TORR SERIES PRESSURE REGULATOR FOR HIGH … · torr series pressure regulator for high purity gas...
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T T O O R R R R S S E E R R I I E E S S PRESSURE REGULATOR FOR H SINGLESTAGE SERIES LINEUSE ・ ・ Features ・The regulators are 100% assembled in the clean r μm class 1000. ・Helium leakage testin g is carried out on 100% of regulators ・For standard flow rate. ・Nominal flow: 300L/min(nor) at P1=1.5MPa and P2= ・ ・ Specifications ・ Operating Parameters Maximum Inlet Pressure 5.0MPa Maximum Outlet Pressure 0.99MPa Flow Coefficient Cv=0.24 Te mperature -5～40 ℃ ・ Other Parameters Threaded 3ports Type : TORR -30 -3S -A010 -4SH4SH ・ Materials Welded 2ports Type : TORR -30 -2W -A015 -4VF4VF Inlet & Outlet Body Port Threaded Type : Female NPT1/4 Type Welded Type : Face seal connector Threaded Type : Swagelok Inlet & Outlet Connector Size 1/4 ” or 3/8 ” Surface Finished BA : Ra ≦ 0.8 μm EP : Ra ≦ 0.25 μm Leak rate Threaded Type : less than 1.3 ×10 -9 Pa.m 3 /sec Welded Type : less than1.3 ×10 -10 Pa.m 3 /sec Weight Welded Type : 3port/1.3 kg,2port/1.1kg Body SUS316L Other Wetted Parts SUS316, SUS316L, PTFE, PCTFE Bonnet C3604 Adjusting handle ABS resin, C3604
Transcript of TORR SERIES PRESSURE REGULATOR FOR HIGH … · torr series pressure regulator for high purity gas...
TTOORRRR SSEERRIIEESS PRESSURE REGULATOR FOR HIGH PURITY GAS
SSIINNGGLLEE SSTTAAGGEE
SSEERRIIEESS LLIINNEE UUSSEE
・・・ Features ・The regulators are 100% assembled in the clean rooms of 0.3μm class 1000. ・Helium leakage testing is carried out on 100% of regulators. ・For standard flow rate. ・Nominal flow: 300L/min(nor) at P1=1.5MPa and P2=0.6MPa.
・・・ Specifications
・・ Operating Parameters
Maximum Inlet Pressure 5.0MPa
Maximum Outlet Pressure 0.99MPa
Flow Coefficient Cv=0.24
Temperature -5～40℃
・・ Other Parameters
Threaded 3ports Type : TORR-30-3S-A010-4SH4SH
・・ Materials
Welded 2ports Type : TORR-30-2W-A015-4VF4VF
Inlet & Outlet Body Port Threaded Type : Female NPT1/4
Type Welded Type : Face seal connector Threaded Type : Swagelok
Inlet & Outlet
Connector Size 1/4” or 3/8”
Surface Finished BA : Ra ≦ 0.8 μm EP : Ra ≦ 0.25μm
Leak rate
Threaded Type : less than 1.3×10-9Pa.m3/sec
Welded Type : less than1.3×10-10Pa.m3/sec
Weight Welded Type : 3port/1.3 kg,2port/1.1kg
Body SUS316L
Other Wetted Parts SUS316, SUS316L, PTFE, PCTFE
Bonnet C3604
Adjusting handle ABS resin, C3604
SD0127rev3 2004.1
・・・ Products
・・・ Flow rate
・ Refer to flow characteristic curve. → ・ We recommend to use left area of standard- flow line.
・・・ Dimensions
For welded 1/4”
face seal type mm For threaded 1/4”Swagelock type (112) mm For other type, please refer to us.
CAUTION : Before using, please read instruction manual.
http://www.tanaka.sanso.co.jp/
Headquarters : 11,TIKUMAZAWA, MIYOSIMACHI, IRUMAGUN, SAITAMA
Industrial Equipment division : Office, Nagano factory ;
NO 823, SHINDEN, CHIKUMA, NAGANO TEL:+81-26-272-2700 FAX:+81-26-272-6822
Pressure Gauge Type
Surface Finish
Product Name Inlet Outlet
Max. outlet pressure
Inlet & Outlet Connection
TORR-30-3S-A010-4SH4SH No Gauge 1MPaC 0.7MPa 1/4” Swagelok Threaded Type
BA TORR-30-2S-A015-4SH4SH No Gauge No Gauge 0.99MPa 1/4” Swagelok
TORR-30-3W-A010-4VF4VF No Gauge 1MPaC 0.7MPa 1/4” Female VCR
TORR-30-3W-A010-4UF4UF No Gauge 1MPaC 0.7MPa 1/4” Female UJR BA
TORR-30-2W-A015-4VF4VF No Gauge No Gauge 0.99MPa 1/4” Female VCR
TORR-30-3W-A010-4VF4VF-EP No Gauge 1MPaC 0.7MPa 1/4” Female VCR
Welded Type
EP TORR-30-3W-A010-4UF4UF-EP No Gauge 1MPaC 0.7MPa 1/4” Female UJR
