FANUC ROBONANO α-0iB -English-€¦ · Main specifications Work-table area Run out Mass of the...

Main specifications

Work-table area

Run out

Mass of the machine

Stroke

Command resolution

Bearing type

Maximum feedrate

Straightness

Standard accessories

X axis (horizontal linear)

Z axis (horizontal linear)

Y axis (vertical linear)

B axis (horizontal rotation)

C axis (vertical rotation)

Hydrostatic air bearing (all axes)

X, Z, and Y axes

B and C axes

B and C axes

X and Z axes

Y axis

B axis

C axis

X axis

Z axis

Y axis

B and C axes

Approx. 1700 kg

Supplying cutting fluid unitTool holderCounter weightAngle platePrecision compressed air temperature control systemSpeed display

280mm

150mm

40mm

360°(continuous rotation)

1nm

0.000001°

Φ210mm

500mm/min

50mm/min

3600°/min

3600°/min

250min-1 (S axis mode)

0.2μm/280mm

0.2μm/150mm

0.2μm/40mm

0.05μm

X

Y

Z

C

B

280mm

150mm

40mm

• All specifications are subject to change without notice.• No part of this catalog maybe reproduced in any form.• The photo includes options.• The products in this catalog are controlled based on Japan's "Foreign Exchange and Foreign Trade Law". The export of ROBONANO α-0+B from Japan is subject to an export License by the government of Japan. Other models in this catalog may also be subject to export controls.Further, re-export to another country may be subject to the license of the government of the country from where the product is re-exported. Furthermore, the product may also be controlled by re-export regulations of the United States government.Should you wish to export or re-export these products, please contact FANUC for advice.

Headquarters　Oshino-mura,Yamanashi 401-0597, Japan　Phone:81-555-84-5555 Fax:81-555-84-5512　http://www.fanuc.co.jp

For particulars apply to the ROBONANO sales Dept. at Oshino-mura, Yamanashi 401-0597, Phone:81-555-84-5371 Fax:81-555-84-5545

© < CORPORATION, 2001

< CORPORATION

RNANO α-0+B(E)-10, 2014. 10, Printed in Japan

High-reliability and High-performanceUltra Precision nano machine

<ROBONANO @ +

2 3

High-reliability and High-performance Ultra Precision nano machine

High sustainability

Maintenance-free bearing

Disturbance prevention

High reliability

Usability

Auto machining origin setting

Measurement guidance

Superior operability

High performance of machining

Ultra precision on-machine measurement

Various machining options

Ultra precision nano machining

FANUC ROBONANO @ +

High performance of machiningLaminar air bearing for ultra precision nano machiningUltra precision on-machine measurement by NANOCHECKERVarious machining options supporting all types of nano machining

High sustainabilityFANUC standard CNC and servo motor realizing high reliabilityMechanical unit using non-contact air bearings for all axesSuperior functions for preventing disturbance

UsabilityRevolving door structure for superior operabilityAutomatic machining origin setting by tool contact detectionGuidance function for improving operability of on-machine measurement

●Hydrostatic air bearings are adopted for all axes, thereby solid friction is completely eliminated.

●The design of the piping has been optimized so that turbulent flow causing minute vibration does not occur.

Laminar air bearing for ultra precision nano machining

●NANOCHECKER enables the form of a workpiece to be measured and compensated on the machine without attaching or removing the workpiece.

●NANOCHECKER can measure not only symmetrical figure, but also complicated free figure.

●NANOCHECKER enables inclination measurement using rotary axes to measure a lens with an inclination of over 80 degrees with high precision.

Ultra precision on-machine measurement by NANOCHECKER

Various machining options supporting all types of nano machining

High performance of machining

Smooth flow

Small whirl = source of vibration

Laminar flow

Turbulent flow

－110° ＋110°

Fresnel lens mold Diffraction grating mold

Head-up display mold Machining to lithium niobate (optical waveguide)

Scribing (5-axis) Milling (5-axis) Turning

High-speed scribing

* The machining accuracy of each sample is not guaranteed because it depends on the machining condition, the material, the tool, and so on.

Material : NiP plateSize : φ40 mmPitch : 0.1 mmNumber of grooves : 200

Material : NiP plateSize : 50×50 mmPitch : 1μmV-angle : 90°Number of grooves : 50,000Machine time : 5.5hours

Material : NiP plateSize : 160×70mmSurface roughness : Ra 8nmCurvature radius : approx. R2m & R0.4m

Material : Lithium niobateWidth : 15μmDepth : 5μm

Variable groove angle

4 5

Specifications of NANOCHECKERMaximum measuring speed

Measuring stroke

Measuring resolution

Measuring force

500mm/min

5mm

1nm

0～500mgf

W56×D90×H56mm／0.4kg

3-axis: ±60°(Downward: 75°）

5-axis: ±90°

Setting direction

Size/mass

Bearing type

Maximum measuring angle

Horizontal, vertical

Hydrostatic air bearing

Measurement software(with CAD/CAM function)

15μm

The option unit can be attached to either of the B and C tables.

Example of setting 1 Example of setting 2

Workpiece

160mm

1μm50mm

80μm

±85-degree inclined spherical lens mold

±85°inclined

φ6mm Material: NiP plate

Diameter: 6 mm

Figure accuracy after compensationPV approx. 0.1μm

Measured angle [degrees]

Form error [μm]

6 7

●Linear motion units and rotary units are directly driven by linear motors and built-in servo motors.

●All axes with air bearings are controlled in the order of nanometers.

●Linear motion units follow 1-nm step motion commands exactly.●The effect of floor vibration is eliminated as much as possible by the active damper.

FANUC standard CNC and servo motor realizing high reliability

●Non-contact air bearings are used for all axes, so the mechanical unit has a long service life.

●The accuracy is kept without periodic maintenance.

●No cooling system for bearing is required, so the device size is compact.

●Air bearings are also used for machining options.

Mechanical unit using non-contact air bearings for all axes

Superior functions for preventing disturbance

High sustainability

1-nm step motion along a linear axis (X, Y, Z)

Ordinary rolling bearing Air bearing

Heat and vibration generated by friction of bearing

No heat or vibration generated by friction-free bearing

System specifications

Temperature control system

Air temperature control precision

Input power supply

Power consumption

Dimensions/mass

Peltier constant current control

Setting±0.01℃

100VAC±10% 50/60Hz

0.5kW

W320×D550×H510mm／38kg

Effect of precision compressed air temperature control (relative positions of the tool and workpiece)

Active damper

●The temperature of compressed air for air bearings is controlled precisely to realize long-time stable machining.

Precision compressed air temperature control system

Compressed airMoving part

Air gap

Fixed part

Linear axis (X, Y, Z)

Rotary axis (B, C)

<linear motor

<synchronous built-in servo motor

< Series 30+Frequency of floor vibration (Hz)

Damping rate (dB)

Damping all frequency

0 5 10 15 0 5 10 15［Hour］［Hour］

Temperature control OFF Temperature control ON

1μm 0.1μm or less

Time [sec]1nm/div

Fixed part

Moving part

6 7

●Linear motion units and rotary units are directly driven by linear motors and built-in servo motors.

●All axes with air bearings are controlled in the order of nanometers.

●Linear motion units follow 1-nm step motion commands exactly.●The effect of floor vibration is eliminated as much as possible by the active damper.

FANUC standard CNC and servo motor realizing high reliability

●Non-contact air bearings are used for all axes, so the mechanical unit has a long service life.

●The accuracy is kept without periodic maintenance.

●No cooling system for bearing is required, so the device size is compact.

●Air bearings are also used for machining options.

Mechanical unit using non-contact air bearings for all axes

Superior functions for preventing disturbance

High sustainability

1-nm step motion along a linear axis (X, Y, Z)

Ordinary rolling bearing Air bearing

Heat and vibration generated by friction of bearing

No heat or vibration generated by friction-free bearing

System specifications

Temperature control system

Air temperature control precision

Input power supply

Power consumption

Dimensions/mass

Peltier constant current control

Setting±0.01℃

100VAC±10% 50/60Hz

0.5kW

W320×D550×H510mm／38kg

Effect of precision compressed air temperature control (relative positions of the tool and workpiece)

Active damper

●The temperature of compressed air for air bearings is controlled precisely to realize long-time stable machining.

Precision compressed air temperature control system

Compressed airMoving part

Air gap

Fixed part

Linear axis (X, Y, Z)

Rotary axis (B, C)

<linear motor

<synchronous built-in servo motor

< Series 30+Frequency of floor vibration (Hz)

Damping rate (dB)

Damping all frequency

0 5 10 15 0 5 10 15［Hour］［Hour］

Temperature control OFF Temperature control ON

1μm 0.1μm or less

Time [sec]

1nm/div

Fixed part

Moving part

8 9

●During setup, you can turn the revolving door to access the work area from the right, left, and top. ●A tutorial guidance function is added to enable operator errors to decrease.

●Various types of software are integrated to improve usability.

●The relevant software is automatically started according to the target work.

Revolving door structure for superior operability

●This function detects the contact between the edge of a tool tip and the machining surface of the workpiece and automatically sets the origin of machining.

●Contact is detected by sensing a change in positional deviation occurring when a tool tip contacts with a workpiece.

●The detection accuracy is 0.5μm or less

Automatic machining origin setting by tool contact detection

Guidance function for improving operability of on-machine measurement

Usability

* The machining accuracy of each sample is not guaranteed because it depends on the machining condition, material, tool, and so on.

Material : NiP plateSize : 60×15mmFigure accuracy : PV 0.15μmSurface roughness : PV 11nm

Material : NiP plateSize : φ3 mmFigure accuracy : PV 52nmSurface roughness : Ra 1.3 nm

Material : NiP plateSize : φ3mmFigure accuracy : PV 70nmSurface roughness : Ra 1.8nm

Material : NiP plateSize : φ40mmNumber of lenses : 300Lens size : φ0.8mmFigure accuracy : PV 0.1μm

Lens array mold

Spherical lens mold Non-spherical lens mold

Asymmetrical free figure

Revolving door operation

Tool contact detectionChange in positional deviation at the moment of contact

Screen of NANOCHECKER software with the guidance function

Turned 180°

Revolving door

Contact

Positional deviation

Time

The tool goes up at the moment of contact.

Tool

Edge of a tool tip

Workpiece

Contact between the edge of a tool tip and the highest point on the workpiece

φ0.8mm

φ40mm

φ3mm φ3mm

R25mm

R25mm60mm

10 11

Installation condition

Environmental conditions

Specifications of machining options Outline drawing and floor plan

Turning air turbine spindle

Shuttle unit

Diameter of shaft table

Maximum speed

Dimensions/mass

Bearing type

Run out

Speed display function provided

●The balance can be corrected by two sides.●Fly cutting is also possible.

φ72mm

7,000min‒1

φ184×77mm／4.8kg


0.05μm （NRRO）

●To take full advantage of the performance of the machine, install the machine in the environment described below. For details, contact FANUC.

Maintenance and customer support

* Air supply is required not only during machine operation, but also in other times such as in the nighttime and on holidays.* The temperature of the input air must be managed so that it is equivalent to room temperature.* The above air flow rates were measured near the air supply port of the machine.* Equipment that exhausts mist in the machining area might separately be required.

Stroke

Horizontal drive speed

Vertical drive speed

Tool stroke

Dimensions/mass

Bearing type

●Unique reaction-free structure used.●Dots can be fabricated with peripheral devices.　(Waveform signal generator, PLC, and oscilloscope separately required.)

Up to 190 mm

Up to 5 cycles/second

Up to 4.5 cycles/second

12μm

W382×D120×H142mm／6.7kg


Input power supply

Power source

Floor vibration amplitude

Ambient temperature

Temperature change

Relative humidity

200 to 220 VAC±10%, three phase, 50/60 Hz ±1 Hz

3kVA (10A)

0.1 μm or less (Acceleration: 0.1 Gal or less)

23℃

±1℃ or less of the above ambient temperature (30 minutes or less of cycle of change)

50% or less

Compressed air conditions

Input air pressure

Air pressure change

Air flow level

0.7 MPa or more

0.01 MPa or less

1.0m3/min or more

Tool

Workpiece

Tool

Workpiece

Milling air turbine spindle

Diameter of shank

Maximum speed

Dimensions/mass

Bearing type

Run out

Speed display function provided

●The balance can be corrected by two sides.

φ6mm

50,000min‒1

φ74×84mm／1.5kg


0.05μm （NRRO）Workpiece

Milling tool

FANUC takes responsibility for maintaining our products as long as customers use the products. Our experienced professional staff directly explains basic operations and gives practical training using your machine after delivery.

1380

（650）740

（1500）

550

300

1170

1500

1240

（500）

Machine part Mass:approx. 1700 kg Operator panel Mass:45 kg CNC cabinet Mass:125 kg

3000

3600

Ceiling height 2 m or more

Main specifications

Work-table area

Run out

Mass of the machine

Stroke

Command resolution

Bearing type

Maximum feedrate

Straightness

Standard accessories

X axis (horizontal linear)

Z axis (horizontal linear)

Y axis (vertical linear)

B axis (horizontal rotation)

C axis (vertical rotation)

Hydrostatic air bearing (all axes)

X, Z, and Y axes

B and C axes

B and C axes

X and Z axes

Y axis

B axis

C axis

X axis

Z axis

Y axis

B and C axes

Approx. 1700 kg

Supplying cutting fluid unitTool holderCounter weightAngle platePrecision compressed air temperature control systemSpeed display

280mm

150mm

40mm

360°(continuous rotation)

1nm

0.000001°

Φ210mm

500mm/min

50mm/min

3600°/min

3600°/min

250min-1 (S axis mode)

0.2μm/280mm

0.2μm/150mm

0.2μm/40mm

0.05μm

X

Y

Z

C

B

280mm

150mm

40mm

• All specifications are subject to change without notice.• No part of this catalog maybe reproduced in any form.• The photo includes options.• The products in this catalog are controlled based on Japan's "Foreign Exchange and Foreign Trade Law". The export of ROBONANO α-0+B from Japan is subject to an export License by the government of Japan. Other models in this catalog may also be subject to export controls.Further, re-export to another country may be subject to the license of the government of the country from where the product is re-exported. Furthermore, the product may also be controlled by re-export regulations of the United States government.Should you wish to export or re-export these products, please contact FANUC for advice.

Headquarters　Oshino-mura,Yamanashi 401-0597, Japan　Phone:81-555-84-5555 Fax:81-555-84-5512　http://www.fanuc.co.jp

For particulars apply to the ROBONANO sales Dept. at Oshino-mura, Yamanashi 401-0597, Phone:81-555-84-5371 Fax:81-555-84-5545

© < CORPORATION, 2001

< CORPORATION

RNANO α-0+B(E)-10, 2014. 10, Printed in Japan

High-reliability and High-performanceUltra Precision nano machine

<ROBONANO @ +

FANUC ROBONANO α-0iB -English-€¦ · Main specifications Work-table area Run out Mass of the...

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