High Speed 3D Surface Profiler - Coherent Industrial... · Measurement optical system White light...

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Optical microscope unit LV100D-U etc. Controller unit Focuscope FCV100C Computer Dell P390 equivalent or higher Monitor Dell TFT 20" monitor Software BridgeElements Objective lens Two beam interference objective lens � (Standard configuration: 20x, other options) Observation and measurement range 2.5x 5x 10x 20x 50x* 1 100x* 1 Horizontal (H) μm 3160 1580 790 395 159 79 Vertical (V) μm 3160 1580 790 395 159 79 Working distance (mm) 10.3 9.3 7.4 4.7 3.4 2.0 Numerical aperture (NA) 0.075 0.13 0.3 0.4 0.55 0.7 Measurement optical system White light interferometry� Height measurement Effective resolving power* 2 : 0.1 μm� Display resolving power* 3 : NA� Repeating accuracy σ: 0.01 μm High Speed 3D Surface Profiler BW-H501 High Speed 3D Surface Profiler System Diagram Specification LV Series optical microscope AZ Series stereoscopic microscope MM Series measurement microscope CM Series compact microscope BridgeElements X-Cycle Imager image processing software High-speed camera Piezo system Focuscope image processor made by Photron Support for a range of microscopes High-brightness illuminator MAX-F310 made by Asahi Spectra Co., Ltd., 300 W xenon lamp, lamp service life: 1,000 hours Active vibration isolation table TS-150 made by Herz Co., Ltd., bench dimensions: 400 mm x 450 mm Electrostatic adsorption plate BW-H101-2010T made by Astron Co., Ltd., adsorption area: 200 mm x 100 mm Height measurement time 0.2 second/field Height measurement range 40 μm Correction Surface correction, 4-dimensional curved surface correction Digital enlargement 1/100 sub-pixel processing Roughness measurement 2-dimensional roughness, 3-dimensional roughness Profile display Cursor measurement of distance between two points, cursor measurement of height between two cursor points Output Output of processed images and roughness indices to an Excel file Automatic processing Automatic processing of multiple height images Three dimensional display Direct X display Height calibration Made by VLSI Standard Inc., standard step sample (optional part) *1: Requires a high-brightness illuminator *2: Smallest observable height difference *3: Height data cannot be given because it uses floating point (32-bit) numbers Option Parts Specifications and equipment are subject to change without any notice or obligation on the part of the manufacturer. October 2008 ©2008 NIKON CORPORATION The products detailed in the brochure are controlled by the Japanese Foreign Exchange and Foreign Trade Law and the International Export Control Regime. If there is a possibility that they may be utilized for the development of weapons of mass destruction, etc., they shall not be exported without authorization from the government. Code No. 2CE-KGWH-1 Printed in Japan (0810-05) Am/M NIKON CORPORATION 6-3, Nishiohi 1-chome, Shinagawa-ku, Tokyo 140-8601, Japan phone: +81-3-3773-9026 fax: +81-3-3773-9062 http://nikon.com/products/instruments/index.htm NIKON INSTRUMENTS INC. 1300 Walt Whitman Road, Melville, N.Y. 11747-3064, U.S.A. phone: +1-631-547-8500; +1-800-52-NIKON (within the U.S.A. only) fax: +1-631-547-0306 http://www.nikoninstruments.com/ NIKON INSTRUMENTS EUROPE B.V. Laan van Kronenburg 2, 1183 AS, Amstelveen, The Netherlands phone: +31-20-44-96-222 fax: +31-20-44-96-298 http://www.nikoninstruments.eu/ NIKON INSTRUMENTS (SHANGHAI) CO., LTD. CHINA phone: +86-21-5836-0050 fax: +86-21-5836-0030 (Beijing branch) phone: +86-10-5869-2255 fax: +86-10-5869-2277 (Guangzhou branch) phone: +86-20-3882-0552 fax: +86-20-3882-0580 NIKON SINGAPORE PTE LTD. SINGAPORE phone: +65-6559-3618 fax: +65-6559-3668 NIKON MALAYSIA SDN. BHD. MALAYSIA phone: +60-3-78763887 fax: +60-3-78763387 NIKON INSTRUMENTS KOREA CO., LTD. KOREA phone: +82-2-2186-8410 fax: +82-2-555-4415 NIKON CANADA INC. CANADA phone: +1-905-625-9910 fax: +1-905-625-0103 NIKON FRANCE S.A.S. FRANCE phone: +33-1-45-16-45-16 fax: +33-1-45-16-00-33 NIKON GMBH GERMANY phone: +49-211-9414-0 fax: +49-211-9414-322 NIKON INSTRUMENTS S.p.A. ITALY phone: +39-55-3009601 fax: +39-55-300993 NIKON AG SWITZERLAND phone: +41-43-277-2860 fax: +41-43-277-2861 NIKON UK LTD. UNITED KINGDOM phone: +44-20-8541-4440 fax: +44-20-8541-4584 NIKON GMBH AUSTRIA AUSTRIA phone: +43-1-972-6111-00 fax: +43-1-972-6111-40 NIKON BELUX BELGIUM phone: +32-2-705-56-65 fax: +32-2-726-66-45

Transcript of High Speed 3D Surface Profiler - Coherent Industrial... · Measurement optical system White light...

Page 1: High Speed 3D Surface Profiler - Coherent Industrial... · Measurement optical system White light interferometry Height measurement Effective resolving power*2: 0.1 μm Display resolving

Optical microscope unit LV100D-U etc. Controller unit Focuscope FCV100CComputer Dell P390 equivalent or higherMonitor Dell TFT 20" monitorSoftware BridgeElementsObjective lens Two beam interference objective lens � (Standard configuration: 20x, other options)Observation and measurement range 2.5x 5x 10x 20x 50x*1 100x*1

Horizontal (H) μm 3160 1580 790 395 159 79Vertical (V) μm 3160 1580 790 395 159 79

Working distance (mm) 10.3 9.3 7.4 4.7 3.4 2.0 Numerical aperture (NA) 0.075 0.13 0.3 0.4 0.55 0.7

Measurement optical system White light interferometry�Height measurement Effective resolving power*2: 0.1 μm� Display resolving power*3: NA� Repeating accuracy σ: 0.01 μm

High Speed 3D Surface Profiler BW-H501

High Speed 3D Surface Profiler

System Diagram

Specification

LV Series optical microscope

AZ Series stereoscopic microscope

MM Series measurement microscope

CM Series compact microscope

BridgeElements X-Cycle Imager image processing software

High-speed camera

Piezo system

Focuscope image processor made by Photron

Support for a range of microscopes

High-brightness illuminator MAX-F310 made by Asahi Spectra Co., Ltd., 300 W xenon lamp, lamp service life: 1,000 hoursActive vibration isolation table TS-150 made by Herz Co., Ltd., bench dimensions: 400 mm x 450 mmElectrostatic adsorption plate BW-H101-2010T made by Astron Co., Ltd., adsorption area: 200 mm x 100 mm

Height measurement time 0.2 second/fieldHeight measurement range 40 μmCorrection Surface correction,

4-dimensional curved surface correctionDigital enlargement 1/100 sub-pixel processingRoughness measurement 2-dimensional roughness, 3-dimensional roughnessProfile display Cursor measurement of distance between two points,

cursor measurement of height between two cursor pointsOutput Output of processed images and roughness indices to

an Excel fileAutomatic processing Automatic processing of multiple height imagesThree dimensional display Direct X displayHeight calibration Made by VLSI Standard Inc., standard step sample

(optional part)

*1: Requires a high-brightness illuminator *2: Smallest observable height difference *3: Height data cannot be given because it uses floating point (32-bit) numbers

Option Parts

Specifications and equipment are subject to change without any notice or obligation on the part of the manufacturer. October 2008 ©2008 NIKON CORPORATIONThe products detailed in the brochure are controlled by the Japanese Foreign Exchange and Foreign Trade Law and the International Export Control Regime. If there is a possibility that they may be utilized for the development of weapons of mass destruction, etc., they shall not be exported without authorization from the government.

Code No. 2CE-KGWH-1Printed in Japan (0810-05) Am/M

NIKON CORPORATION6-3, Nishiohi 1-chome, Shinagawa-ku, Tokyo 140-8601, Japanphone: +81-3-3773-9026 fax: +81-3-3773-9062http://nikon.com/products/instruments/index.htm

NIKON INSTRUMENTS INC.1300 Walt Whitman Road, Melville, N.Y. 11747-3064, U.S.A.phone: +1-631-547-8500; +1-800-52-NIKON (within the U.S.A. only)fax: +1-631-547-0306http://www.nikoninstruments.com/NIKON INSTRUMENTS EUROPE B.V.Laan van Kronenburg 2, 1183 AS, Amstelveen, The Netherlandsphone: +31-20-44-96-222 fax: +31-20-44-96-298 http://www.nikoninstruments.eu/NIKON INSTRUMENTS (SHANGHAI) CO., LTD.CHINA phone: +86-21-5836-0050 fax: +86-21-5836-0030(Beijing branch) phone: +86-10-5869-2255 fax: +86-10-5869-2277(Guangzhou branch) phone: +86-20-3882-0552 fax: +86-20-3882-0580

NIKON SINGAPORE PTE LTD.SINGAPORE phone: +65-6559-3618 fax: +65-6559-3668NIKON MALAYSIA SDN. BHD.MALAYSIA phone: +60-3-78763887 fax: +60-3-78763387NIKON INSTRUMENTS KOREA CO., LTD.KOREA phone: +82-2-2186-8410 fax: +82-2-555-4415NIKON CANADA INC.CANADA phone: +1-905-625-9910 fax: +1-905-625-0103NIKON FRANCE S.A.S.FRANCE phone: +33-1-45-16-45-16 fax: +33-1-45-16-00-33NIKON GMBHGERMANY phone: +49-211-9414-0 fax: +49-211-9414-322NIKON INSTRUMENTS S.p.A.ITALY phone: +39-55-3009601 fax: +39-55-300993NIKON AGSWITZERLAND phone: +41-43-277-2860 fax: +41-43-277-2861

NIKON UK LTD.UNITED KINGDOM phone: +44-20-8541-4440 fax: +44-20-8541-4584 NIKON GMBH AUSTRIAAUSTRIA phone: +43-1-972-6111-00 fax: +43-1-972-6111-40NIKON BELUXBELGIUM phone: +32-2-705-56-65 fax: +32-2-726-66-45

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Image Transformer

X-cycle leads the way to a new world of optical microscopy

Correct height images captured with X-Cycle Imager, and display roughness indices and cross section profiles.

BridgeElements BaseThe main BridgeElements screen. Here you can run image input and analysis modules, perform control, and save images. You can also process a number of specified images automatically. 1

3D ViewerHigh-speed, high-definition three dimensional display. In addition to displaying height in pseudocolor, you can paste specified color images.

Image Linking Software

Surface correction�Set a specified location as a reference plane.

4-dimensional curved surface correction�Curved surfaces at specified locations are treated as planar, making it easy to detect minute heights on curved surfaces.

Correction 3 AnalysisArbitrary height difference measurement�Display the difference in height between two points specified on a cross section profile.

Roughness index calculation (Two and three dimensional)Calculate and display the two dimensional roughness index for a cross section profile based on the specified standard length, as well as the three dimensional roughness of the surface.High-definition enlargement of a specified location

using sub-pixel processing.

Enables real-time height observationHigh-speed display of height images at 5 frames per second. The heating stage allows you to observe and analyze the deformation process of film and gel samples in real time.

With the X-cycle method, an objective lens performs cyclical scans, while the optical images generated are captured by a high-speed camera. Height images are calculated at high speed and displayed in real time.

High-speed camera

Optical microscope

Piezo actuator + High-speed camera = X-cycle high-speed image acquisition

With the fringe cycle method, the coordinate value on the Z axis with the maximum local focus measure is taken as the height of each pixel. Generating an interference fringe on the surface of the object with a two beam interference objective lens generates a very high focus measure, achieving effective height resolution of 100 nm and repeatable precision of σ = 10 nm, delivering height image capture with high-precision.

Two beam interference objective lens + X-cycle = Fringe cycle high-precision height image capture

Metallic cutting work surface�160 μm square measurement results using a 50x objective lens. The single point toolbytes are measured clearly.

Boundary region of the electrode/resin of a PC board �Metal and plastic parts with a reflection coefficient differing by around 100 times can be measured simultaneously without difficulty.

Z-axis cyclic scanning using piezo force

Z axis

High speed image processor Output and display at 5 frames per second

Image capture at 900 frames per second

Real-time height image

2 Enlargement

X-Cycle ImagerA height image input module unique to BW-H501. Height images for a specified time undergo accumulative addition, and random noise components are suppressed.

Live image: Currently output real-time omnifocal image.Omnifocal image: Displays a freeze-frame omnifocal image of the

currently displayed sample.Live height image: Currently output real-time height image.Height Image: Captures live height images and can display them with

pseudocolors.

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Image input modules Image processing modulesSaved images: The images currently saved in BridgeElements. You can perform a number of processes previously specified with the pointer.

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Z axis

Y axis

X axis

Save

Load

Multiple windows can be open. You can easily compare the shapes of samples, change the measurement conditions for comparison, and perform other operations.

Image input modules Load observed and saved images.

* Image File Grabber is also available for capturing images in standard formats such as BMP and JPEG.

BridgeElements

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High precision height measurementAchieves repeatable precision of 10 nm using white light interferometry. With high precision measurement exceeding that of earlier types, it is now possible to analyze and evaluate the surface roughness of objects.

Optically diffusive surfaces present no difficulty Observation and analysis of optically diffusive surfaces, a weakness of conventional optical systems, presents no difficulty. The profiler can be used to evaluate the surface of ceramic coated film and diffuser plates. Maximum local focus point

Maximumlocalfocuspoint

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Example: Surface roughness of the merge lip of a hard disk head

3D display of height image3D display of height image after 4D curved surface correction

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Image processing modules