Open Aperture StagesOpen Aperture Stages KOHZU Precision Co., Ltd. 2-6-15,...

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Model : YRA-071 (Alignment Stage) Table Size : 70mm×70mm Motion Range : XY ±5mm θ ±5° Through Hole Size : φ20mm Model : YRA-130 (Alignment Stage) Table Size : 130mm×130mm Motion Range : XY ±5mm θ ±5° Through Hole Size : φ35mm Model : YRA-200 (Alignment Stage) Table Size : 210mm×150m Motion Range : XY ±5mm θ ±5° Through Hole Size : φ48mm Model : YA10A-R2H Table Size : 100mm×100mm Motion Range : ±12.5mm Through Hole Size : 35mm×35mm Model : CYA18A-25H Table Size : 180mm×180mm Motion Range : ±25mm Through Hole Size : 90mm×95mm Model : CYA300-R2H Table Size : 300mm×300mm Motion Range : ±15mm Through Hole Size : φ100mm KOHZU Precision Co., Ltd. www.kohzuprecision.com 2-6-15, Kurigi,Asao-ku,Kawasaki,Kanagawa 215-8521, JAPAN Email: [email protected] 17.11 www.kohzuprecision.com STAGE LINE UP Open Aperture Stages Open Center Alignment Stages with Through Hole

Transcript of Open Aperture StagesOpen Aperture Stages KOHZU Precision Co., Ltd. 2-6-15,...

Page 1: Open Aperture StagesOpen Aperture Stages KOHZU Precision Co., Ltd. 2-6-15, Kurigi,Asao-ku,Kawasaki,Kanagawa 215-8521, JAPAN Email: sale@kohzu.co.jp 17.11 Open Center Alignment Stages

Model : YRA-071 (Alignment Stage)Table Size : 70mm×70mmMotion Range : XY ±5mm θ ±5°Through Hole Size : φ20mm

Model : YRA-130 (Alignment Stage)Table Size : 130mm×130mmMotion Range : XY ±5mm θ ±5°Through Hole Size : φ35mm

Model : YRA-200 (Alignment Stage)Table Size : 210mm×150mMotion Range : XY ±5mm θ ±5°Through Hole Size : φ48mm

Model : YA10A-R2HTable Size : 100mm×100mmMotion Range : ±12.5mmThrough Hole Size : 35mm×35mm

Model : CYA18A-25HTable Size : 180mm×180mmMotion Range : ±25mmThrough Hole Size : 90mm×95mm

Model : CYA300-R2HTable Size : 300mm×300mmMotion Range : ±15mmThrough Hole Size : φ100mm

KOHZU Precision Co., Ltd. www.kohzuprecision.com2-6-15, Kurigi,Asao-ku,Kawasaki,Kanagawa 215-8521, JAPANEmail: [email protected] 17.11

www.kohzuprecision.com

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Open Aperture Stages

Open Center Alignment Stages with Through Hole

Page 2: Open Aperture StagesOpen Aperture Stages KOHZU Precision Co., Ltd. 2-6-15, Kurigi,Asao-ku,Kawasaki,Kanagawa 215-8521, JAPAN Email: sale@kohzu.co.jp 17.11 Open Center Alignment Stages

Model : RM07A-D1Table Size : φ68mmAngular Range : Coarse 360°, Fine ±3°Through Hole Size : φ20mm

Model : RM10A-C1Table Size : φ98mmAngular Range : Coarse 360°, Fine ±3°Through Hole Size : φ30mm

Model : RM16A-C1Table Size : φ158mmAngular Range : Coarse 360°, Fine ±3°Through Hole Size : φ50mm

Model : YM07A-S1WTable Size : 70mm×70mmMotion Range : ±3mmThrough Hole Size : φ28mm

Model : RA07A-T01Table Size : 70mm×70mmAngular Range : ±5°Through Hole Size : φ30mm

Model : RA10A-T01Table Size : 100mm×100mmAngular Range : ±5°Through Hole Size : φ45mm

Model : RA16A-WHTable Size : φ158mmAngular Range : ±170°Through Hole Size : φ55mm

Model : ST07A-S1WTable Size : 70mm×70mmAngular Range : ±3°Through Hole Size : φ18mm

www.kohzuprecision.com

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Open Aperture Stages

KOHZU Precision Co., Ltd. www.kohzuprecision.com2-6-15, Kurigi,Asao-ku,Kawasaki,Kanagawa 215-8521, JAPANEmail: [email protected] 17.11

Open Center Alignment Stages with Through Hole