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Page 1: Lab On a Chip Devices for Water Analysismitra/lab-on-a-chip-15.pdfLab On a Chip Devices for Water Analysis 1. “Microfluidic supported liquid membrane extraction”. X. Wang and S.

Lab On a Chip Devices for Water Analysis

1. “Microfluidic supported liquid membrane extraction”. X. Wang and S. Mitra. Anal. Chim. Acta. 2005, 543, 92-98.

2. “A sol-gel approach for fabrication of μ-SPE on PDMS micro channels”. M. Karwa, S. Mitra and D. Hahn. Anal. Chim. Acta. 2005, 546, 22-29.

3. “A microfluidic hollow fiber membrane extractor for arsenic (V) detection.” K. Hylton and Somenath Mitra, Anal. Chim. Acta., 2008, 607, 45-49.

Page 2: Lab On a Chip Devices for Water Analysismitra/lab-on-a-chip-15.pdfLab On a Chip Devices for Water Analysis 1. “Microfluidic supported liquid membrane extraction”. X. Wang and S.

Lab-on-a-chip, Total Analytical System

Sample

Extraction

Sample

Concentration

Separation/

Processing

Detection

Page 3: Lab On a Chip Devices for Water Analysismitra/lab-on-a-chip-15.pdfLab On a Chip Devices for Water Analysis 1. “Microfluidic supported liquid membrane extraction”. X. Wang and S.

On-Chip SLMME

1. “Microfluidic supported liquid membrane extraction”. X. Wang and S. Mitra. Anal. Chim. Acta. 2005, 543, 92-98.

1. “A microfluidic hollow fiber membrane extractor for arsenic (V) detection.” K. Hylton and Somenath Mitra, Anal. Chim. Acta., 2008, 607, 45-49.

Page 4: Lab On a Chip Devices for Water Analysismitra/lab-on-a-chip-15.pdfLab On a Chip Devices for Water Analysis 1. “Microfluidic supported liquid membrane extraction”. X. Wang and S.

Silicon Micro Fabricated Micro-concentrator

for Gas Sensing

1. “Design and fabrication of microheaters for microfluidic channels”. M. Kim, S. Mitra, S. Kishore, and D. Misra, Sensors and Materials 2006, 18, 35-48.

2. “A microfabricated microconcentrator for sensors and gas chromatography”. M. Kim and S. Mitra, J. Chromatogr. A. 2003, 996 (1-2), 1-11.

Page 5: Lab On a Chip Devices for Water Analysismitra/lab-on-a-chip-15.pdfLab On a Chip Devices for Water Analysis 1. “Microfluidic supported liquid membrane extraction”. X. Wang and S.

Top View

456m

31,580m

Contact pad

Contact pad

A conventional Sorbent Trap

A Micro fabricated Microconcentrator

Page 6: Lab On a Chip Devices for Water Analysismitra/lab-on-a-chip-15.pdfLab On a Chip Devices for Water Analysis 1. “Microfluidic supported liquid membrane extraction”. X. Wang and S.

456m

31,580m

54º angle side wall

Crossection View

“Design and fabrication of microheaters for microfluidic channels”. M. Kim, S. Mitra, S. Kishore, and D. Misra, Sensors and Materials 2006, 18, 35-48. “A microfabricated microconcentrator for sensors and gas chromatography”. M. Kim and S. Mitra, J. Chromatogr. A. 2003, 996 (1-2), 1-11.

Page 7: Lab On a Chip Devices for Water Analysismitra/lab-on-a-chip-15.pdfLab On a Chip Devices for Water Analysis 1. “Microfluidic supported liquid membrane extraction”. X. Wang and S.

Sample In

Sample Out to Detector

Pulse Heating

M. Kim and S. Mitra, J. Chromatogr. A. 2003, 996 (1-2), 1-11.

Page 8: Lab On a Chip Devices for Water Analysismitra/lab-on-a-chip-15.pdfLab On a Chip Devices for Water Analysis 1. “Microfluidic supported liquid membrane extraction”. X. Wang and S.

Testing of the Microconcentrator Using Organic Vapors

Computer Flame Ionization Detector

Pulse Heating

Microconcentrator

Sample In

Page 9: Lab On a Chip Devices for Water Analysismitra/lab-on-a-chip-15.pdfLab On a Chip Devices for Water Analysis 1. “Microfluidic supported liquid membrane extraction”. X. Wang and S.

Thermal Stability Test: Pulsed for 3 seconds at Every 5 minutes Interval for 5 hours

0

0.2

0.4

0.6

0.8

1

1.2

1.4

1.6

1.8

0 100 200 300 400 500 600 700 800 900 1000

Time [sec]

Cu

rren

t [A

]

20700 20800 20900 30000

Page 10: Lab On a Chip Devices for Water Analysismitra/lab-on-a-chip-15.pdfLab On a Chip Devices for Water Analysis 1. “Microfluidic supported liquid membrane extraction”. X. Wang and S.

Microheater Fabrication Steps

• P-type, <100> oriented silicon wafer deposited with 2000 Å oxide

• 1500 Å Silicon Nitride deposited

• Patterning of Silicon nitride and oxide

• Reactive Ion Etching of Silicon nitride and oxide, PR strip

Page 11: Lab On a Chip Devices for Water Analysismitra/lab-on-a-chip-15.pdfLab On a Chip Devices for Water Analysis 1. “Microfluidic supported liquid membrane extraction”. X. Wang and S.

Patterning for Ion Implantation

Deposition of Aluminum alloys

Boron Implantation of Silicon Patterning of aluminum layer

Strip PR Strip PR

KOH Etching

Page 12: Lab On a Chip Devices for Water Analysismitra/lab-on-a-chip-15.pdfLab On a Chip Devices for Water Analysis 1. “Microfluidic supported liquid membrane extraction”. X. Wang and S.

6. Spin-on-glass was coated

7. Polymer was coated

8. Bonding with quartz wafer using

WaferGrip

Page 13: Lab On a Chip Devices for Water Analysismitra/lab-on-a-chip-15.pdfLab On a Chip Devices for Water Analysis 1. “Microfluidic supported liquid membrane extraction”. X. Wang and S.

SEM Image and Cross Section of the Anisotropically Etched Channel of the Microconcentrator

Quartz

Si Silicon Oxide

Heating Layer

Spin-On-Glass (SOG)

Polymer

Silicon Nitride

54º angle side wall

Page 14: Lab On a Chip Devices for Water Analysismitra/lab-on-a-chip-15.pdfLab On a Chip Devices for Water Analysis 1. “Microfluidic supported liquid membrane extraction”. X. Wang and S.

Temperature Characteristic of Heaters with Aluminum Film

v.s. Boron Doped when 36V were applied

0

50

100

150

200

250

300

350

400

450

0 10 20 30 40 50 60 70

Time [sec]

Tem

p [o

C]

Heater with 1 micron thick film

Heater with 3 micron thick film

Heater with boron doped

Page 15: Lab On a Chip Devices for Water Analysismitra/lab-on-a-chip-15.pdfLab On a Chip Devices for Water Analysis 1. “Microfluidic supported liquid membrane extraction”. X. Wang and S.

Temperature Profile of Heater With Al film with Various Voltages Applied

0

50

100

150

200

250

300

350

400

450

0 10 20 30 40 50 60 70 80

Time [sec]

Tem

per

atu

re [

oC

]

36V

30V

15V

cooling profile