PLASMA WAVES & DIFFUSION
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PLASMA WAVES & DIFFUSION. •. μ ,. • SUMMARY OF PLASMA WAVES. (1). B O = 0. uncoupled. c s. IAW. (2) B O = 0 : coupled. c s ~v i. IA. IA : hot electron –shield ion - wave. (3) B o = 0. v A. UH. w LH =210. R. v A. w L. 200. L. C. EC. LH. 4. 4. W. - PowerPoint PPT Presentation
Transcript of PLASMA WAVES & DIFFUSION
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PLASMA WAVES& DIFFUSION
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Ch.4Review (Single ptl Motions)
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SUMMARY OF PLASMA WAVES(1) BO = 0uncoupled(2) BO = 0 : coupled IA : hot electron shield ion - wave(3) Bo = 0LHUHcs~viIAECICRLCIAWcs0.144200wLH=210wLvAWSAMSvA
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(4) Bo = 0Almost ~CCsICWMS
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Bohm velocity of bi-Maxwellian electron distribution2006. 2.27 .G.J. Kim
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Godyak, IEEE TRANSACTIONS ON PLASMA SCIENCE, VOL. 23, NO. 4, 728
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Ion velocity at the bulk-sheath boundary is correspond to the low energy electron group in case of bi-Maxwellian EEPF.5mTorr, 0.2A, 40.12MHz
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Dispersion relation
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Dispersion relation
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Ch.5 Diffusion(Transport) of Ptls, Heat, Momentum Classification-without or with plasma instabilities anomalous diffusion(defends on source type) our subject this ch.-weakly Ionized plasma vs Fully Ionized plasma collision of charged (high-Temp.) ptls e,I with abundant -no neutral neutral gas particles just collision of e,I (e-e, e-i,i-i) important! PECVDR.I.E.I.C.P.H.S. LeeD
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MERIEE.C.R.HeliconH.S. Lee()()()()
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Mobility Diffusion Coeff () (D)S.SAmbipolar Diffusion-Definition:MHD Eqs(conservation Forms)A single fluidEq.for & Under E&BfromDrift-DiffusionApprox.(PDP)S.E. Park
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Transports(L&L)5.1
(2) Other fluid eqField-free=Free Diffusion (p130)Const. For hi-pressure(pN)(3) Third fluid eq 5.2 steady solutions (1-D slab)Three casesField free 5.3(2)Low-pN(but finit collisions)Solution (5.3.7)&Fig 5.2(b)(3)Collision-less Case(very-Low pN;Free-Fall solutions)(1.1)(1.2)no source(1.9) Einstein rel(1.7)(p136)(2.19)(2.20)(3.10)&Fig(5.3)Langmuir solnS.E. Park
