 544-532.Eachfunctionhasitscombinationlimit.

*2:Themeasuringrangeis50µmto2mmwhenusing544-531, 544-532. For smaller ranges, contact your local Mitutoyo sales office.Note1:TodenoteyourACpowercableaddthefollowingsuffixestotheorderNo.:AforUL/CSA,DforCEE,DCforCCC,EforBS,

FforSAA,KforKC,CandNosuffixarerequiredforPSE.Note2:Cannotbeconnectedto544-495, 544-496.Note3:Previousmodelssuchas544-451cannotbeconnected.

SPECIFICATIONSOrder No. 544-047Display 9digitsplus8digitsLED,guidemessageLEDSegment 1to7(1to3,transparent)or1to255edges*1

Averaging method Arithmeticaverage:from4to2048;Movingaverage:from32to2048(Arithmeticaverageisfrom16to2048whenusingLSM-500S.)

Judgment Selectingfrom"targetvalue±tolerancevalue"or"lowerlimit/upperlimit".Measurement mode Standby,Singlemeasurement,ContinuousmeasurementStatistical analysis CalculationresultisoutputviaUSBorRS-232C.Externaldimensions 144(W)×72(H)×197.1(D)mmPowersupply*3 24VDC±10%,1.3AormoreStandard I/F USB2.0,RS-232C,I/OanalogOperating environment 0to40°C,RH35to85%(non-condensing)Preservationenvironments −20to70°C,RH35to85%(non-condensing)

Other functions

Measurement of odd fluted parts, simultaneous measurement, nominal setting, sample setting, selection of unnecessarydigits,transparentobjectmeasurement*2

Automaticworkpiecedetection(dimension/positiondetected)*1,abnormaldataelimination,mastering,statisticalprocessing(whenusingUSB,RS-232C),outputtimer,automaticmeasurementinedgemode,presetting

Notethateveryfunctionislimitedinitscombinationpossibilities.Seetheusermanualfordetails.Mass 1.4 kg*1:Themeasuringrangewillbe0.1mmto2mminthe1to255edgemeasurementmodeorwhenactivatingtheautomatic

workpiece detection with 544-531, 544-532.Eachfunctionhasitscombinationlimit.*2:Themeasuringrangeis50µmto2mmwhenusing544-531, 544-532. For smaller ranges, contact your local Mitutoyo sales office.*3:DC24Vexternalpowersupply(commercialitem)isrequiredseparately.Note1:Cannotbeconnectedto544-495, 544-496.Note2:Previousmodelssuchas544-451cannotbeconnected.Note3:ForUSBcommunicationwithaPC,adedicateddevicedriverisrequired.Fordetails,contactyourlocalMitutoyosalesoffice.

Cabl

e sp

ace

0 /

1 2 3

654

7 8 9

L.CAL

H.CAL

C

A1A6

B1B6

335

80

125

1313

428

1.4

121

13.5

250

12°

DIMENSIONS Unit: mm

DIMENSIONS Unit: mm

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G-36

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Mitutoyo reserves the right to change any or all aspects of any product specification, including prices, designs and service content, without notice.

Optional AccessoriesSERIES 544 — Laser Scan Micrometer (Measuring Unit)

•StandardcylindergagesetsuitableforcalibrationofLaserScanMicrometers.

•Nominalgagediameters(1to160mm)areasgiven in Specifications.

Standard calibration gage set

•Easy set-up and height adjustmentenableshigh-precisionmeasurement.

Workstage

•Pingageorpluggage•Roller of copying machine

Measurement Examples•Vertical/horizontalslidemechanism

enableseasymeasurementofvarious workpiece diameters.

•Bestsuitedforqualityassuranceofhigh-precision pin gages.

Adjustable workstage

SPECIFICATIONSForcalibratingmodels

LSM-6902H LSM-500S LSM-501S LSM-503S LSM-506S LSM-512S LSM-516S LSM-9506544-498, 544-499 544-531, 544-532 544-533, 544-534 544-535, 545-536 544-537, 544-538 544-539, 544-540 544-541, 544-542 544-115, 544-116

Set No. 02AGD180 02AGD110 02AGD120 02AGD130 02AGD140 02AGD150 02AGM300 02AGD170

Configuration(OrderNo.)

Stand 02AGD181 02AGD111 02AGD121 02AGD131 02AGD141 02AGD151 02AGM320 02AGD171

Gages ø1:02AGD920ø25:02AGD963

ø0.1:958200ø2:958202

ø0.1:958200ø10:229317

ø1:02AGD920ø30:02AGD961

ø1:02AGD920ø60:02AGD962

ø20:229730ø120:234072

ø20:229730ø160:02AGM303

ø1:02AGD920ø60:02AGD962

Carryingcase 02AGD190 958203 958203 02AGD980 02AGD980 02AGD990 02AGM310 02AGD970

SPECIFICATIONS

ModelLSM-501SLSM-503SLSM-6902H

Order No. 02AGD270

Basic configurationBasicset Order No. Model Standard Accessories Measuringrange(mm) Horizontalstroke(mm) Verticalstroke(mm)

(1)Mainunit(2)V-block(3)Stop

02AGD280 LSM-6902HV-block(02AGD420),2pcsStopper(02AGD430),1pc

0.1to25 130 4702AGD400 LSM-501S 0.05to10 130 3202AGD490 LSM-503S 0.3to30 200 3502AGD520 LSM-506S* V-blockA(02AGD550),2pcs

V-blockB(02AGD560),1pcV-blockC(02AGD570),1pc

1to60 300 4502AGD370 LSM-9506*

0.5to60 200 4502AGD680 0.5to60 300 45

*Thestopisnotincludedinthebasicsetforthesemodels.Note: Optionalpartfortheadjustableworkstage,suchascentersupport,adjustableV-block(up/down)etc.,areavailable.

•Usedforsupportingmeasurementofoutsidediameter of fine wirelike materials such as magneticwireorfiber.

Guide pulley

SPECIFICATIONSModel LSM-500S LSM-501SOrder No. 02AGD200 02AGD210Each measurement range is as follows:LSM-500S: ø5µmtoø1.6mmLSM-501S: ø50µmtoø2mm

Forcalibration,thecalibrationgagesetforLSM-500S (02AGD110)isrequired.

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G-37

G

Laser Scan MicrometerNon-contact, high-speed, high-precision measurement

Mitutoyo reserves the right to change any or all aspects of any product specification, including prices, designs and service content, without notice.

Optional AccessoriesSERIES 544 — Laser Scan Micrometer (Measuring Unit)

•Airblowsfromtheairoutletinstalledonthelasersection to clear dust adhering to the laser window.

Air shield

•Extensionsignalcablesarenecessarywhen the measuring unit and display unit areseparatedinoperation;Extensionrelaycablesarenecessarywhentheoptical section is separated in operation.

Extension signal cable / Extension relay cable

•Measurementdatacanbeprinted.

Optional AccessoriesSERIES 544 — Laser Scan Micrometer (Display Unit)

Thermal printer DPU-414

•OutputsmeasurementdatainBCDoutput(7-digit)orHEXoutput.

•Datalogiccanbeswitched.•IsolatedI/Ocircuitry•AvailableforLSM-6200 (544-071, 544-072)

and LSM-6902H (544-498, 544-499).

Optional AccessoriesInterface for LSM6200, 6902H

BCD Interface

SPECIFICATIONSAir supply unit Air shield Applicablemodels

957608

02AGD220 LSM-500S (544-531, 544-532)02AGD230 LSM-501S (544-533, 544-534)02AGD240 LSM-503S (544-535, 544-536)02AGD250 LSM-506S (544-537, 544-538)02AGD260 LSM-512S (544-539, 544-540)

Note:Airshieldissuppliedwith5mairtube(OutsideDiameter:6mm).

Extension signal cable

Relay cable, 1.4m(0.6m for 544-533, 544-534) Not equipped with 544-531, 544-532 (and 544-498, 544-499 )

Extension relay cable

Signal cable (5m) 02AGN770A

Display unit

Emission Unit

Reception Unit

SPECIFICATIONSExtension signal cable Extension relay cableOrder No. Cablelength Order No. Cablelength02AGN780A 5m 02AGC150A 1 m02AGN780B 10m 02AGC150B 3 m02AGN780C 15m 02AGC150C 5m02AGN780D 20m* For 544-531, 544-532, 544-533, 544-534theallowablemaximumlengthforsignalcableis20m;relaycableis2m.* For 544-535, 544-536, 544-537, 544-538, 544-539, 544-540, 544-541, 544-542theallowablemaximumlengthforsignal

cableis30m;relaycableis5m.*Themaximumextensionlengthofthesignalcableandrelaycableis32mintotal.*Cannotbeusedwith544-498 and 544-499.

SPECIFICATIONSOrder No. 02AGD600A, 02AGD600B,

02AGD600C, 02AGD600DPrintingmethod ThermaldotmatrixPrintingcapacity 40Columns(Normal)Characterconfiguration 9×8dotmatrixPrintingdirection BidirectionalInterface RS-232CPowersupply AC100to240V50/60Hz(ACadapter)

Standard Accessories Printercable2m(02AGD620A),Printerpaper1roll,ACadapter

Printerpaper(optional) Order No.223663(10-rollset)

937179T

•ForLSM-6200 (544-071, 544-072), LSM-6902H (544-498, 544-499) and LSM-9506 (544-115, 544-116).

SPECIFICATIONSOrder No. 02AGC910Standard Accessories Connector(DDK)57-30360 (214188)

Foot switch

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G-38

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Mitutoyo reserves the right to change any or all aspects of any product specification, including prices, designs and service content, without notice.

XY Measurement

(X–Y):flatness(X+Y)/2:average*XYrequires10mm-interval.

Parallel Measurement

Optional AccessoriesSERIES 544 — Laser Scan Micrometer (Display Unit)

•2-channelDigimaticcodeoutput•Insimultaneousmeasurement,measurement

data are output as follows:ProgramNo.0toNo.4inOUTPUT-1ProgramNo.5toNo.9inOUTPUT-2

(10programsoperated)•10pinMILtypeconnector.•Outputcableisnotsupplied.Connectingcable(optional)1m(936937)•AvailableforLSM-6200 (544-071, 544-072)

and LSM-6902H (544-498, 544-499).* Output is 6 digits of measurement data.* Displaying 6th and 7th digit after the decimal point is

not supported.

Digimatic code output unit

•Enablessecondunitconnectionto LSM-6200 (544-071, 544-072).(bothunitsmustbethesamemodel)

*CannotbeusedforLSM-6902H (544-498, 544-499).

•Depending on the layout of the two measuring units, large-diametermeasurement,XYmeasurement,andparallelmeasurementarepossible.

•Bothofthemeasuringunitsanddisplayunitscanbesimultaneouslyoperated.

120±10

47.8

200±10

Dual connection unit

•I/O,analogoutput.•Simultaneousmeasurementissupportedby

twopairsofGO/NGjudgmentoutputs.•AvailableforLSM-6200 (544-071, 544-072)

and LSM-6902H (544-498, 544-499).

2nd I/O analog I/F

X Y

•BothBCD(02AGC910)and2ndI/Oanalog I/F (02AGC880)canbemountedonLSM-6200 (544-071, 544-072)andLSM-6902H (544-498, 544-499)usingthiscable.

*Ifusingthiscable,thedualconnectionunit(02AGP150)cannotbeused.

Cable for BCD and 2nd I/O simultaneous mount

SPECIFICATIONSOrder No. 02AGC840

SPECIFICATIONSOrder No. 02AGP150

SPECIFICATIONSOrder No. 02AGC880Standard Accessories Connector(DDK)57-30360 (214188)

SPECIFICATIONSOrder No. 02AGE060

Unit: mmDIMENSIONS