Sealed TransmissiveMicrofocus X-Ray SourceG-511 Series

X-ray source for industrial non-destructive inspection capable of high speed imaging with high resolution

G-511VL-DL

G-511VL-D

Sealed Transmissive Microfocus X-Ray SourceG-511 Series High Resolution High Magnification Wide Beam angle

︓2μm (at 6W)︓FOD 0.29mm︓168° cone

■ SPECIFICATIONS

1. 110kV voltage ramp time within 1sec. ・Quick image acquisition2. Target maintenance free ・No need for target rotation ・Improving equipment operation ratio3. Warming-up within 3 min. ・Solution of the long waiting time at starting up X-ray equipment ・No need for tube aging after long term storage4. Self diagnosis of X-ray tube life time ・Scheduled maintenance of X-ray equipment5. CE and RoHS compliant6. Hardware pulse option available, Please contact us for details

■ FEATURES

0 – 5010 – 45

40

24　(+1.2,　-1.2)RS-232C

2

24

40 – 11010 – 100

10

℃℃W

V－

μm－/mm

－deg.

kg

－

kVμA

W

－%

G-511VL-DL

Minimum Resolution (JIMA RT RC-02B)

X-ray Window Material/Thickness

Target Material

X-ray Beam Angle

Weight

Operation

Tube Voltage Operational RangeTube Current Operational Range(Target Current)

Maximum Output

Storage TemperatureOperational Ambient Temperature

Maximum Power Consumption

External Control

High Voltage Power SupplyOperational and Storage Humidity

Input Voltage (DC)

Built-in

≦85(No Condensation)

C(Diamond)/0.29

W(Tungsten)168(Max.), 80(80％, Equidistance)

Continuous, Pulse(Software≧1sec)

Parameter Unit G-511VL-D

21

● MICRO CHART IMAGE (JIMA RT RC-02B)

● X-RAY DOSE UNIFORMITY● TUBE CURRENT OPERATIONAL RANGE

● FOCUS CHARACTERISTICS

■ IMAGE EXAMPLES

(260x)

Bonding wire Bonding wire Multi Layer CeramicCapacitor

Void

※ The figures showed in each graph are typical values.

30μm

30μm

28μm 30μm

0

0.2

0.4

0.6

0.8

1

1.2

0 10 20 30 40 50 60 70 80 90

0

20

40

60

80

100

120

40 50 60 70 80 90 100 110

0

1

2

3

4

5

40 50 60 70 80 90 100 110

0

1

2

3

4

5

0 20 40 60 80 100

Tube voltage > 80kV

HALF OF X-RAY BEAM ANGLE (deg.)TUBE VOLTAGE (kV)

TUBE VOLTAGE (kV)

TARG

ET C

URRE

NT (μ

A)RE

SOLU

TIO

N (μ

m)

TUBE CURRENT (μA)

RESO

LUTI

ON

(μm

)DO

SE (a

rb. U

nit)

■ DIMENSIONAL OUTLINE (Unit:mm)

! CAUTION The X-ray sources introduced in this material generate X-rays. To be used by qualified personnel only. Safe use is the responsibility of the operator.

The X-ray sources introduced in this material were developed specifically for industrial use and can not be used for food and drinks or medical applications.Since the X-ray sources introduced in this material are subject to local laws and regulations, what you are required to use may vary from region to region. Please consult with our sales representative.

NOTICE

Installation side :Top(exposure port side) and Bottom

157.

8 (G

-511

VL-D

L)

247

47.8

(G

-511

VL-D

)

310

322.3

φ110

DC24V

X-RAY BEAM ANGLE168°

150

27017

022

94×M5. Depth10

8×M5. Depth5

X-RAY FOCAL SPOT

RS-232C

GND

COOLING FAN

INTERLOCK1

INTERLOCK2

381 - 03E. 2004-00102EK

Canon ANELVA Corporation is constantly improving its products, hence specifications are subject to change without notice.

https://www.canon-anelva.co.jp/english

Copyright© 2018 CANON ANELVA CORPORATION. All rights reserved.

Component Sales Dept. of Head Office 5-1 Kurigi 2-chome, Asao-ku, Kawasaki-shi, Kanagawa 215-8550, Japan

TEL︓+81-44-980-3503

TEL︓+1-408-468-2000

TEL︓+31-20-545-8545

Canon U.S.A., Inc 3300 North First Street San Jose, CA 95134, U.S.A.Canon Europa N.V. Bovenkerkerweg 59, 1185 XB Amstelveen, The NetherlandsCanon Semiconductor Engineering Korea, Inc. Canon BS Tower 11F, 607, Teheran-ro, Gangnam-gu, Seoul, 06173, KoreaCanon Semiconductor Equipment Taiwan, Inc. 9F, No.25, Pu-Ding Road, Hsinchu, 300, TaiwanCanon Singapore Pte. Ltd. 1 Fusionopolis Place #15-10, Galaxis Singapore 138522Canon Electron Devices & Materials (Shanghai) Co., Ltd. Rm1606, SH-Plaza 336, No.336, Xizang Road (Middle), Shanghai, 200001, China

TEL︓+82-2-6445-0013

TEL︓+886-3-668-6600

TEL︓+65-6799-8888

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April 2020