[IEEE 2010 International Conference on Digital Manufacturing and Automation (ICDMA) - Changcha, TBD,...

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Transcript of [IEEE 2010 International Conference on Digital Manufacturing and Automation (ICDMA) - Changcha, TBD,...

Page 1: [IEEE 2010 International Conference on Digital Manufacturing and Automation (ICDMA) - Changcha, TBD, China (2010.12.18-2010.12.20)] 2010 International Conference on Digital Manufacturing

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β

ββ +π β

2010 International Conference on Digital Manufacturing & Automation

978-0-7695-4286-7/10 $26.00 © 2010 IEEE

DOI 10.1109/ICDMA.2010.246

841

2010 International Conference on Digital Manufacturing & Automation

978-0-7695-4286-7/10 $26.00 © 2010 IEEE

DOI 10.1109/ICDMA.2010.246

840

Page 2: [IEEE 2010 International Conference on Digital Manufacturing and Automation (ICDMA) - Changcha, TBD, China (2010.12.18-2010.12.20)] 2010 International Conference on Digital Manufacturing

[ ]

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⎟⎟⎟⎟⎟⎟⎟⎟

⎠

⎞

⎜⎜⎜⎜⎜⎜⎜⎜

⎝

⎛

Δ+++−Δ++

Δ+−+−Δ+−

Δ+−+−

=

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ϕβϕ

βϕϕϕ

βΔ−+−

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=ϕϕ

=Δ

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Page 3: [IEEE 2010 International Conference on Digital Manufacturing and Automation (ICDMA) - Changcha, TBD, China (2010.12.18-2010.12.20)] 2010 International Conference on Digital Manufacturing

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Micro and nano manufacturing

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