Laser-Plasma X-ray Source X-ray, λ~nm, >mJ, ~10μm ϕ ps
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10 kH z 40W Ti:sapphire regenerative ring am plifier Isao M ATSUSHIM A,H idehiko YASH IR O ,Toshihisa TO M IE National Institute of Advanced Industrial Science and Technology (AIST), J apan Lasersystem forlaser-plasma X-ray source * Thisstudy w aspartly financially supported by the BudgetforN uclearR esearch ofthe M inistry ofEducation, Culture, Sports, Science and Technology, based on screening and counseling by theA tom ic Energy Com m ission.
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commercial Ti:S MOPA Ti:S Fiber Laser Our Target Area We need Multi-kHz Multi-mJ Laser
Transcript of Laser-Plasma X-ray Source X-ray, λ~nm, >mJ, ~10μm ϕ ps
10 kHz 40W Ti:sapphire regenerative ring amplifierIsao MATSUSHIMA, Hidehiko YASHIRO, Toshihisa TOMIENational Institute of Advanced Industrial Science and Technology (AIST), Japan Laser system for laser-plasma X-ray source *This study was partly financially supported by the Budget for Nuclear Research of the Ministry of Education, Culture, Sports, Science and Technology, based on screening and counseling by the Atomic Energy Commission.
Laser-Plasma X-ray Source
X-ray, λ~nm, <nsblight point source
TargetPlasma
High Temperature<100μmϕ,
Ionization >ps,
Laser
>>mJ, ~10μmϕps<τ<ns>1011 W/cm2
*EUPS; extreme ultraviolet (EUV) excited photoelectron spectroscopy*EUV source for defect inspection of multi-layered mask blanks*EUV lithography*X-ray microscopy of living cells
multi kHz repetition-rate is required for high throughput
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Pulse Energy (mJ)
5 6 7 8 91
2 3 4 5 6 7 8 910
Repetition Rate (kHz)
CLIA
Brown U U Tokyo
AIST
AISTU Deraware
Max-Born
U ColoradoFS-10
Single Stage UncompressSingle Stage Compressed
Multi-Stage CompressedMulti-Stage Uncompress
commercial Ti:S
MOPA Ti:S
FiberLaser
Our Target Area
We need Multi-kHz Multi-mJ Laser
Cryogenic Cooling reduce thermal lens
ω2T4 =
2λ fT
π⎛⎝⎜
⎞⎠⎟
2 2 f − L / 22 fT − L / 2
L / 22 f + 2 fT − L / 2
⎛⎝⎜
⎞⎠⎟
Resonator mode beam radius at the rod
Pump fT 2ω2T
0W ∞ 780 μm
180W 2.2 m 880 μm
fT f=1m
L = 3.6 m
2ω2T
Resonator Design
70
60
50
40
30
20
Extraction efficiency (%)
3025201510Loss (%)
3Es
2Es
1Es 0.5Es
1.5Es
High Efficiency
Pump LaserAO2/G (PowerLase) ×2
High repetition rate : 10 kHz High pulse energy : 8mJ x 2
Good beam quality : M2=23.5
180 W Pump40 W output beam quality M2 < 1.2 @35W, 58 fs (4% power)Before compression4 mJ/pulse10kHzTi:sapphire Regen Amp
26 W 40 W
Full power compression
Thermal distortion of compressor grating12 mmφ clear aperture
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r05080303r05083111M2 =1.8
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r05083112
Air Cooled Grating
Without Cooling With Cooling
Small Power <1W
20W after compression
10kHz Rep-rate Ti:Sap Regen AmpSummary
180 W Pump40 W output beam quality M2 < 1.2 @35W, 58 fs (4% power)4 mJ/pulse
after compression
26 W
Air Cooled Grating20 W M2~1.8, 80fs30 W
40 Wcompression
