Multi-Photon and Entangled-Photon Imaging and Lithography · 2011. 10. 7. · See Youngquist, Carr,...

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Multi-Photon and Entangled-Photon Imaging and Lithography Malvin Carl Teich College of Optics & Photonics University of Central Florida Columbia & Boston Universities http://people.bu.edu/teich University of Virginia Physics Colloquium 7 October 2011 Photonics Center Boston University

Transcript of Multi-Photon and Entangled-Photon Imaging and Lithography · 2011. 10. 7. · See Youngquist, Carr,...

Page 1: Multi-Photon and Entangled-Photon Imaging and Lithography · 2011. 10. 7. · See Youngquist, Carr, and Davies, “Optical coherence-domain reflectometry: A new optical evaluation

Multi-Photon and Entangled-Photon Imaging and Lithography

Malvin Carl TeichCollege of Optics & PhotonicsUniversity of Central Florida

Columbia & Boston Universities

http://people.bu.edu/teich

University of Virginia

Physics Colloquium7 October 2011

Photonics CenterBoston University

Page 2: Multi-Photon and Entangled-Photon Imaging and Lithography · 2011. 10. 7. · See Youngquist, Carr, and Davies, “Optical coherence-domain reflectometry: A new optical evaluation

Photons Arrive Randomly

Δn Δφ = 1/2 Product of photon-number and phase uncertainties:

Page 3: Multi-Photon and Entangled-Photon Imaging and Lithography · 2011. 10. 7. · See Youngquist, Carr, and Davies, “Optical coherence-domain reflectometry: A new optical evaluation

Multiphoton Excitationvs

Entangled-Photon Excitation

For classical light, probability of simultaneous absorption ofn photons ∝ I n

Multiphoton absorption more likely in regions of high light intensityUltrafast light pulses have high peak

intensities, allowing multiphotonexcitation at low average powerExcitation (photoemission, fluorescence,

lithography, photochemistry), can be localized for n photonsFor entangled-n-photon light, probability

of simultaneous absorption of n photons ∝ I

Optics & Photonics News 11, 40 (2000)

Page 4: Multi-Photon and Entangled-Photon Imaging and Lithography · 2011. 10. 7. · See Youngquist, Carr, and Davies, “Optical coherence-domain reflectometry: A new optical evaluation

Generation of Entangled Photon Pairs via Spontaneous Parametric Down-Conversion

Laser χ(2)

Crystal

Signal

Idler

Pump

kp ωp σp

ks ωs σs

ki ωi σi

ωp = ωs + ωiENERGY CONSERVATION:

MOMENTUM CONSERVATION: kp = ks + ki

kp

kski

After Joobeur, Saleh, and Teich, “Spatiotemporal Coherence Properties of Entangled Light Beams Generated by Parametric Down-Conversion," Phys. Rev. A 50, 3349 (1994)

PHOTONS ARE EMITTED IN PAIRS (TWINS): IDEAL REAL•Each at a random time, but times are correlated :•Each is broadband, but frequencies are anti-correlated :•Each is multidirectional, but directions are anti-correlated :•Each with random polarization, but polarizations are orthogonal : (Type-II SPDC)

consts i et t τ τ τ− = = Δ ≡consts i p pω ω ω ω+ = = Δconsts i p eA+ = = Δ ≡k k k k

Page 5: Multi-Photon and Entangled-Photon Imaging and Lithography · 2011. 10. 7. · See Youngquist, Carr, and Davies, “Optical coherence-domain reflectometry: A new optical evaluation
Page 6: Multi-Photon and Entangled-Photon Imaging and Lithography · 2011. 10. 7. · See Youngquist, Carr, and Davies, “Optical coherence-domain reflectometry: A new optical evaluation

MultiphotonMultiphotonAbsorptionAbsorption

T: T: GGööppertppert--Mayer (1931)Mayer (1931)E: Franken E: Franken et alet al. (1961). (1961)

PhotoemissionPhotoemissionT: Bloch (1964)T: Bloch (1964)E: Teich & E: Teich & WolgaWolga (1964)(1964)

MicroscopyMicroscopyT: Sheppard & T: Sheppard & KompfnerKompfner (1978)(1978)E: E: DenkDenk et al.et al. (1990)(1990)

LithographyLithographyT: ancientT: ancientE: 3D..Maruo & E: 3D..Maruo & KawataKawata (1997)(1997)

OCT OCT (Optical Coherence (Optical Coherence Tomography Tomography –– Single Photon)Single Photon)

T: T: YoungquistYoungquist et alet al. (1987). (1987)E: Huang E: Huang et alet al. (1991). (1991)

EntangledEntangled--PhotonPhotonAbsorptionAbsorption

T: T: FeiFei et al.et al. (1997)(1997)E: Dayan E: Dayan et al.et al. (2004)(2004)

PhotoemissionPhotoemissionT: T: LissandrinLissandrin et al.et al. (2004)(2004)E:E:

MicroscopyMicroscopyT: Teich & Saleh (1997)T: Teich & Saleh (1997)E:E:

LithographyLithographyT: T: BotoBoto et al.et al. (2000) (2000) E:E:

QOCT QOCT (Quantum Optical (Quantum Optical Coherence Tomography Coherence Tomography –– 22--Photon)Photon)

T: T: AbouraddyAbouraddy et al.et al. (2002) (2002) E: E: NasrNasr et al.et al. (2003)(2003)

EXAMPLES

Page 7: Multi-Photon and Entangled-Photon Imaging and Lithography · 2011. 10. 7. · See Youngquist, Carr, and Davies, “Optical coherence-domain reflectometry: A new optical evaluation

MultiphotonMultiphotonAbsorptionAbsorption

T: T: GGööppertppert--Mayer (1931)Mayer (1931)E: Franken E: Franken et alet al. (1961). (1961)

PhotoemissionPhotoemissionT: Bloch (1964)T: Bloch (1964)E: Teich & E: Teich & WolgaWolga (1964)(1964)

MicroscopyMicroscopyT: Sheppard & T: Sheppard & KompfnerKompfner (1978)(1978)E: E: DenkDenk et al.et al. (1990)(1990)

LithographyLithographyT: ancient T: ancient E: 3D..Maruo & E: 3D..Maruo & KawataKawata (1997)(1997)

OCT OCT (Optical Coherence (Optical Coherence Tomography Tomography –– Single Photon)Single Photon)

T: T: YoungquistYoungquist et alet al. (1987). (1987)E: Huang E: Huang et alet al. (1991). (1991)

EntangledEntangled--PhotonPhotonAbsorptionAbsorption

T: T: FeiFei et al.et al. (1997)(1997)E: Dayan E: Dayan et al.et al. (2004)(2004)

PhotoemissionPhotoemissionT: T: LissandrinLissandrin et al.et al. (2004)(2004)E:E:

MicroscopyMicroscopyT: Teich & Saleh (1997)T: Teich & Saleh (1997)E:E:

LithographyLithographyT: T: BotoBoto et al.et al. (2000) (2000) E:E:

QOCT QOCT (Quantum Optical (Quantum Optical Coherence Tomography Coherence Tomography –– 22--Photon)Photon)

T: T: AbouraddyAbouraddy et al.et al. (2002) (2002) E: E: NasrNasr et al.et al. (2003)(2003)

EXAMPLES

Page 8: Multi-Photon and Entangled-Photon Imaging and Lithography · 2011. 10. 7. · See Youngquist, Carr, and Davies, “Optical coherence-domain reflectometry: A new optical evaluation

Second-Harmonic Generation (SHG)

Page 9: Multi-Photon and Entangled-Photon Imaging and Lithography · 2011. 10. 7. · See Youngquist, Carr, and Davies, “Optical coherence-domain reflectometry: A new optical evaluation

Enhancement of SHG via Thermal Light or Speckle

Page 10: Multi-Photon and Entangled-Photon Imaging and Lithography · 2011. 10. 7. · See Youngquist, Carr, and Davies, “Optical coherence-domain reflectometry: A new optical evaluation

Entangled-Photon Absorption (Theory)

After Fei, Jost, Popescu, Saleh, and Teich, "Entanglement-Induced Two-Photon Transparency," Phys. Rev. Lett. 78, 1679 (1997)

Page 11: Multi-Photon and Entangled-Photon Imaging and Lithography · 2011. 10. 7. · See Youngquist, Carr, and Davies, “Optical coherence-domain reflectometry: A new optical evaluation

Entangled-Photon SFG (Experiment)

After Dayan, Pe’er, Friesem, and Silberberg, “Nonlinear Interactions with an Ultrahigh Flux of Broadband Entangled Photons,”

Phys. Rev. Lett. 94, 043602 (2005)

Page 12: Multi-Photon and Entangled-Photon Imaging and Lithography · 2011. 10. 7. · See Youngquist, Carr, and Davies, “Optical coherence-domain reflectometry: A new optical evaluation

Linear OpticsLinear OpticsScalarScalar

SuperSuper--resolutionresolution

Vector beamVector beam

Nonlinear OpticsNonlinear OpticsPhase conjugationPhase conjugation

STED STED (stimulated (stimulated emission depletion emission depletion microscopy)microscopy)

MultiphotonMultiphotonimagingimaging

NONLINEAR AND ENTANGLED-PHOTON IMAGING

Quantum OpticsQuantum OpticsQuadratureQuadrature--squeezed imagingsqueezed imaging

NumberNumber--squeezedsqueezedimagingimaging

EntangledEntangled--photon photon imagingimaging

c

Distortingmedium

Mirror

Optical Imaging = Extracting the spatial distribution of a remoteobject (static or dynamic, 2D or 3D, scalar or vector, B/W or color).

Page 13: Multi-Photon and Entangled-Photon Imaging and Lithography · 2011. 10. 7. · See Youngquist, Carr, and Davies, “Optical coherence-domain reflectometry: A new optical evaluation

MultiphotonMultiphotonAbsorptionAbsorption

T: T: GGööppertppert--Mayer (1931)Mayer (1931)E: Franken E: Franken et alet al. (1961). (1961)

PhotoemissionPhotoemissionT: Bloch (1964)T: Bloch (1964)E: Teich & E: Teich & WolgaWolga (1964)(1964)

MicroscopyMicroscopyT: Sheppard & T: Sheppard & KompfnerKompfner (1978)(1978)E: E: DenkDenk et al.et al. (1990)(1990)

LithographyLithographyT: ancientT: ancientE: 3D..Maruo & E: 3D..Maruo & KawataKawata (1997)(1997)

OCT OCT (Optical Coherence (Optical Coherence Tomography Tomography –– Single Photon)Single Photon)

T: T: YoungquistYoungquist et alet al. (1987). (1987)E: Huang E: Huang et alet al. (1991). (1991)

EntangledEntangled--PhotonPhotonAbsorptionAbsorption

T: T: FeiFei et al.et al. (1997)(1997)E: Dayan E: Dayan et al.et al. (2004)(2004)

PhotoemissionPhotoemissionT: T: LissandrinLissandrin et al.et al. (2004)(2004)E:E:

MicroscopyMicroscopyT: Teich & Saleh (1997)T: Teich & Saleh (1997)E:E:

LithographyLithographyT: T: BotoBoto et al.et al. (2000) (2000) E:E:

QOCT QOCT (Quantum Optical (Quantum Optical Coherence Tomography Coherence Tomography –– 22--Photon)Photon)

T: T: AbouraddyAbouraddy et al.et al. (2002) (2002) E: E: NasrNasr et al.et al. (2003)(2003)

EXAMPLES

Page 14: Multi-Photon and Entangled-Photon Imaging and Lithography · 2011. 10. 7. · See Youngquist, Carr, and Davies, “Optical coherence-domain reflectometry: A new optical evaluation

PULSEDLASER

FLUORESCENCESIGNAL

LENS

ADVANTANGES: Longer wavelength source penetrates more deeply into tissue. Excitation only occurs only at focal region – eliminates pinhole detectors, increases SNR, and provides optical sectioning capabilities.

DISADVANTAGES: Large photon flux is required. Samples must have broad upper-energy levels. Expensive titanium:sapphire laser system. Sample photodamage.

ADVANTANGES: Guaranteed photon pairs create comparable depth penetration but at substantially reduced light levels. Samples do not require broad upper-energy levels. Pump laser can be continuous-wave or pulsed.

DISADVANTAGES: Overall photon flux is low. Entangled-photon absorption cross-section and entanglement area are not well established.

Multiphoton Microscopy

INCIDENTPHOTONS

SAMPLE

LENS

NONLINEAR CRYSTAL

LASER

Entangled-Photon Microscopy

After Teich and Saleh, "Mikroskopie s kvantově provázanými fotony (Entangled-Photon Microscopy),"Československý časopis pro fyziku 47, 3 (1997)U.S. Patent 5,796,477 (issued 18 August 1998)

Page 15: Multi-Photon and Entangled-Photon Imaging and Lithography · 2011. 10. 7. · See Youngquist, Carr, and Davies, “Optical coherence-domain reflectometry: A new optical evaluation

MultiphotonMultiphotonAbsorptionAbsorption

T: T: GGööppertppert--Mayer (1931)Mayer (1931)E: Franken E: Franken et alet al. (1961). (1961)

PhotoemissionPhotoemissionT: Bloch (1964)T: Bloch (1964)E: Teich & E: Teich & WolgaWolga (1964)(1964)

MicroscopyMicroscopyT: Sheppard & T: Sheppard & KompfnerKompfner (1978)(1978)E: E: DenkDenk et al.et al. (1990)(1990)

LithographyLithographyT: ancientT: ancientE: 3D..Maruo & E: 3D..Maruo & KawataKawata (1997)(1997)

OCT OCT (Optical Coherence (Optical Coherence Tomography Tomography –– Single Photon)Single Photon)

T: T: YoungquistYoungquist et alet al. (1987). (1987)E: Huang E: Huang et alet al. (1991). (1991)

EntangledEntangled--PhotonPhotonAbsorptionAbsorption

T: T: FeiFei et al.et al. (1997)(1997)E: Dayan E: Dayan et al.et al. (2004)(2004)

PhotoemissionPhotoemissionT: T: LissandrinLissandrin et al.et al. (2004)(2004)E:E:

MicroscopyMicroscopyT: Teich & Saleh (1997)T: Teich & Saleh (1997)E:E:

LithographyLithographyT: T: BotoBoto et al.et al. (2000) (2000) E:E:

QOCT QOCT (Quantum Optical (Quantum Optical Coherence Tomography Coherence Tomography –– 22--Photon)Photon)

T: T: AbouraddyAbouraddy et al.et al. (2002) (2002) E: E: NasrNasr et al.et al. (2003)(2003)

EXAMPLES

Page 16: Multi-Photon and Entangled-Photon Imaging and Lithography · 2011. 10. 7. · See Youngquist, Carr, and Davies, “Optical coherence-domain reflectometry: A new optical evaluation

Entangled-Photon Lithography (Theory)

After Boto, Kok, Abrams, Braunstein, Williams, and Dowling, “Quantum Interferometric Optical Lithography: Exploiting Entanglement to Beat the Diffraction Limit,” Phys. Rev. Lett. 85, 2733 (2000)

Origin of factor of 2 resolution enhancement and validity for arbitrary masks:

Page 17: Multi-Photon and Entangled-Photon Imaging and Lithography · 2011. 10. 7. · See Youngquist, Carr, and Davies, “Optical coherence-domain reflectometry: A new optical evaluation

Example: Radical MultiphotonAbsorption Polymerization

•Multiphoton absorption by a photo-initiator in a viscous liquid pre-polymer resin generates radicals. (A co-initiator may be required as well.)

•Photoexcitation of the photo-initiator begins a chain reaction that hardens the resin locally.

•Theoretical resolution available via multiphoton absorption (MPA) inversely proportional to the numerical aperture.

•Chemical nonlinearity (quenching of radicals by oxygen or recombination) can lead to a substantial increase in resolution via thresholding.

3D Lithography

After Baldacchini, LaFratta, Farrer, Teich, Saleh, Naughton, and Fourkas, “Acrylic-Based Resin with Favorable Properties for Three-Dimensional Two-Photon Polymerization,”

J. Appl. Phys. 95, 6072 (2004)

10 μm

Page 18: Multi-Photon and Entangled-Photon Imaging and Lithography · 2011. 10. 7. · See Youngquist, Carr, and Davies, “Optical coherence-domain reflectometry: A new optical evaluation

After Farrer, LaFratta, Li, Praino, Naughton, Saleh, Teich, and Fourkas, “Selective Functionalization of 3-D Polymer Microstructures,” J. Am. Chem. Soc. 128, 1796 (2006).

1 µm

Page 19: Multi-Photon and Entangled-Photon Imaging and Lithography · 2011. 10. 7. · See Youngquist, Carr, and Davies, “Optical coherence-domain reflectometry: A new optical evaluation

MultiphotonMultiphotonAbsorptionAbsorption

T: T: GGööppertppert--Mayer (1931)Mayer (1931)E: Franken E: Franken et alet al. (1961). (1961)

PhotoemissionPhotoemissionT: Bloch (1964)T: Bloch (1964)E: Teich & E: Teich & WolgaWolga (1964)(1964)

MicroscopyMicroscopyT: Sheppard & T: Sheppard & KompfnerKompfner (1978)(1978)E: E: DenkDenk et al.et al. (1990)(1990)

LithographyLithographyT: ancientT: ancientE: 3D..Maruo & E: 3D..Maruo & KawataKawata (1997)(1997)

OCT OCT (Optical Coherence (Optical Coherence Tomography Tomography –– Single Photon)Single Photon)

T: T: YoungquistYoungquist et alet al. (1987). (1987)E: Huang E: Huang et alet al. (1991). (1991)

EntangledEntangled--PhotonPhotonAbsorptionAbsorption

T: T: FeiFei et al.et al. (1997)(1997)E: Dayan E: Dayan et al.et al. (2004)(2004)

PhotoemissionPhotoemissionT: T: LissandrinLissandrin et al.et al. (2004)(2004)E:E:

MicroscopyMicroscopyT: Teich & Saleh (1997)T: Teich & Saleh (1997)E:E:

LithographyLithographyT: T: BotoBoto et al.et al. (2000) (2000) E:E:

QOCT QOCT (Quantum Optical (Quantum Optical Coherence Tomography Coherence Tomography –– 22--Photon)Photon)

T: T: AbouraddyAbouraddy et al.et al. (2002) (2002) E: E: NasrNasr et al.et al. (2003)(2003)

EXAMPLES

Page 20: Multi-Photon and Entangled-Photon Imaging and Lithography · 2011. 10. 7. · See Youngquist, Carr, and Davies, “Optical coherence-domain reflectometry: A new optical evaluation

Classical Optical Coherence Tomography (OCT)OCT = Interferometric reflectometry using a broadband

source of light (short coherence length)

I(τ)

BroadbandSource

Detector

Sample

Mirror

1I(τ)

τ

Classical

SLD

Axial resolution is often of the order of a few μ mSubmicron resolution is possible with fs lasers and supercontinuum lightIn a dispersive medium, the resolution deteriorates to tens of μ m

See Youngquist, Carr, and Davies, “Optical coherence-domain reflectometry: A new optical evaluation technique,” Opt. Lett. 12, 158–160 (1987).

Page 21: Multi-Photon and Entangled-Photon Imaging and Lithography · 2011. 10. 7. · See Youngquist, Carr, and Davies, “Optical coherence-domain reflectometry: A new optical evaluation

Laser Pump

Quantum Optical Coherence Tomography (QOCT)

Advantages of QOCT:Factor of 2 improvement in axial resolution for same spectral width Insensitivity to group-velocity dispersion w. concomitant improvement in axial resolution

C(τ)

z

Detector 2

Sample

Mirror

xNLC

Detector 1

C(τ)

τ

Laser PhotonCoincidence

= OCT based on quantum interferometry of spectrally-entangled photons generated by downconverted light from a nonlinear crystal

After Abouraddy, Nasr, Saleh, Sergienko, and Teich, “Quantum-Optical Coherence Tomography with Dispersion Cancellation,” Phys. Rev. A 65, 053817 (2002)

Page 22: Multi-Photon and Entangled-Photon Imaging and Lithography · 2011. 10. 7. · See Youngquist, Carr, and Davies, “Optical coherence-domain reflectometry: A new optical evaluation

Note that coincidence detection achieves high visibility despite unbalanced loss

Optics Express, 12, 1353 (2004)

Indistinguishability Yields Interference

Source of simultaneously emitted photon pairs

Beamsplitterinterferometer

There are four possible photon paths at the beamsplitter: RT, TR, RR, and TT. For indistinguishable photons, the RR and TT alternatives cancel by virtue of the phase shift at the beamsplitter. The remaining RT and TR alternatives yield both photons exiting the same port of the beamsplitter (they appear to stick together) so that the probability of photon coincidence is zero.

NonlinearCrystal

Laser

xPhoton

coincidence

Detector

z Detector

R R

x

C(z)

z0

zNonlinear

Crystal

Laser

Detector

Detector

Photon coincidence

Pathlength difference

T TCANCELS

C. K. Hong, Z. Y. Ou, and L. Mandel, Phys. Rev. Lett. 59, 2044 (1987)

RESULTING IN:

Page 23: Multi-Photon and Entangled-Photon Imaging and Lithography · 2011. 10. 7. · See Youngquist, Carr, and Davies, “Optical coherence-domain reflectometry: A new optical evaluation

After Nasr, Saleh, Sergienko, and Teich, “Dispersion-Cancelled and Dispersion-Sensitive Quantum Optical Coherence Tomography,” Opt. Express 12, 1353 (2004)

Dispersion-Free QOCT (Experiment)

Page 24: Multi-Photon and Entangled-Photon Imaging and Lithography · 2011. 10. 7. · See Youngquist, Carr, and Davies, “Optical coherence-domain reflectometry: A new optical evaluation

Q-OCT promises improved axial resolution in comparison with conventional OCT for sources of same spectral bandwidth

Source bandwidth for Q-OCT governed by process of entangled-photon generation (e.g., crystal width); can be tuned

Self-interference at each boundary immune to group-velocity dispersion introduced by layers above

Inter-boundary interference sensitive to dispersion of inter-boundary layers; dispersion parameters can thus be estimated

These first experiments demonstrate viability of technique

OCT vs. QOCT

Page 25: Multi-Photon and Entangled-Photon Imaging and Lithography · 2011. 10. 7. · See Youngquist, Carr, and Davies, “Optical coherence-domain reflectometry: A new optical evaluation

After Nasr, Goode, Nguyen, Rong, Yang, Reinhard, Saleh, and Teich, “Quantum Optical Coherence Tomography of a Biological Sample,” Opt. Commun. 282, 1154 (2009).

PBS

PBS

NPBS

QWP

xyBiological Sample

NLC

D1

D2

Cx,y(z)

z

QWP

LPF

LPF

z

x406 nm

Kr+ -

ion

Lase

r

1.25-cm-thick antireflection-coated glass slab

QOCT of Onion-Skin Cells in 3D (Experiment)

Page 26: Multi-Photon and Entangled-Photon Imaging and Lithography · 2011. 10. 7. · See Youngquist, Carr, and Davies, “Optical coherence-domain reflectometry: A new optical evaluation

A-Scan

0.80

0.85

0.90

0.95

1.00

Nor

mal

ized

Coi

ncid

ence

Rat

e

z (μm)–10 0 10 20

7.5 μm

After Nasr, Goode, Nguyen, Rong, Yang, Reinhard, Saleh, and Teich, “Quantum Optical Coherence Tomography of a Biological Sample,” Opt. Commun. 282, 1154 (2009).

Page 27: Multi-Photon and Entangled-Photon Imaging and Lithography · 2011. 10. 7. · See Youngquist, Carr, and Davies, “Optical coherence-domain reflectometry: A new optical evaluation

3D Contours of Constant Coincidence Rate

−40

20

−20

40

00−10

10−20

20

xy

z

0

C-Scan(xy)

B-Scan(xz)

Position (μm)

Posit

ion

(μm

)

Position(μm)

C = 0.90

Sample coated with BSA-functionalized gold nanoparticles

B-Sc

an(y

z)

After Nasr, Goode, Nguyen, Rong, Yang, Reinhard, Saleh, and Teich, “Quantum Optical Coherence Tomography of a Biological Sample,” Opt. Commun. 282, 1154 (2009).

Page 28: Multi-Photon and Entangled-Photon Imaging and Lithography · 2011. 10. 7. · See Youngquist, Carr, and Davies, “Optical coherence-domain reflectometry: A new optical evaluation

75 µm

x

y

z

1.00

0.85

0.95

0.90

Nor

mal

ized

Coi

ncid

ence

Rat

e

Transverse resolution

12 µm

xy

z

30 µm

100 µm

C-Scans

Page 29: Multi-Photon and Entangled-Photon Imaging and Lithography · 2011. 10. 7. · See Youngquist, Carr, and Davies, “Optical coherence-domain reflectometry: A new optical evaluation

1 µm 2 µm0 µm−1 µm

z = −5 µm −3 µm −2 µm−4 µm

3 µm 4 µm 5 µm 6 µm

100 µm

75 µmx

y

z

1.00

0.85

0.95

0.90

Nor

mal

ized

Coi

ncid

ence

Rat

e

C-Scans

After Nasr, Goode, Nguyen, Rong, Yang, Reinhard, Saleh, and Teich, “Quantum Optical Coherence Tomography of a Biological Sample,” Opt. Commun. 282, 1154 (2009).

Page 30: Multi-Photon and Entangled-Photon Imaging and Lithography · 2011. 10. 7. · See Youngquist, Carr, and Davies, “Optical coherence-domain reflectometry: A new optical evaluation

x

z

1.00

0.85

0.95

0.90

y

75 µm

xy

z

30 µm

100 µm

B-Scans

Nor

mal

ized

Coi

ncid

ence

Rat

e

Transverse resolution

12 µm

Page 31: Multi-Photon and Entangled-Photon Imaging and Lithography · 2011. 10. 7. · See Youngquist, Carr, and Davies, “Optical coherence-domain reflectometry: A new optical evaluation

Applications of OCT and QOCTApplications of OCT and QOCT•• Transparent tissue: Transparent tissue: eye: retinal nerve fiber layer, retinal thickness, eye: retinal nerve fiber layer, retinal thickness, contour changes in the optic disk; subcutaneous blood vesselscontour changes in the optic disk; subcutaneous blood vessels

•• Turbid media: Turbid media: vascular wall, vascular wall, placquesplacques

•• PolarizationPolarization--OCT: OCT: tissues with collagen or tissues with collagen or elastinelastin fibers: muscle, fibers: muscle, tendons; normal and thermally damaged soft tissuestendons; normal and thermally damaged soft tissues

Continuing Challenges for QOCTContinuing Challenges for QOCTLimited photon flux: improvement via decreased entanglement timeLimited photon flux: improvement via decreased entanglement timeLimited axial resolution: improvement via Limited axial resolution: improvement via increased source bandwidthincreased source bandwidth

Recent Improvements Enabling Biological QOCTRecent Improvements Enabling Biological QOCT• Compact optical configurationCompact optical configuration•• Use of lenses to enhance spatial resolution Use of lenses to enhance spatial resolution •• Use of PBS/Use of PBS/QWPsQWPs to increase photon flux (factor of 4)to increase photon flux (factor of 4)•• Enhanced sample preparation using gold Enhanced sample preparation using gold nanoparticlesnanoparticles and BSAand BSA

Page 32: Multi-Photon and Entangled-Photon Imaging and Lithography · 2011. 10. 7. · See Youngquist, Carr, and Davies, “Optical coherence-domain reflectometry: A new optical evaluation

Biological QOCT: SummaryBiological QOCT: SummaryFirst demonstration of the interaction of a quantum-entangled entity and a biological system (nonplanar, scattering, diffusive medium) — entanglement survived the interaction to create an imageDemonstration of the viability of quantum 3D imaging of a biological sample Gold nanoparticles were used to enhance the sample reflectance — a new paradigm for quantum imagingAxial resolution (7.5 μm) can be improved to 1μm. Transverse resolution (12 μm) can be improvedScan time remains too long (but pump power was only 2 mW, corresponding to 0.5 pW of downconverted photons or 106 photon pairs/sec)

Further AdvancesFurther AdvancesQuasi-phase matched (QPM) downconversion (increased photon flux)Chirped quasi-phase-matched downconversion (increased bandwidth)QOCT resolution enhancement via chirped-QPM downconversionQOCT resolution enhancement via superconducting single-photon detectorsPhoton-counting OCT (biological) at λ = 1 μm using chirped-QPM SPDCQuantum-mimetic implementations of QOCTEntangled-photon generation via guided-wave parametric downconversionUse of ultrafast compression techniques for generic quantum imaging

Page 33: Multi-Photon and Entangled-Photon Imaging and Lithography · 2011. 10. 7. · See Youngquist, Carr, and Davies, “Optical coherence-domain reflectometry: A new optical evaluation

Quasi-Phase-Matched (QPM) Downconversion

Signalωs = ωp /2 + Ω

y

Pump ωp

Idler ωi = ωp /2 _ Ω

Periodically-PoledNonlinear Crystal

Increased Photon Flux

ChirpedChirpedQuasi-Phase-Matched

(QPM) Downconversion

Increased Spectral Bandwidth

QOCT with ChirpedQOCT with Chirped--QPM Downconversion QPM Downconversion Enhances ResolutionEnhances Resolution

After Carrasco, Torres, Torner, Sergienko, Saleh, and Teich, “Enhancing the Axial Resolution of Quantum Optical Coherence Tomography by Chirped Quasi-Phase-Matching,”

Opt. Lett. 29, 2429 (2004)

Page 34: Multi-Photon and Entangled-Photon Imaging and Lithography · 2011. 10. 7. · See Youngquist, Carr, and Davies, “Optical coherence-domain reflectometry: A new optical evaluation

Chirp parameter

1 μ m

After Nasr, Carrasco, Saleh, Sergienko, Teich, Torres, Torner, Hum, and Fejer, “UltrabroadbandBiphotons Generated via Chirped Quasi-Phase-Matched Optical Parametric Down-Conversion,”

Phys. Rev. Lett. 100, 183601 (2008)

Enhancement of QOCT Resolution Enhancement of QOCT Resolution via Chirped QPM: 19 via Chirped QPM: 19 μμm to 1 m to 1 μμmm

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Enhancement of QOCT Resolution via Enhancement of QOCT Resolution via Increase in Detector BandwidthIncrease in Detector Bandwidth

After Nasr, Minaeva, Goltsman, Sergienko, Saleh, and Teich, “Submicron Axial Resolution in an Ultrabroadband Two-Photon Interferometer Using Superconducting Single-Photon Detectors,”

Opt. Express 16, 15104 (2008)

Page 36: Multi-Photon and Entangled-Photon Imaging and Lithography · 2011. 10. 7. · See Youngquist, Carr, and Davies, “Optical coherence-domain reflectometry: A new optical evaluation

Quantum-MimeticsPhase-Sensitive Optical Coherence Tomography

After B. I. Erkmen and J. H. Shapiro, “Phase-Conjugate Optical Coherence Tomography,” Phys. Rev. A 74, 041601 (2006)

Page 37: Multi-Photon and Entangled-Photon Imaging and Lithography · 2011. 10. 7. · See Youngquist, Carr, and Davies, “Optical coherence-domain reflectometry: A new optical evaluation

J. de Boer et al., IEEE J. Select. Top. Quantum Electron. 5, 1200-1204 (1999)

Shuliang Jiao and Lihong Wang, OE Magazine, pp. 20- 22 (July 2003)

• TISSUES WITH COLLAGEN OR ELASTIN FIBERS, E.G. MUSCLE, TENDONS

• NORMAL AND THERMALLY DAMAGED SOFT TISSUE

OCT

PS-OCT

Polarization-Sensitive OCT

Page 38: Multi-Photon and Entangled-Photon Imaging and Lithography · 2011. 10. 7. · See Youngquist, Carr, and Davies, “Optical coherence-domain reflectometry: A new optical evaluation

Properties of TypeProperties of Type--I and TypeI and Type--II Entangled PhotonsII Entangled Photons(a) TYPE-I SPDC

(b) TYPE-II SPDC

PUMP BEAM

NONLINEARCRYSTAL

PUMP BEAM

NONLINEARCRYSTAL

momentum: kp = ks + ki

energy: ωp = ωs + ωi

PHASE MATCHING

Page 39: Multi-Photon and Entangled-Photon Imaging and Lithography · 2011. 10. 7. · See Youngquist, Carr, and Davies, “Optical coherence-domain reflectometry: A new optical evaluation

TYPE‐IISPDC

COINCIDENCEDETECTION

PULSED PUMPLASER

D1

D2

PBS

NPBS

HR 400 LP 695

PUMPREMOVAL

MIRROR

PBS

BEAMSPLITTER

D1

HWP Q

Q

LINEAR ROTATORGIVESOR

SAMPLEELLIPTICAL

REFERENCE ARM

SAMPLE ARM

R (τ )

NLC

Polarization-Sensitive QOCT: Theory

After Booth, Di Giuseppe, Saleh, Sergienko, and Teich, “Polarization-Sensitive Quantum-Optical Coherence Tomography,” Phys. Rev. A 69, 043815 (2004)

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10.40 10.44 10.48 10.52 10.56 10.600

40

80

120

160

200

CO

INC

IDEN

CES

/ 5

SEC

ON

DS

NANOMOVER POSITION (mm)10.44 10.48 10.52 10.56 10.60

0

40

80

120

160

200

240

280

320

CO

INC

IDEN

CES

/ 20

SEC

ON

DS

NANOMOVER POSITION (mm)

(a)  NO ZINC SELENIDE (b)  6‐mm  ZINC SELENIDE

30 μm30 μm

Polarization-Sensitive QOCT: Experiment

After Booth, Saleh, and Teich, “Polarization-Sensitive Quantum-Optical Coherence Tomography: Experiment,” Opt. Commun. 284, 2542 (2011)

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CoCo--propagating SPDC in waveguidespropagating SPDC in waveguides

ωp ωs ωi

ωi ωsDirection Waveguide modes

345

11 22

Δβ1 = β p(mp ) − β s

(0 ) − β i(1)

Δβ 2 = β p(mp ) − β s

(1) − β i(0 )

Phase mis-matching

Δβ1 ≠ Δβ2In general,by controlling waveguide dimensions

Δβ1 = Δβ2Λ1 = Λ 2

Single polingperiod

Modal Entanglement

Modal, Spectral, and Polarization Entanglement in Guided-Wave Parametric Downconversion

After Saleh, Saleh, and Teich, “Modal, Spectral, and Polarization Entanglement in Guided-Wave Parametric Down-Conversion,” Phys. Rev. A 79, 053842 (2009)

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Example: Modal entanglement of nondegenerate photons via frequency separation

After Saleh, Di Giuseppe, Saleh, and Teich, “Photonic circuits for generating modal, spectral, and polarization entanglement,” IEEE Photonics Journal 2, 736 (2010)

Modal, Spectral, and Polarization Entanglement in Photonic Circuits

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-0.5 0.0 0.50

2000

4000

6000

0.0

0.5

1.0 (a)

φ (Ω

) (ra

d)

NO

RM

AL

IZE

D |

φ (Ω

) |

-1000 -500 0 500 10000.0

0.2

0.4

0.6

0.8

1.0

1.2

1.4(c) HOM

SFG

NO

RM

AL

IZE

D S

IGN

AL

TEMPORAL DELAY τ (fsec)

(b)

NORMALIZED FREQUENCY Ω / ω0

-0.5 0.0 0.50

2000

4000

6000

0.0

0.5

1.0 (a)

φ (Ω

) (r

ad)

NO

RM

ALI

ZED

| φ

(Ω) |

-1000 -500 0 500 10000.0

0.2

0.4

0.6

0.8

1.0

1.2

1.4(c) HOM

SFG

NO

RM

ALI

ZED

SIG

NA

L

TEMPORAL DELAY τ (fsec)

(b)

NORMALIZED FREQUENCY Ω / ω0

Biphoton Compression Can Make Entangled-Photon Photoemission, Microscopy,

and Lithography Work

After Nasr, Carrasco, Saleh, Sergienko, Teich, Torres, Torner, Hum, and Fejer, “UltrabroadbandBiphotons Generated via Chirped Quasi-Phase-Matched Optical Parametric Down-Conversion,”

Phys. Rev. Lett. 100, 183601 (2008)

Page 44: Multi-Photon and Entangled-Photon Imaging and Lithography · 2011. 10. 7. · See Youngquist, Carr, and Davies, “Optical coherence-domain reflectometry: A new optical evaluation

Boston University:Boston University:•• AymanAyman AbouraddyAbouraddy•• Mark BoothMark Booth•• Francesco Francesco LissandrinLissandrin•• NishantNishant MohanMohan•• Olga Olga MinaevaMinaeva•• Julie Julie PrainoPraino•• Mohammed SalehMohammed Saleh•• David SimonDavid Simon•• Jason StewartJason Stewart•• Andrew WhitingAndrew Whiting•• Tim Tim YarnallYarnall

•• Giovanni Di GiuseppeGiovanni Di Giuseppe•• Martin Martin JaspanJaspan•• BoshraBoshra NasrNasr

University of MarylandUniversity of Maryland--College ParkCollege Park::•• John John FourkasFourkas•• Rick Rick FarrerFarrer•• Chris Chris LaFrattaLaFratta

InstitutInstitut de de CiCièènciesncies FotòniquesFotòniques::•• Silvia CarrascoSilvia Carrasco•• Juan TorresJuan Torres•• LluisLluis TornerTorner

Stanford University:Stanford University:•• David HumDavid Hum•• Martin Martin FejerFejer

ACKNOWLEDGMENTS

Page 45: Multi-Photon and Entangled-Photon Imaging and Lithography · 2011. 10. 7. · See Youngquist, Carr, and Davies, “Optical coherence-domain reflectometry: A new optical evaluation

Army Research Office