Products Profile Fine Ceramics & Machinable Ceramics · According to JIS B 0405 medium grade...

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  • Headquarter Sales Division5th Floor, Nihonbashi Plaza Building 2-3-4, Nihonbashi, Chuo-ku, Tokyo 103-0027, JapanTEL.81-3-3516-0800FAX.81-3-3516-0801

    Kansai Plant1, Higashimukojima, Nishino-cho, Amagasaki-City, Hyogo660-0856, JapanTEL.81-6-6411-7643FAX.81-6-6411-7778

    Ishikawa Plant1142, Urushijima-machi, Hakusan-City, Ishikawa924-0835, JapanTEL.81-76-274-9800FAX.81-76-274-7790

    Osaka Sales Office1, Higashimukojima, Nishino-cho, Amagasaki-City, Hyogo660-0856, JapanTEL.81-6-6411-1281FAX.81-6-6411-7778

    Ferrotec Ceramics Corporation

    Numerical values given in this catalog are for reference only and are not guaranteed as absolute.Ferrotec Ceramics Corporation assumes no responsibility, directly or indirectly, for any damages and/or injuries caused by incorrect or improper use of the information contained in this catalog.As a result of continuing improvements, products and/or specifications contained in this catalog may be changed or their manufacture discon-tinued without notice.

    Important Information

    URL http://www.ft-ceramics.co.jp

    Fine Ceramics & Machinable CeramicsProducts Profile

    Ferrotec Ceramics Corporation

  • 1 2

    No matter what the product is, quality is fundamentally based on the materials. Now, technological innovations and advancements take place in every field, The demand for higher-performance, easier-to-use, and cheaper products is increasing. Consequently, there are high expectations for wider applications of new ceramics material, as well as a devel-opment of products with a special and advanced properties of ceramics. Ferro-tec Ceramics is moving steadily forward to meet the continuously advancing needs of society. Customer satisfaction is our highest objective, operating under the motto Manufacturing good products quickly and economically. In the future, we will continuously improve our inde-pendent applied technologies and ultra-precision machining technologies, fully demonstrate the capabilities we possess, and further intensify our R&D to respond quickly to the wide-ranging needs of our customers.In the 21st century, the use of new ceramic materials with their superior characteristics, and in particular the use of the two key materials from our com-pany fine ceramics with a diverse range of advanced functions, and machinable ceramics that can be easily machined to precise and fine specifications will expand into all parts of our society and daily lives, including the rapidly advancing IT, electronics, medical devices, and auto-motive products. Working actively with these two ceramic material, Ferrotec Ce-ramics will utilize our original fine tech-nologies that combine advanced materi-als and production techniques with a state-of-the-art quality control in order to support the creation of a prosperous future society and the realization of dreams.

    The creative power of ceramics : the future of precision products.

    Headquarter

    Ferrotec Ceramics Corporation

    JQA-QM7716No.E028-ISO14001

    QUALITY SYSTEM

    ISO 9001 0000106Kansai Plant Ishikawa Plant

    Fine technologies lead the way into the future.Ceramics perform a key material as ultra-pure, super wear-resistant, high-machinability, ultra-precise, and superior-characteristics to manufacture the most-advanced products.

    Materials that bring us tomorrows products, today

    Photoveel

    Photoveel L

    Photoveel

    Photoveel -S

    Photoveel -S Black

    Photoveel -k70

    Photoveel 3.4

    Others

    Machinable ceramicsFine ceramics

    Corporate Profile

    December 1, 1989

    485.5 million yen

    Shiro Tsuda, President andRepresentative Director

    Ferrotec Corporation

    Sumitomo Mitsui Banking CorporationThe Hokkoku Bank, Ltd.Mizuho Bank, Ltd.The Bank of Tokyo-Mitsubishi UFJ, Ltd.

    Headquarter Sales Division5th Floor, Nihonbashi Plaza Building 2-3-4, Nihonbashi, Chuo-ku, Tokyo 103-0027, Japan

    Kansai Plant1, Higashimukojima, Nishino-cho, Amagasaki-City, Hyogo 660-0856, Japan

    Ishikawa Plant1142, Urushijima-machi, Hakusan-City, Ishikawa 924-0835, Japan

    Osaka Sales Office1, Higashimukojima, Nishino-cho, Amagasaki-City, Hyogo 660-0856, Japan

    Locations

    Trade name

    Date founded

    Capital

    Company representative

    Shareholder

    Main banks

    Alumina Al2O3

    Silicon nitride Si3N4

    Aluminum nitride AlN

    Silicon carbide SiC

    Low thermal-expansion ceramics

    Zirconia ZrO2

    Others

    Semiconductors /liquid crystaldisplays

    Automotiveproducts

    Energy Precisioninstruments

    General industrialmachines

    Advancedmedical devices

  • 3 4

    Utilizing advanced materials and production techniques, our fine ceramics materials are manufactured through integrated production based on quality control that achieves the highest industry standards. These materials offer advanced functions and superior char-acteristics that meet the absolute-highest customer requirements for product develop-ment and production across a variety of fields and applications. They are especially optimal for parts and components used in the manufacture of liquid crystals displays semiconductor manufacturing (wafer fabri-cation, processing, assembly, and inspec-tion), where high purity, high rigidity, and high precision are mandatory. In general industrial machineries, our materials provide superior resistance to wear, heat , and chemicals.

    Fine Ceramics

    Ferrotec Ceramics offers a wide range of materials for high strength, high purity, and other superior qualities to create commercially successful products in industries, from basic goods to advanced technology.

    For Manufacturing Semiconductor & Liquid Crystal Displays

    For General Industrial Machines

    MATERIAL

    1

    Alumina, mainly comprised of aluminum oxide, has excellent insulation performance and wear-resistance, with competitive cost. Alumina is utilized for a range of purposes. Also, ultra-pure alumina, reaching a purity level of at least 99%, is particularly suited for use in plasma-resistant parts in semi-conductor manufacturing equipment.

    Alumina ceramics, Al2O3

    Chamber Parts

    Vacuum Chucks

    Low Dielectric Loss Alumina Chamber Parts

    High-temperature Chamber Trays

    Low Thermal Expansion Ceramics Parts

    Transfer Parts

    Plasmaresistance

    Heatresistance

    Wearresistance

    Insulation

    Highpurity

    Highrigidity

    Highprecision

    Features

    Main applications

    Often used as a substitute material for alumina, silicon nitride has superior high-temperature strength and thermal shock resistance. It is widely used as a structural material that can withstand thermal loads.

    Silicon nitride ceramics, Si3N4

    Main applications

    With regard to heat resistance, wear resistance, and corro-sion resistance, silicon carbide exhibits characteristics not found in other materials. Since it maintains strength even at high temperatures, it has particularly attracted attention as a high-temperature structural material.

    Silicon carbide ceramics, SiC

    Main applications

    Zirconia ceramics, the main component is partially stabilized zirconium dioxide, is especially valued for outstanding mechanical strength and fracture toughness.

    Zirconia ceramics, ZrO2

    Main applications

    Low thermal-expansion ceramics are materials that perform zero expansion at room temperature. They also have high strength and a high Youngs modulus.

    Low thermal-expansion ceramics

    Main applications

    Parts for wafer transfer systems and chambers in semiconduc-tor manufacturing equipment, parts for liquid crystal display manufacturing equipment, vacuum equipment, and general industrial machinery

    Semiconductor manufacturing equipment parts, burner nozzles, and welding jigs

    Semiconductor manufacturing equipment parts and burner nozzles, Susceptor

    Semiconductor transfer guides rails, bearing parts, and indus-trial cutters

    Semiconductor manufacturing equipment parts and precision machine parts

  • 5 6

    Machinable ceramics provide easy machinability by conven-tional machining machine. Various precision machining are possible with synthetic diamond-based cutting tools and also with general carbide tools. Inspection jigs and parts for the manufacture of liquid crystals display and semiconductors required in a large-variety, and a small-quantity production. In the face of growing expectations for shorter lead time in all production processes, from design to trial production, the ma-chinable ceramics are widely used from their precision-machining and quick-delivery.

    Superior machinability, quick delivery of high-precision, and high-quality products, provides customersan efficient production.

    Worlds strongest ceramic with variable thermal conductivityThis is a dense, high-grade compound mica-ceramic created through a fusion process that uses glass as a matrix and uniformly separates out mineralized fluorian phlogopite and zirconia microcrystals.

    Photoveel

    Photoveel , -S, -k70

    Main applications

    This mica-ceramic has fine-machining characteristic of Photo-veel, and adds low thermal expansion and high reflectivity.

    Photoveel L

    Main applications

    The special characters of this ceramic material are its low thermal expansion and excellent mechanical strength. It is particularly suitable for small parts that require ultra-precision machining.

    Photoveel

    Main applications

    The strongest point of this ceramic material is the thermal expansion similar to silicon. It is also suitable for parts that require ultra-precision machining like Photoveel .

    Photoveel -S

    Main applications

    This material has all the characteristics of Photoveel II-S, in black color for use in optical components.

    Photoveel -S Black

    Main applicationsOptical components, medical camera components

    This ceramic combines high thermal conductivity, high strength, and low thermal expansion. It is suitable for heat radiating parts and circuit boards. Photoveel -k70 also has the highest bending strength in our machinable ceramic. It is widely used in structural parts that require high strength.

    Photoveel -k70

    Main applications

    This ceramic is characterized by its thermal expansion coeffi-cient of 3.4. In the same way as Photoveel II and II-S, it is suit-able for parts that require ultra-precision machining.

    Photoveel 3.4

    Main applicationsJigs for package board inspection

    Hole Diameter 0.035mm

    Photoveel

    35m

    Optical and medical Parts Photoveel -S Black

    Semiconductor Inspection for Parts Photoveel , -S

    Photoveel microstructure

    5m

    Precisionmachinability

    Electricalinsulation

    Heatinsulation

    Heatresistance

    Shortlead time

    MATERIAL

    2

    Features

    Inspection equipment parts and micromachine insulating parts

    Inspection equipment parts and micromachine insulating parts

    Heat sinks, insulating parts around heaters, welding nozzles, etc.

    Parts for semiconductor manufacturing equipment, liquid crys-tal displays manufacturing equipment, heat-resistant and heat-insulating elements, vacuum equipment, electrical insula-tion, sensors, and medical devices

    Analyzer insulating parts, circuit boards, positioning jigs, soldering jigs, and light-condensing parts

    Machinable CeramicsPhotoveel

  • Raw Material SinteringPressing Machining ofGreenbody

    MachiningGrindingLapping

    Ferrotec Ceramics implements vertically integrated production process, with a strict quality control, supported by advanced production techniques and the latest equipment.

    7 8

    Fine CeramicsManufacturing Process

    CleaningShipping InspectionAnalysis

    Spray Dryer 400t Press Air Furnace Atmosphere Furnace Atmosphere Furnace

    Gate Type Surface Grinding Machine

    Cleaning RoomCleaning in Clean Room Scanning Electron Microscope (SEM)

    Ultrasonic Flaw Detector Coordinate Measuring Machine

    Large Lapping Machine

  • 9

    Technical guideA range of options are available to match the purpose of use. Contact us about complex shapes, high-precision machining, or any other special requirements you may have.

    PhotoveelManufacturing Process

    BlocksFusing Method

    Machining InspectionShipping

    Contact us about special cleaning and packing, or any other special requirements.

    Use Ra (average roughness at centerline) when designing ceramics.

    Resin adhesion, glass adhesion

    Metalization adhesion

    Ceramics

    Metal

    JIS B 0405 (extracted)Reference

    JIS B 0601 (extracted)

    Minimum 35 m (thickness 0.3mm), diameter and pitch tolerance 5m

    Minimum M2, HELISERT minimum M2.5

    0.8s

    6.3s

    25s

    100s

    0.2a

    1.6a

    6.3a

    25a

    Finish SymbolSurface Roughness Classification Value

    Ra Rmax0.2

    1.6

    6.3

    25

    0.5 to 3

    Over 3 and up to 6

    Over 6 and up to 30

    Over 30 and up to 120

    Over 120 and up to 400

    Over 400 and up to 1000

    m

    0.1

    0.1

    0.2

    0.3

    0.5

    0.8

    0.2

    0.3

    0.5

    0.8

    1.2

    2

    Dimensional ClassificationTolerancemm

    Medium Grade Coarse Grade

    Fine ceramics1% (minimum: 0.3 mm)

    According to JIS B 0405 medium grade

    Flatness 1-3 m concave/convex specification

    JIS B 0601 6.3a or equivalent

    0.01a-0.2a or equivalent

    As sintered

    Grinding

    Precision machining

    General machining

    Precision machining

    Marking (characters, numbers, barcodes, etc.)

    TiN, TiC, DLC, SiC, Al2O3, etc.

    Photoveel

    Microscopichole drilling

    Thread cutting

    According to JIS B 0405 medium grade

    5 m or less (flatness, parallelism, etc.)

    Generalmachining

    Precisionmachining

    Dimensionaltolerance

    Dimensionaltolerance

    Surfaceroughness

    Laser machining

    Adhesion

    Surface coating

    Hangzhou Dahe Thermo-Magnetics Co.,Ltd.ChinaHangzhou

    Ferrotec Taiwan Co.,Ltd.TaiwanHsinchu

    Ferrotec Corporation Singapore Pte, Ltd.Singapore

    Ferrotec Korea CorporationKoreaSeoul

    Ferrotec Europe GmbHGermanyFrankfurt

    Ferrotec USA CorporationUSASanta Clara, Bedford

    Global Network

    Domestic Locations

    Kansai PlantOsaka Sales Division

    Ishikawa PlantTokyoHeadquarterSales Division

  • Headquarter (Sales Division)5th Floor,Nihonbashi,Plaza Building 2-3-4,Nihonbashi,Chuo-ku,Tokyo 103-0027,JapanTEL 81-3-3516-0800FAX 81-3-3516-0801

    Osaka Sales Office1,Higashimukojima,Nishino-cho,Amagasaki-City,Hyogo 660-0856,JapanTEL 81-6-6411-1281FAX 81-6-6411-7778

    Ishikawa Plant1142,Urushijima-machi,Hakusan-City,Ishikawa924-0835,JapanTEL 81-76-274-9800FAX 81-76-274-7790

    Numerical values for properties presented in this table are for reference only.

    Material

    Main Characteristics

    Application

    Material code

    AluminaAl2O3

    AS999

    wt%

    g/

    MPa

    GPa

    GPa

    1/(10-6)

    W/mK

    T()

    cm

    10-4

    104

    kV/mm

    Main component purity

    Color

    Density

    Water Absorption

    Bending Strength

    Young's Modulus

    Vickers Hardness

    Max.Operating Temperature

    Coefficient of Thermal Conductivity

    Thermal Shock Resistance

    Dielectric Breakdown Voltage

    General

    Properties

    Mechanical

    Properties

    Thermal

    Properties

    Electrical

    Properties

    AT999 AM997 AM997QII ACM995 ACM96 SN606 SC902E ALN99 ALN94 Z403 LE101

    99.99

    White

    3.95

    0

    390

    380

    18

    1600

    7.0

    7.7

    33

    200

    1015

    1012

    109

    107

    9.9

    0.5

    2

    18

    99.9

    Whitish yellow

    3.92

    0

    400

    385

    16

    1600

    7.9

    -

    34

    200

    1015

    1014

    1011

    106

    9.8

    4

    0.25

    17

    99.7

    Whitish yellow

    3.93

    0

    390

    375

    18

    1600

    7.0

    7.6

    33

    200

    1016

    1013

    1010

    109

    9.7

    1

    1

    18

    99.7

    Whitish yellow

    3.93

    0

    390

    385

    17

    1600

    7.0

    -

    33

    200

    1015

    1014

    1012

    105

    9.7

    0.15

    6.7

    18

    99.5

    Whitish yellow

    3.93

    0

    370

    370

    16

    1600

    7.2

    -

    32

    250

    1014

    1014

    1010

    106

    9.9

    10

    0.1

    15

    96

    White

    3.74

    0

    350

    320

    14

    -

    7.2

    -

    24

    200

    1015

    109

    107

    105

    9.4

    38

    0.03

    14

    90

    Gray

    3.16

    0

    750

    285

    16

    1200

    2.7

    4.2

    23

    700

    1016

    1013

    1011

    107

    8

    6.1

    0.16

    14

    97

    Black

    3.15

    0

    490

    400

    22

    1600

    3.8

    -

    170

    300

    104

    102

    10

    10

    -

    -

    -

    -

    99

    Light gray

    3.24

    0

    295

    320

    11

    1000

    4.4

    -

    80

    -

    1014

    108

    107

    105

    8.5

    30

    0.03

    -

    94

    Light gray

    3.31

    0

    345

    320

    11

    1000

    4.4

    -

    150

    400

    1014

    1010

    107

    105

    8.5

    30

    0.03

    15

    94

    Whitish yellow

    5.98

    0

    880

    245

    16

    -

    8.9

    10.4

    3

    280

    1012

    107

    104

    102

    33

    9

    0.1

    13

    -

    Gray

    2.55

    0

    200

    140

    -

    -

  • Machinable CeramicsMaterial

    wt%

    g/

    MPa

    GPa

    GPa

    1/(10-6)

    W/mK

    T()

    cm

    10-4

    104

    kV/mm

    Main component purity

    Color

    Density

    Water Absorption

    Bending Strength

    Young's Modulus

    Vickers Hardness

    Max.Operating Temperature

    Coefficient of Thermal Conductivity

    Thermal Shock Resistance

    Dielectric Constant

    Dielectric Loss(tan

    Q Factor (1/tan)

    Dielectric Breakdown Voltage

    -

    White

    2.59

    0

    150

    66

    2.2

    1000

    7.8

    1.5

    150

    1015

    1010

    107

    -

    20

    6.4

    60

    0.02

    Insulating parts

    Heat-insulatingparts

    Prototype/emergency parts

    Precisionmachinability

    Electricalinsulation

    Heat insulation

    Quick delivery

    Photoveel

    -

    White

    3.06

    0

    89

    -

    1.2

    600

    6.1

    1.8

    200

    1015

    1012

    107

    104

    18

    5.9

    78

    0.01

    Insulating parts

    Positioning jigs

    Light-condensingparts

    Low thermalexpansion

    High reflectance

    Photoveel L

    -

    Gray

    2.56

    0

    440

    157

    2.3

    1.4

    50

    600

    1015

    1014

    1011

    107

    35

    1000(In nonoxidizing atmosphere)

    5.5

    10

    0.10

    1000(In nonoxidizing atmosphere)

    4.7

    9.0

    25

    0.04

    1000(In nonoxidizing atmosphere)

    9.0

    25

    0.04

    1000(In nonoxidizing atmosphere)

    8.5

    20

    0.05

    1000(In nonoxidizing atmosphere)

    6.0

    10

    0.10

    1900(In nonoxidizing atmosphere)

    6.8

    97

    0.01

    4.8

    5.0

    2200(In nonoxidizing atmosphere)

    4.7

    3.4

    0.86

    3.5

    26

    0.04

    Inspection insulating parts

    Micromachineparts

    High strength

    Low thermalexpansion

    Precisionmachinability

    Photoveel

    -

    Gray

    3.50

    0

    320

    130

    2.3

    23

    400

    1015

    1011

    107

    104

    30

    Inspection insulating parts

    Micromachineparts

    High strength

    Thermal expansionsimilar to silicon

    Precisionmachinability

    Photoveel -S

    -

    Black

    3.50

    0

    320

    130

    2.3

    23

    400

    1014

    1011

    107

    104

    30

    Optical parts

    Medical cameraparts

    High strength

    Thermal expansionsimilar to silicon

    Precisionmachinability

    Photoveel -SBlack

    Gray

    3.35

    0

    340

    140

    2.3

    30

    400

    1015

    1011

    107

    104

    20

    Packagesubstrate

    inspection jigs

    High strength

    Thermal expansionsimilar to silicon

    Precisionmachinability

    Photoveel 3.4

    -

    Gray

    2.72

    0

    520

    200

    4

    1.8

    70

    600

    1015

    1013

    1012

    108

    20

    Heater peripheralinsulating parts

    Welding nozzleparts

    High strength

    Low thermalexpansion

    High thermalconductivity

    Photoveel -k70

    -

    Light gray

    2.90

    0

    300

    180

    3.8

    92

    400

    1015

    1010

    108

    105

    65

    Insulating parts

    Heat sink

    High strength

    High thermalconductivity

    Aluminum nitrideAlN-BN

    99.5

    White

    1.92

    -

    35

    39

    -

    75

    1500

    1014

    1013

    1012

    109

    40

    Molten metalcorrosion resistance

    material

    Insulating parts

    Precisionmachining jigs

    Thermal stability

    Corrosion resistance

    Electrical insulation

    Precisionmachinability

    Boron nitridehBN

    Coefficient ofThermal Expansion RT400

    25

    300

    500

    800

    Volume Resistivity

    Main Characteristics

    Application

    Headquarter (Sales Division)5th Floor,Nihonbashi,Plaza Building 2-3-4,Nihonbashi,Chuo-ku,Tokyo 103-0027,JapanTEL 81-3-3516-0800FAX 81-3-3516-0801

    Ishikawa Plant1142,Urushijima-machi,Hakusan-City,Ishikawa924-0835,JapanTEL 81-76-274-9800FAX 81-76-274-7790

    Numerical values for properties presented in this table are for reference only.

    Ferrotec Ceramics Corporation

    General

    Properties

    Mechanical

    Properties

    Thermal

    Properties

    Electrical

    Properties

    Osaka Sales Office1,Higashimukojima,Nishino-cho,Amagasaki-City,Hyogo 660-0856,JapanTEL 81-6-6411-1281FAX 81-6-6411-7778