Low G MEMS Inertia Switches for Fuzing Applications 2018. 5. 25.آ  Low G MEMS Inertia Switches for...

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Transcript of Low G MEMS Inertia Switches for Fuzing Applications 2018. 5. 25.آ  Low G MEMS Inertia Switches for...

  • Low G MEMS Inertia Switches for Fuzing Applications

    HT MicroAnalytical, Inc. Sam Rogers, Danny Czaja, Hopper Chu, Todd Christenson, Chairman & CTO

    todd.c@htmicro.com

  • Reliability Scaling

    Issues

    Approach

    Results

    Design Fabrication

    Initial Testing

  • • Reliability Force Δ Energy Volume

    Reliability

  • Reliability

  • Design

  • Reliability

  • Design

  • Design

  • Design

    1) Materials – ρ, σy , σ-n - $

    2) High Aspect Ratio - $

    3) Tolerances / Integration / Packaging - $

    Keys for High FOM / Viable Microfabricated Component

    4) Testing - $

  • Design

    Custom metal proof mass

    Ceramic Package (Hermetic)

    Conductive via fill

    Hard Gold Contact Pads

    Common contact

    Top contact

    Bottom contact

    Side contact

    Spin contact not visible

    Integrated Inertia Switch Anatomy

  • Multi-layer spring-mass fabrication

  • multi-layer fabrication

  • Multi-layer spring-mass fabrication

  • Multi-layer spring-mass fabrication

  • ma = kx

  • ma = kx

    ~ 0.05 G / Hz

  • Diced Wafer

  • ‘WLP’ Diced Parts

  • Edge of Device

  • Resonance Measurements

  • Acknowledgements

    Ryan Knight (ARL)

    Daniel Jean (Indian Head)

    Edward Cornell (China Lake)

  • ht micro Albuquerque, NM USA (505)341-0466 info@htm icro.com

    Thank You!

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