Development of horn coupled superconducting kinetic ... session/16am-Poster-16... ·...
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10 10 10 3 10 −1 10 0 10 1 10 DASI CBI CAPMAP Boomerang WMAP QUAD BICEP1 QUIET−Q QUIET−W Polarbear SPTpol ACTpol Multipole l(l+1)C l BB /2π [μK 2 ] Development of horn coupled superconducting kinetic inductance detectors array Inflation Recombination Dark age Begin of the Universe Re-ionization CMB Foregrounds Inflation Recombination Dark age he e Reionization CMB First star Foregrounds Now B-mode Graviton + + BigBang Ground BIRD r: tensor / scaler Our target Scan by Earth Rotation Covering a half of all-sky Comparable with satellite observations times Galactic radiation map (FDS dust model @ 94GHz) Covered Area Covered area per rotation BICEP2 ~ 2% Leakage from other polarization Leakage from TM mode Observing band Signal transmission Cross-talk Each components are optimized using electromagnetic simulation. Performance of the GB-KIDs are simulated and the result satisfies requirements. Signal transmission is greater than 80% and cross-talk from other pol. and other EM mode are less than 0.01% with in the observing band of 145±25 GHz. Common mark Good alignment Aligner: large exposure area Stepper: good alignment Si wafer Nb Photo resist Exposure Etching Photomask Si wafer Nb Exposure Etching Photo resist Etching process w/ particles Resonator Feedline Antenna Resonator Feedline Antenna L3 L4 L5 L6 dB Hz transmittance Al_KIDs@130mK HMDS crystal Disposal pipet Introduction In the Big Bang theory, the early universe was an extremely hot and dense condition. Cosmic Microwave Background(CMB) is the remaining radiation of the Big Bang. The inflation, exponential expansion of the space before the Big Bang, is proposed to explain horizon problem and flatness problem. The Inflation produced primordial gravitational waves. Finally, they made the parity odd polarization patterns “B-modes“ on the CMB. The groundBIRD experiment aims to measure the B-mode spectrum at the large angular scale. GroundBIRD experiment Kinetic Inductance Detectors(KIDs) Angular scale of the B-modes is expected to be more than a few degree. GroundBIRD has a unique rotating cooled optics to measure large area (x25 of the past exp.). GB has an excellent sensitivity for large-scale B-modes which is not sensible by other experiments. Superconductor has an inductance due to the inertia of cooper-pairs. When the energy is deposited and cooper-pairs are broken in the superconductor, the inductance is also changed. The energy threshold of this phenomena is 1/2000 of ordinary Si semiconductor detector. KIDs consist of superconducting LC resonator and they capacitively coupled to the feed line. Each resonators has their original inductance. KIDs are frequency domain multiplexed detector. f feed [GHz] f detector Feedline Transmission (S 21 ) Resonator Feedline Equivalent circuit Feedline Resonator Antenna CMB radiation γ Cooper-pair breaking + ΔL + ΔL Antenna L1 Design of GroundBIRD(GB)-KIDs GB-KIDs consists of corrugated horn, probe antenna and mili-meter wave circuits. First two orthogonal polarizations are focused by horn and absorbed by antenna. Each polarizations are transmitted to two KIDs separately. Simulated results GB-KIDs Photolithography Devices are fabricated by photo-lithography technology. Exposure device is required to have larger expose area and accurate overlay. We combined g-line aligner and i-line stepper@NAOJ using common alignment mark. The alignment accuracy between aligner pattern and stepper pattern is reasonable. The GB required larger area device to integrate many devices. We need to improve yield to fabricate a large device. Especially, particle contamination in the photo resist and HMDS cause defects like short or disconnection. Once the feed line has a defect, every KIDs on that wafer is dead. Disposal pipets drastically improved the yield. The first prototype of GB-KIDs array First GB-KIDs is processed and its production period of one month. Optical micrograph shows the design is correctly produced. Currently, this device is testing under cryogenic temperature. * E-mail: [email protected] 1 55 pix, 110 detectors Dual-pol. antennas Two KIDs for each First Prototype 1 Light Corrugated Horn Probe Antenna 145 GHz 145 GHz 145 GHz 145 GHz 145 GHz 145 GHz 220 GHz a RIKEN, b KEK, c NAOJ, d Tohoku Univ., e Korea Univ., f The Univ. of Tokyo, g Saitama Univ., h Institute for Basic Science, i SOKENDAI, j Univ. of Tsukuba Kenji Kiuchi* a , Jihoon Choi h , Thushara Damayanthi a , Makoto Hattori d , Masashi Hazumi b , Hikaru Ishitsuka i , Satoru Mima a , Ryo Koyano g , Hiroki Kutsuma d , Kyungmin Lee e , Makoto Minowa f , Makoto Nagai j , Taketo Nagasaki b , Shugo Oguri b , Chiko Otani a , Yutaro Sekimoto c , Munehisa Semoto g , Jun'ya Suzuki b , Tohru Taino g , Osamu Tajima b , Nozomu Tomita f , Eunil Won e , Tomohisa Uchida b , and Mitsuhiro Yoshida b
Transcript of Development of horn coupled superconducting kinetic ... session/16am-Poster-16... ·...
101
102
103
10−4
10−3
10−2
10−1
100
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102
lensingr=0.05
r=0.01
BK14CMB component
DASICBICAPMAPBoomerangWMAP
QUADBICEP1QUIET−QQUIET−W
PolarbearSPTpolACTpol
Multipole
l(l+
1)C
lBB/2
π [
µK
2]
Development of horn coupled superconducting kinetic inductance detectors array
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Inflation�
Recombination�Dark age�
Begin of the Universe�
Re-ionization�
CMB �First star�Foregrounds�Now�
Inflation�
Recombination�Dark age�
Begin of the Universe�
Reionization�
CMB � First star� Foregrounds� Now�
Era thomson scatterings, i.e. CMB-electron scatterings, were end
Era thomson scatterings, i.e. CMB-electron scatterings, were resumed
B-mode
Graviton
+ +BigBang
GroundBIRD
r: tensor / scaler
Large scale Small scale
Our targetScan by Earth Rotation
Covering a half of all-skyComparable with satellite observations
��� times
Galactic radiation map(FDS dust model @ 94GHz)
CoveredArea
Covered areaper rotation
BICEP2 ~ 2%
Leakage fromother polarization
Leakage fromTM mode
Observing band
Signal transmission Cross-talk
Each components are optimized using electromagnetic simulation. Performance of the GB-KIDs are simulated and the result satisfies requirements. Signal transmission is greater than 80% and cross-talk from other pol. and other EM mode are less than 0.01% with in the observing band of 145±25 GHz.
Common mark
Good alignment
Aligner: large exposure area Stepper: good alignment
Si waferNb
Photo resist
Exposure
Etching
Photomask
Si waferNb
Exposure
Etching
Photo resist
Etching process w/ particles
Resonator
Feedline
�
Equivalent circuit
Feedline
Resonator
Antenna
ffeed [GHz]fdetector
FeedlineTransmission (S21)
Antenna
Resonator
Feedline
�
Equivalent circuit
Feedline
Resonator
Antenna
ffeed [GHz]fdetector
FeedlineTransmission (S21)
Antenna
ffeed [GHz]fdetector
FeedlineTransmission (S21)
Resonator
Feedline
�
Equivalent circuit
Feedline
Resonator
Antenna
CMB radiation
γ
Cooper-pair breaking
+ ΔL + ΔL
Antenna
L1 L2 L3 L4 L5 L6
dB
Hz
transmittance Al_KIDs@130mK
HMDS crystal
Disposal pipet
Introduction
In the Big Bang theory, the early universe was an extremely hot and dense condition. Cosmic Microwave Background(CMB) is the remaining radiation of the Big Bang. The inflation, exponential expansion of the space before the Big Bang, is proposed to explain horizon problem and flatness problem. The Inflation produced primordial gravitational waves. Finally, they made the parity odd polarization patterns “B-modes“ on the CMB. The groundBIRD experiment aims to measure the B-mode spectrum at the large angular scale.
GroundBIRD experiment
Kinetic Inductance Detectors(KIDs)
Angular scale of the B-modes is expected to be more than a few degree. GroundBIRD has a unique rotating cooled optics to measure large area (x25 of the past exp.). GB has an excellent sensitivity for large-scale B-modes which is not sensible by other experiments.
Superconductor has an inductance due to the inertia of cooper-pairs. When the energy is deposited and cooper-pairs are broken in the superconductor, the inductance is also changed. The energy threshold of th is phenomena i s 1/2000 of ord inary S i s em i conduc to r de t ec to r. K IDs cons i s t o f superconducting LC resonator and they capacitively coupled to the feed line. Each resonators has their original inductance. KIDs are frequency domain multiplexed detector.
ffeed [GHz]fdetector
FeedlineTransmission (S21)
Resonator
Feedline
�
Equivalent circuit
Feedline
Resonator
Antenna
CMB radiation
γ
Cooper-pair breaking
+ ΔL + ΔL
Antenna
L1
Design of GroundBIRD(GB)-KIDs
GB-KIDs consists of corrugated horn, probe antenna and mili-meter wave circuits. First two orthogonal polarizations are focused by horn and absorbed by antenna. Each polarizations are transmitted to two KIDs separately.
Simulated results GB-KIDs
Photolithography
Devices are fabricated by photo-lithography technology. Exposure device is required to have larger expose area and accurate overlay. We combined g-line aligner and i-line stepper@NAOJ using common alignment mark. The alignment accuracy between aligner pattern and stepper pattern is reasonable.
The GB required larger area device to integrate many devices. We need to improve yield to fabricate a large device. Especially, particle contamination in the photo resist and HMDS cause defects like short or disconnection. Once the feed line has a defect, every KIDs on that wafer is dead. Disposal pipets drastically improved the yield.
The first prototype of GB-KIDs array
First GB-KIDs is processed and its production period of one month. Optical micrograph shows the design is correctly produced. Currently, this device is testing under cryogenic temperature.
* E-mail: [email protected]
1
55pix,110detectors
Dual-pol.antennasTwoKIDsforeach
FirstPrototype
1
Light
CorrugatedHorn
ProbeAntenna
145GHz
145GHz
145GHz
145GHz
145GHz
145GHz
220GHz
aRIKEN, bKEK, cNAOJ, dTohoku Univ., eKorea Univ., fThe Univ. of Tokyo, gSaitama Univ., hInstitute for Basic Science, iSOKENDAI, jUniv. of Tsukuba
Kenji Kiuchi*a, Jihoon Choih, Thushara Damayanthia, Makoto Hattorid, Masashi Hazumib, Hikaru Ishitsukai, Satoru Mimaa, Ryo Koyanog, Hiroki Kutsumad, Kyungmin Leee, Makoto Minowaf, Makoto Nagaij, Taketo Nagasakib, Shugo Ogurib, Chiko Otania, Yutaro Sekimotoc,
Munehisa Semotog, Jun'ya Suzukib, Tohru Tainog, Osamu Tajimab, Nozomu Tomitaf, Eunil Wone, Tomohisa Uchidab, and Mitsuhiro Yoshidab
