Making Uniform Thin Films
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Making Uniform Thin Films. Brett Bostrom , Dr . R. Steven Turley, Dr. David Allred Brigham Young University. “The Skinny”. No one universal reflector for XUV Changing thickness changes behavior ( Γ = 2n d cos β ) Uniformity is crucial!. 1 – 100 nm. Thin Film. - PowerPoint PPT Presentation
Transcript of Making Uniform Thin Films
Making Uniform Thin Films
Making Uniform Thin FilmsBrett Bostrom, Dr. R. Steven Turley, Dr. David AllredBrigham Young UniversityThe SkinnyNo one universal reflector for XUV
Changing thickness changes behavior ( = 2ndcos)
Uniformity is crucial!
Substrate (Silicon Wafer, Glass, etc.)1 100 nmThin FilmThe Process of DepositionDifferent methods for deposition
Thermal Evaporation
Magnetron Sputtering_+ Ar ions+ Ar ionsMetal AtomsHigh-Voltage Power SupplySubstrateStageTargetMagnetComplicationsHigh Vacuum
Oxidation
Uniformity
Magnetic fieldReducing Thickness VarianceStepper Motor
Planetary Gears
Multiple revolutions
Steps to degrees
Revolutions
Initial/Final positionsStageTargetExpected ResultsAutomated system
More Consistent results
More Uniform films
StationaryRevolution onlyComparison
Planetary motion
AcknowledgmentsDr. Turley
Dr. Allred
John Ellsworth
Chris Cosio
James Vaterlaus
