Report - ZFC-A cat encontent2.smcetech.com/pdf/ZFC-A_EU.pdf · 2013. 9. 9. · ZFC 5 4 B Model ZFC5 ZFC7 Air, Nitrogen −100 kPa to 1.0 MPa 1.5 0 to 60 5 (Filtration efficiency 95%) 0.1 (Vacuum

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