Inductively Coupled Plasma-Atomic Emission

Spectrometry

ICP-AES

1965-69: Greenfield , Fassel

1975:

: 6000 ICP-AES

48 LOD

1-100ppb

ICP-OES, ICP-AES, ICP

E -

,

6.000-10.000 o

ICP-AES:

,

ICP

N+ 1 (2 . me . k.T)3/2 Q+ e- IP

/kT

No ne . h 3/2 . Qo

+=

=

ne=

me= e

k, h=Boltzmann, Planck

P=

(T=7500 oC ne = 1X1015/cm3)

1. / ()

2. /

3. (/)

4. /

ICP-OES

/

3600 /mm

= 0.006nm

(simultaneous)

= 0.0286nm

Paschen-Runge

Rowland 48

=

48

ICP

X mm

n mm

pm

Rs

2400 1 110 0.9 260.000

3600 1 110 0.6 390.000

2400 2 110 0.45 520.000

echelle

Echelle ( )

ICP-OES

A (Axial) ICP

/

(CD detectors)

A/

ICP-ES

ICP

1.

2.

3.

4.

5.

(Simplex Optimization max S/N )

ICP

1. 175-800nm (10s)

2.

(background)

3.

H/Y

ICP

1. ICP

( r, , Simplex)

2. E .. max S/N (S=, =)

3.

4. ..

5.

6. ( , 242.3 nm)

1. : > 5%

2. (matrix) :

3. : ..

(

, 242.3 nm)

ICP-OES

ICP-OES

X :1-100 ppb

I : RSD: 1-2%

: , P, B,

W, Nb, Ta

A AAS: S, J

(multi-element analysis)

:

10 6

S

ICP-OES

:

CP-OES

1. A

( )

2.

3.

( Mo, Nb, Ta, W, B, Zr, P, S

AAS

4.

(.. )

5.

(.. )

6.

(.. P, Ca, Mg, K

)

ICP-OES

I : RSD: 1-2%

: , P, B, W, Nb, Ta

A AAS: S, J

(multi-element analysis)

: 10 6

S

X :1-100 ppb

70 LOD 0.01-10 ppm

Zr, Hf, Nb, Ta, Ti, U

, LODs,

(As, Hg, Sb, Sn, Te)

AS