National Chiao Tung University, National Chiao Tung University, DepartmentDepartment of Electrical & Control Engineeringof Electrical & Control EngineeringμμSystem & Control LaboratorySystem & Control Laboratory
L-Edit Tutorial
cwchangAdvisor: professor J.C. Chiou
μSystem & Control Lab., Dept. of Electrical & Control Eng.,National Chiao Tung University
2009/10/29
Drawing
Standard
Locator
Editing
Layers palette
Mouse buttons
Status Bar
Layout area
L-Edit Operation Screen
Generate Cross-Section Dialog
gd: grow deposition, e : etching
Process Definition File for Mumps
Clear Dark
Finished Product
layout
Mask define
Mask Definition
1.2 button mouse and 3 button mouse.(Ctrl)2.keyboard
1. Original point transfer (Q)2. zoom window(z)3. zoom in (+)4. zoom out (-)5. move view (←↑→↓)6. exchange view (x)
3.Copy cell in different file (the same setup)4.Copy cell in different file (different setup)5.Array & rotation
Operation
Example: MUMPS
• Multi-User MEMS Process=MUMPS• 3-layer PolySilicon surface micromachining process
Source: MUMPS Design Handbook
Example: MUMPS
Source: MUMPS Design Handbook
Anchor 1
Poly 1, Poly 2 via
Anchor 2
Example: CMOS-MEMS
• TSMC .35um CMOS process
http://www.memscap.com/en_mumps.html
Example: CMOS-MEMS
• Post-micromachining process
Source: tsmc CMOS-MEMS process Source: C.Wang, JMEMS(2007)
Source: CIC
Case Study (I)-Slider
A
A’
BB’
A-A’
B-B’
Movable part = poly1Anchor = poly2
Case Study (II)-Hinge (on the substrate)
Case Study (III)-Hinge (on the poly1)
A A’
B B’
A-A’
B-B’
C
C’
C-C’
Case Study (IV)-Micro Motor
Dimple
Reference
• L-Edit student version & L-Edit manual: http://www.tanner.com.tw/EDA/products/ledit/default.htm
• Poly-Mumps:http://www.memscap.com/en_mumps.html
• Mumps handbook:http://www2.ece.jhu.edu/faculty/andreou/487/Resources/Foundry/PolyMUMPS/PolyMUMPs_DR_v10.pdf
• CIC 國家晶片系統設計中心 CMOS-MEMS platform• www.google.com
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