HeterogeneousHeterogeneousTechnology

AlliAllianceHTA GAS ROADMAP

Heterogeneous Technology AllianceRealisation of HTA gas roadmapRealisation of HTA gas roadmap

27-Sep-12 | Page 1

Heterogeneous Technology AllianceHTA gas measurement expertise Device&Component :HTA gas measurement expertise Device&Component :

Fabry-Perot Ultra-microphone Microhotplate Metal oxide sensors ChemFETs Ozone sensor Interferometer

Module :Module : MIR laser modules Tunable IR laser modules QCL μ-sensors Si gas sensors Ceramic sensors

Systems : Multigas sensor FT IR spectrometer FT-IR spectrometer PAS systems Vehicle emission measurement

Applications :Applications : Hg, CO, CO2, H2, NH3, O3 VOC measurement Methane measurement Explosives detectionWine off flavor compounds

27-Sep-12 | Page 2

Wine off-flavor compounds

Heterogeneous Technology AllianceMarket size of gas sensingMarket size of gas sensing

27-Sep-12 | Page 3

Some examples of Gas sensors

Heterogeneous Technology Alliance

Main drivers and solutions for gas measurementsMain drivers and solutions for gas measurements

DRIVERS SOLUTIONS

Environmental legislation steer the development in many areas strongly. International politics and co-operation make their

ff ti d ll h i

Towards portable multi-gas measurement solutions

T d li ti h h deffectiveness gradually more comprehensive.

Standards are driving the development strongly in some fields, but lacking fully in some others.

Towards consumer applications such as hand held devices and gas detector applications in mobile phones.

I f d l t Cost efficiency is even increasingly significant factor in a global competition and in conditions where continuous growth cannot be considered as a basic assumption any more

Increase of modular systems

Increase of system level innovations.

as a basic assumption any more.

Energy price is increasing and emphasizing saving demands of energy.

H lth i b i d Health issues are becoming more and more important due to increasing awareness of well-being and aging trend in many economies.

27-Sep-12 | Page 4

Heterogeneous Technology AllianceHTA Gas sensing technologiesHTA Gas sensing technologies

1) NDIR 4) PAS2) Dispersive 3) Laser)

Tunable filters Multi-λ IRdetector

))

Tunable gratings

Minigassensor

QCL MEMS-PAS

6) Gas chromatography

7) Molecular, chemical, biological, plasmonic

8) Electrical/electrochemical

Monolithic

5) Interferometers

Plasmonic Optical waveguides

Nanoporous

Micro GS

Acoustics Electrical

ResonatorsMicrocalorimetersFTIR

Nanoporousmembranes

Acoustics Electrical

Tuneable QCL MEMS-Gas Resistive flexiblePhotostimulatedMinigasMEMS FPI Miniaturised

27-Sep-12 | Page 5

Tuneable QCLmodule

MEMS Gasmicrocalorimeter

Resistive flexible sensor

Photostimulated ozone sensor

Minigas cell

MEMS FPI a u sedFTIR

Heterogeneous Technology AllianceHTA technology development focusHTA technology development focus

NDIR PAS Make them small but keep throughput high =>

high SNR

Make them batch-producible and robust => high-l li ti

Differential photoacoustic gas sensor

Monolithic QCL-PAS

volume applications

Develop integration and packaging solutions => small size and low price

Add new data dimensions by hyperspectral

LASER Tunable external cavity QCLs.

dd e data d e s o s by ype spect aimaging => imaging applications

New wavelength ranges towards longer TIR area => versatility

Tunable MEMS grating with laser sources

Remote imaging systems

27-Sep-12 | Page 6

Heterogeneous Technology AllianceHTA technology development focusHTA technology development focus

FTIR GAS CHROMATOGRAPHYFTIR Miniaturization of interferometric engines

Utilization of MEMS-technology

GAS CHROMATOGRAPHY Miniaturization MEMS and NEMS cantilevers

for measuring masses down to 10-21 g.

27-Sep-12 | Page 7

Heterogeneous Technology AllianceHTA technology development focusHTA technology development focus

ELECTRICAL AND ELECTROMECHANICAL

Printed semiconductive gas sensor

SiC hot plate gas sensor

Ultragas Ultragas

MEMS-Gas

Photostimulated metal oxide gas sensor

Quartz microbalance

Indoor air quality monitoring system on flex substrate.

Resistive flexible sensor MEMS-Gas microcalorimeter Photostimulated gas sensor

27-Sep-12 | Page 8

Resistive flexible sensor MEMS-Gas microcalorimeter g

Heterogeneous Technology AllianceHTA technology development focusHTA technology development focus

MOLECULAR CHEMICAL BIOLOGICAL PLASMONICMOLECULAR, CHEMICAL, BIOLOGICAL, PLASMONIC Dye/nanoporous membrane -based gas sensing

Planar optical waveguide sensor

VIS to Mid-IR plasmonic sensors

Polymer Photonic Crystal/SERS chip

Plasmonic light harvesting structure (CSEM)Plasmonic light harvesting structure (CSEM)

27-Sep-12 | Page 9

Different manufacturing technologies for polymer‐based photonics (VTT)

Heterogeneous Technology AllianceHTA Gas measurement technology map

NIR/MIR TIRTunable QCL UV

HTA Gas measurement technology map

NIR/MIRPFPI PFPI

Planar opt.waveguide

μGC (NEMS)

Q(MEMS)

Tunablegrating

UVPFPI

CE

Monolithic QCL PAS

1’000 – 10’000 €

MiniGas

UC

T P

RIC

100 – 1000 €

Nanoporous membranes

Multipxluspectrometer

NIR/MIR t bl filt

Plasmonic mid-IR sensorP

RO

DU

Photo-stimulated MOS

MEMS-PASUV and TIR

tuneable filters10 – 100 €

tuneable filter

MEMS-GAS

Ultragas

SiC hot plate

Quartz

Polymer PC/SERS

Printed

MOS

< 10 €

YEARS TO PRODUCT1 - 2 3 - 4 5+ →

Ultragas Quartz microbalance

Printed semiconductor

VTT

F h f

CEA-Leti

CSEM

27-Sep-12 | Page 10

YEARS TO PRODUCTFraunhofer CSEM

Heterogeneous Technology AllianceIndustrial sectors showing market potentialIndustrial sectors showing market potential

ICT sector. As ICTs will become increasingly faster, more efficient, cheaper and ubiquitous, it enables totally new application fields and solutions for gas measurement, for example y gintegration of gas measurement solutions (with more efficient, smaller and cheaper sensors involved) to mobile phones.

Healthcare sector Due to increasing awareness of health issues and information availableHealthcare sector. Due to increasing awareness of health issues and information available. Includes increase of professional gas detection and diagnostic solutions in a short run, wide range of consumer solutions in a longer run.

Automotive industry. Due to increasing urbanization and tightening emissions controlling. Due to aims to maximize the utilization of alternate energy sources as gases of vehicles.

Safety and Security As digitalization continues there is increasing need for improvingSafety and Security. As digitalization continues there is increasing need for improving information risk management. Arise of remote gas solutions will increasingly be integrated in larger safety and security monitoring systems.

Environmental sector as a whole. Mainly due to tightening environmental legislation and enlarging global coverage of them, there is increasing need for wide variety of gas sensing solutions to control the emissions. May enable the emerge of new opportunities for gas detection especially in the water and wastewater industries as there is strong need for more

27-Sep-12 | Page 11

detection especially in the water and wastewater industries as there is strong need for more sustainable water & wastewater treatment solutions.

Heterogeneous Technology AllianceApplications fields for gas sensingpp g g

27-Sep-12 | Page 12

Heterogeneous Technology AllianceSummary of applications and main driversSummary of applications and main drivers

27-Sep-12 | Page 13

Heterogeneous Technology AllianceSummary of HTA Gas roadmap workSummary of HTA Gas roadmap work

27-Sep-12 | Page 14

Heterogeneous Technology AllianceSome conclusions

Some notes can be made on the differenttechnologies as a whole:

Some conclusions that can be drawn from cross-analysis of technology and applications in gas technologies as a whole:

• There is very little direct technologicaloverlap (or competition) even though many ofthe end applications can be the same. Another

y gy pp gsensing:

• All presented technologies have at least goodprospects for a certain application fieldsthe end applications can be the same. Another

way of looking at this is that the HTA alonepossess a multitude of technologicalapproaches to seemingly similar kind ofproblems.

p p pp

• Safety and security and industrial processes drivethe development for many technologies. These can alsowork as driver/starter markets for new technologies,problems.

• Most of the technologies are demonstrated,but the products are expected to appearonly in 3-4 years.

geventually leading to the full set of application domainsto be covered with lower and lower cost devices. Indeed,the lowest cost application fields, consumer marketsand automotive seem to be the most demanding andonly in 3 4 years.

• Looking at the amount of technologies beingdeveloped for different price categoriessuggest that there are two main strategies:

ga lot of future work to be done in making sensors lowerin cost.

suggest that there are two main strategies:1) to make very expensive lab equipmentportable, but still high-performance2) to develop low-cost sensors in highvolumes.

27-Sep-12 | Page 15

o u es

Heterogeneous Technology AllianceHTA ROADMAP-teamHTA ROADMAP team

VTT: Janne Suhonen, Project coordinatorJouko Myllyoja Facilitator of VTT foresight teamJouko Myllyoja, Facilitator of VTT foresight team Jarkko Antila Heikki SaariPentti Karioja

CEA-LETI : Sergio NicolettiClaude VauchierClaude Vauchier

CSEM : Cees LantingSt f C ttStefano Cattaneo

Fraunhofer : Ha-Duong Ngo, IZMg g ,Volker Cimalla, IAF Heinrich Gruger, IPMSHanns-Erik Endres, EMFTRay Saupe ENAS

27-Sep-12 | Page 16

Ray Saupe, ENAS