MELSERVO-J4 Solutionsdl.mitsubishielectric.com/dl/fa/document/catalog/servo/l03073/l0307… ·...

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SERVO AMPLIFIERS & MOTORS Pre/Post inspection system imaging Solar panel production FPD manufacturing 3D LCD manufacturing SEMI logic inspection Q06UDEHCPU Q172DSCPU QY40P QX40 (MCCB) (MC) vol.03 Motion Alignment ( X-Y-θ ) Vision System Inspection Device Wafer positioning Measure the mark at the wafer's ends. Correct the position. Calculate the difference between the target position and the position measured. Inspect the material. X, Y, θ-axis , 1 2 3 X, Y, θ-axis , 1 2 3 MELSERVO - J4 Solutions For your all production needs System Example Motion CPU PLC CPU Main base unit Q172DSCPU Q06UDEHCPU Q35DB : : : Servo amplifier GOT MR-J4-B,MR-J4W2-B GOT1000 series : : Accurate Positioning COGNEX Vision System Direct Drive Motor Target Position Change Function Shorter Tact Time Issues at production sites System Configuration Settings Step1 Step2 Step3 Step4 Parameter Settings for Ethernet Connection Vision System Connection Settings Motion SFC Program Creation S Setup Procedure Precise Drive Operation Servo motor I/O module TM-RFM,LM-H3 QX40,QY40P : : Issue 1 Issue 2 Issue 3 GOT Ethernet Mitsubishi solution Application Control Flow Vision System Direct Drive Motor Target Position Change Function (a) COGNEX Vision System (b) Wafer (b) (a) X-axis Y-axis θ-axis 1 2 3 1 2 3

Transcript of MELSERVO-J4 Solutionsdl.mitsubishielectric.com/dl/fa/document/catalog/servo/l03073/l0307… ·...

Page 1: MELSERVO-J4 Solutionsdl.mitsubishielectric.com/dl/fa/document/catalog/servo/l03073/l0307… · MR-J4 series servo amplifier operates rotary servo motors, linear servo motors, and

SERVO AMPLIFIERS & MOTORS

•Pre/Post inspection system imaging

•Solar panel production

•FPD manufacturing

•3D LCD manufacturing

•SEMI logic inspection

Q06UDEHCPUQ172DSCPU

QY40P

QX40

(MCCB) (MC)

vol.03 Motion Alignment(X-Y-θ)

Vision System

Inspection Device

Wafer positioning

Measure the mark at the wafer's ends.

Correct the position.

Calculate the difference between the target position andthe position measured.

Inspect the material.

X, Y, θ-axis , ,1 2 3

X, Y, θ-axis , ,1 2 3

MELSERVO-J4 Solutions For your all production needs

System Example

Motion CPUPLC CPUMain base unit

Q172DSCPUQ06UDEHCPUQ35DB

:::

Servo amplifierGOT

MR-J4-B,MR-J4W2-BGOT1000 series

::

Accurate Positioning

COGNEXVision System

Direct Drive Motor Target PositionChange Function

Shorter Tact TimeIssues atproduction

sites

SystemConfiguration

Settings

Step1 Step2 Step3 Step4

ParameterSettings for

Ethernet Connection

Vision SystemConnection Settings

Motion SFCProgram Creation

S

Setup Procedure

Precise DriveOperation

Servo motorI/O module

TM-RFM,LM-H3QX40,QY40P

::

Issue1

Issue2

Issue3

GOT

Ethernet

Mitsubishi solution

Application

Control Flow

Vision System

Direct Drive Motor

Target Position Change Function

(a) COGNEX Vision System(b) Wafer

(b)

(a)

X-axisY-axisθ-axis

123

1

2

3

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Offering theBest Solution

Material (Wafer) Detection

[Operation Example of Target Position Change Function]

X-axis

Y-axis

Originaltarget position

The vision system can easily read the current position, and quickly moves the material (wafer) to the target position, calculating

the correction amount.

Accurate Position Reading andQuick Location Readjustment

COGNEX Vision System

This hollow construction enables cables and wires to go through inside.

Elimination of transmission mechanical parts

The vision system measures the current position.

The system moves the wafer to thetarget position following the correctionamount calculated.

High-response, high-accuracy, and stabilized positioning are achieved by using the direct drive motor for rotary axes. This motor

is also suitable for a low-speed and high-torque operation.

Direct Connection to Drive Parts for High Response and Accuracy

Direct Drive Motor

Flexibly Responding toChanges in the Target Position

Target PositionChange Function

When performing a position

correction using the vision system

data during positioning operation,

the system can move the wafer

to a new target position directly

without starting positioning again.

Thus shorter tact time is achieved.

STEP 1 STEP 2

[Direct Drive Motor Example]

[Example of using wafer (material)]

Original target position

New target position

Quick positiondetection

Shortertact time

Smooth operation with low noise

Clean system without dust coming from worn out

Suitable for a low-speed and high-torque operation.

Target position change

Newtargetposition

Solution

1

Solution

2

Solution

3

COGNEXVision System

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Setup procedure

10:Alignment

[F100]// Log on the vision system 1.MVOPEN K1

[F101]// Start the vision program 2.MVPST K2

[G100]// Check the log on completion.(D2000==K20) * !M0

[G101]// Check the job completion.(D2000==K40) * !M0

[K30:Real]1 ABS-2(Vector speed)

[F102]// Calculate the command position using the image data.D4000L=LONG(D3010F*10000.0)D4002L=LONG(D3014F*10000.0)

axis 1Movement amount D4000 μm

axis 2Movement amount D4002 μm

Vector speed 1000.00 mm/s

END

Step1

System Configuration

Settings

Set the servo amplifier.

Step4

Describe the vision system dedicated instructions, and then the positioning data from the vision system is possible to be read.

Set the parameter concerning the Ethernet communication and the vision program operation.

Step2

Parameter Settings for

Ethernet Connection

Step3

Vision System

Connection Settings

Motion SFC Program

Creation

Set the IP address of the Motion controller.

SSCNET Structure

Built-in Ethernet Port Setting Built-in Ethernet port Open Setting

Amplifier Settings

Ethernet Communication Line

Vision Program Operation

These simple instructions enable to read the data from the vision system.

Double click

Select from "MELSOFT Connection" or "MC Protocol" for protocol.

Double click

Double click

IP Address SettingDefault:192.168.3.39

MR Configurator2

Easy settings

for DD motor

Double click

Double click

Page 4: MELSERVO-J4 Solutionsdl.mitsubishielectric.com/dl/fa/document/catalog/servo/l03073/l0307… · MR-J4 series servo amplifier operates rotary servo motors, linear servo motors, and

Man, mach ine and env i ronmen t in pe r fec t ha rmony S o l u t i o n

HEAD OFFICE: TOKYO BUILDING, 2-7-3, MARUNOUCHI,CHIYODA-KU,TOKYO 100-8310,JAPAN

NAGOYA WORKS: 1-14, YADA-MINAMI 5,HIGASHI-KU,NAGOYA,JAPAN

New publication,effective November 2012.

Specifications are subject to change without notice.L(NA)03073-A 1211(IP)

Displays power consumption and total power consumption.

MR-J4-B

Servo motor

Personalcomputer

SSCNET III/H compatibleMotion controller

M

Driving powerenergy

Regenerativeenergy

Analysis by Motion controller

Rotary servo motor Linear servo motor Direct drive motor

SSCNET III/H command

Simple connection with a cable

Energy-conservativesystem examination

Pulse train command

Complex wiring

Calculates power consumptionin the servo amplifier.

Before After

One-touchtuning window:Command :Actual operation

Time

Settlingtime

Time

Operation is unstable. Operation is not followingthe command.

Spe

ed

Spe

ed

SettlingtimeS

peed

Time

Simple vibrationsuppression control andadjustable robust filter

The Servo Amplifiers, Servo Motors,and Optical Networks Linked in Symphonic Productivity

Servo gains including machine resonance suppression filter, advanced vibration suppression control II, and robust filter areadjusted just by turning on the one-touch tuning function. Machine performance is utilized to the fullest using the advanced vibration suppression control function.

MR-J4 series servo amplifier operates rotary servo motors, linear servo motors, and direct drive motors as standard.

Simple connections with dedicated cables reduce both wiring time and chances of wiring errors.No more complicated wiring.

Quick Setting by Just One Click

Applicable for Various Control and Driving Systems

Dramatically Reduced Wiring

Advanced One-touch Tuning

Flexibility

Reduced Wiring

Power Monitor FunctionPower Saving

Driving power and regenerative energy are calculated from the data in the servo amplifier suchas speed and current.Motor current value, power consumption, and total power consumption are monitored with MR Configurator2. In SSCNET III/H system, data are transmitted to a Motion controller, and the power consumption is analyzed and displayed.

< MR Configurator2>

One-touchtuning

Exactly matched.High-speedpositioning.

Features