Low G MEMS Inertia Switches for Fuzing Applications · 2018. 5. 25. · Low G MEMS Inertia Switches...
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Low G MEMS Inertia Switches for Fuzing Applications HT MicroAnalytical, Inc. Sam Rogers, Danny Czaja, Hopper Chu, Todd Christenson, Chairman & CTO [email protected]
Transcript of Low G MEMS Inertia Switches for Fuzing Applications · 2018. 5. 25. · Low G MEMS Inertia Switches...
Low G MEMS Inertia Switchesfor Fuzing Applications
HT MicroAnalytical, Inc.Sam Rogers, Danny Czaja, Hopper Chu,Todd Christenson, Chairman & CTO
ReliabilityScaling
Issues
Approach
Results
DesignFabrication
Initial Testing
• Reliability Force Δ Energy Volume
Reliability
Reliability
Design
Reliability
Design
Design
Design
1) Materials – ρ, σy , σ-n - $
2) High Aspect Ratio - $
3) Tolerances / Integration / Packaging - $
Keys for High FOM / Viable Microfabricated Component
4) Testing - $
Design
Custom metal proof mass
CeramicPackage(Hermetic)
Conductive via fill
Hard Gold Contact Pads
Common contact
Top contact
Bottom contact
Side contact
Spin contact not visible
Integrated Inertia Switch Anatomy
Multi-layer spring-mass fabrication
multi-layer fabrication
Multi-layer spring-mass fabrication
Multi-layer spring-mass fabrication
ma = kx
ma = kx
~ 0.05 G / Hz
Diced Wafer
‘WLP’ Diced Parts
Edge of Device
Resonance Measurements
Acknowledgements
Ryan Knight (ARL)
Daniel Jean (Indian Head)
Edward Cornell (China Lake)
ht micro Albuquerque, NM USA(505)341-0466info@htm icro.com
Thank You!
