1. INTRODUCTION 2. EXPERIMENTALeuvlsymposium.lbl.gov/pdf/2009/poster/P095_Harumoto_SOKUDO.pdf ·...
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λ=248nm, NA0.60 SOKUDO Track 300mm bare-Si EUV Resist A EUV Resist B λ=248nm, NA0.60 Exposure SOKUDO Track Develop 300mm bare-Si Substrate EUV Resist A EUV Resist B Photoresist Nicolet Almega-XR (Raman-spectroscopy) RS-3000 KLA-2365 Thermo Fisher Scientific Hitachi KLA Nicolet Almega-XR (Raman-spectroscopy) RS-3000 KLA-2365 Thermo Fisher Scientific Analysis of Component Hitachi Defect Observation KLA Defect Inspection 2009 International Symposium on Extreme Ultraviolet Lithography Study of post-develop defect on typical EUV resist Masahiko Harumoto, Kazuhito Shigemori, Akihiro Hisai and Masaya Asai SOKUDO. Co., Ltd. Koji Kaneyama Semiconductor Leading Edge Technologies, Inc. (Selete) 1. INTRODUCTION 4. Summary and Future Post-develop defect on typical EUV resist were evaluated with KrF-exposure-tool. No EUV specific defect was observed. We confirmed the defects on EUV resist processing, these defects were Blob, Residue and Bridging defect as well known. Three types of defects were observed. There are three types of defects we observed, these are Blob, Residue and Bridging defect. Blob Components: Resist and Developer components were detected by Raman Similar Case: i-Line, KrF, ArF, i-ArF Residue Components: Resist Similar Case: i-Line, i-ArF Bridge and Bubble Components: Resist Similar Case: KrF, ArF, i-ArF Blob and Residue are common defect for each generation resist. How about EUV? There are specific defects for each generation resist. How about EUV? Goal of this study is to understand common/specific defect on EUV resist processing. UV KrF ArF λ=248nm λ=193nm λ≧365nm ArF immersion EUV λ=13.5nm Blob Residue ? ? ? Common Defect Specific Defect µ-Bubble Bottom-ARC µ-Bridge Water droplet before PEB 2. EXPERIMENTAL 2.1 Conditions Process Condition Develop Process Metrology Developer Puddle Rinse Spin-Dry Developer Supply 2.38wt% TMAH was supplied by Slit-scan nozzle. Rest-puddle of developer was formed and kept for 30 sec. Substrate covered with DIW rinse for 15 sec after developer puddle. At the same time, Substrate rotated. Substrate rotated and then DIW rinse was dried. 2.2 Pattern and location of exposed area Condition 1: Line Die :11 x 11mm pitch Pattern :Line 180nm-hp Condition 2: Hole Die : 9 x 10mm pitch Pattern : Hole 400nm (1000nm-pitch) Condition 3: Mixed Line and Hole Die : 22 x 22mm pitch Pattern : Line 180nm-hp Hole 400nm (1000nm-pitch) Line Hole Non-exposed Line Line Resist (Half exposed though PSM6%) 3. RESULTS and DISCUSSION EUV Resist A 3.1 Results of defect-type Similar case : i-Line, KrF Cause: Rinse Shortage Water Droplet containing Resist Components Blob Components : Resist Hole Similar case : i-Line, KrF Cause: Rinse Shortage Water Droplet containing Resist Components Residue Components : NA on Si on Resist Line Area Assumed Cause Defect-type and Analysis Picture Similar case : i-Line Cause: Rinse Shortage Water Droplet containing Resist Components Blob Components : Resist Similar case : KrF, i-ArF Cause: Rinse Shortage Water Droplet containing Resist Components Blob Components : Resist Similar case : KrF, ArF, i-ArF Cause: Chemical-flare during PEB ununiformly-distributed Resin during coat Un-resolving Components : Resist Similar case : KrF, ArF, i-ArF Cause: Chemical-flare during PEB ununiformly-distributed Resin during coat Bridge Components from Raman- spectroscopy: NA Si KrF ArF KrF KrF 3.2 Assumed cause and countermeasure SDC :98% reduction i-Line Residue i-Line i-Line i-Line Similar case : KrF, ArF, i-ArF Cause: Resist surface condition after develop Water Droplet containing Developer Components Blob Components : Developer Hole Similar case : i-Line, KrF, ArF Cause: Rinse Shortage Water Droplet containing Resist Components Residue Components : NA on Si on Resist Line Similar case : i-Line Cause: Rinse Shortage Water Droplet containing Resist Components Blob Components : NA Similar case : KrF, ArF, i-ArF Cause: Resist surface condition after develop Water Droplet containing Resist Components Blob Components : Developer Similar case : KrF, ArF, i-ArF Cause: Bubbles in the Resist-piping or Filter Bubble Components : NA Similar case : ArF, i-ArF Cause: Chemical-flare during PEB ununiformly-distributed Resin during coat Bridge Components : NA ArF ArF i-Line KrF i-ArF ArF ArF ArF KrF i-Line 5. Acknowledgement We would like to thank Rika Harui, Thermo Fisher Scientific K.K., for Raman analysis. Resist-filter Coating process improvement Bubbles in the Resist-piping or Filter Bubble Rinse process improvement SDC-Rinse ACID-Rinse Rinse Shortage Water Droplet containing Resist Residue Develop process improvement ACID-Rinse (CO 2 -water) Resist Surface Condition after Dev. Water Droplet containing Developer Resist-filter Coating process improvement Baking process improvement Chemical-flare during PEB Un-uniformly-distributed Resin Bridge Un-resolving Rinse process improvement Rinse Time : longer Flow-rate : higher Wafer rotational speed : faster SDC-Rinse (SOKUDO-Defect-Cleaning) Rinse Shortage Water Droplet containing Resist Blob Countermeasure Cause Defect-Type EUV Resist B 3.3 Countermeasure from i-Line to immersion-ArF resist Next step, we try applying these solutions to EUV resist. ACID-Rinse :0 Blob ArF Blob Future Next step, we will confirm the defects with EUV-exposure-tool. We will try reducing Blob and Residue by applying solution and improvement from i-Line to immersion-ArF. Blob : Develop and Rinse-process improvement Residue : Rinse-process improvement
Transcript of 1. INTRODUCTION 2. EXPERIMENTALeuvlsymposium.lbl.gov/pdf/2009/poster/P095_Harumoto_SOKUDO.pdf ·...
λ=248nm, NA0.60ExposureSOKUDO TrackDevelop300mm bare-SiSubstrate
EUV Resist AEUV Resist B
Photoresist
λ=248nm, NA0.60ExposureSOKUDO TrackDevelop300mm bare-SiSubstrate
EUV Resist AEUV Resist B
Photoresist
Nicolet Almega-XR (Raman-spectroscopy)
RS-3000
KLA-2365
Thermo Fisher ScientificAnalysis of Component HitachiDefect Observation
KLADefect Inspection
Nicolet Almega-XR (Raman-spectroscopy)
RS-3000
KLA-2365
Thermo Fisher ScientificAnalysis of Component HitachiDefect Observation
KLADefect Inspection
2009 International Symposium on Extreme Ultraviolet Lithography
Study of post-develop defect on typical EUV resistMasahiko Harumoto, Kazuhito Shigemori, Akihiro Hisai and Masaya Asai
SOKUDO. Co., Ltd.Koji Kaneyama
Semiconductor Leading Edge Technologies, Inc. (Selete)
1. INTRODUCTION
4. Summary and FuturePost-develop defect on typical EUV resist were evaluated
with KrF-exposure-tool. No EUV specific defect was observed.
We confirmed the defects on EUV resist processing, these defects were Blob, Residue and Bridging defect as well known.
Three types of defects were observed.There are three types of defects we observed, these are Blob, Residue and Bridging defect.
BlobComponents: Resist and Developer components were detected by RamanSimilar Case: i-Line, KrF, ArF, i-ArF
ResidueComponents: Resist Similar Case: i-Line, i-ArF
Bridge and BubbleComponents: Resist Similar Case: KrF, ArF, i-ArF
Blob and Residue are common defect for each generation resist.How about EUV?There are specific defects for each generation resist.How about EUV?Goal of this study is to understand common/specific defect on EUV resist processing.
UV KrF ArF
λ=248nm λ=193nmλ≧365nm
ArFimmersion EUV
λ=13.5nm
Blo
bR
esid
ue
???
Common
Defect
Specific
Defect
µ-Bubble Bottom-ARC µ-Bridge Water dropletbefore PEB
2. EXPERIMENTAL2.1 Conditions
Process Condition
Develop Process
Metrology
Developer Puddle Rinse Spin-DryDeveloper Supply
2.38wt% TMAH was supplied by Slit-scan nozzle.
Rest-puddle of developer was formed and kept for 30 sec.
Substrate covered with DIW rinse for 15 secafter developer puddle.At the same time, Substrate rotated.
Substrate rotated and then DIW rinse was dried.
2.2 Pattern and location of exposed areaCondition 1: Line Die :11 x 11mm pitchPattern :Line 180nm-hp
Condition 2: Hole
Die : 9 x 10mm pitchPattern : Hole 400nm (1000nm-pitch)
Condition 3: Mixed Line and HoleDie : 22 x 22mm pitchPattern : Line 180nm-hp
Hole 400nm (1000nm-pitch)
Line
Hole
Non-exposed
Line
Line
Resist (Half exposed though PSM6%)
3. RESULTS and DISCUSSION
EUV Resist A
3.1 Results of defect-type
Similar case : i-Line, KrFCause:Rinse ShortageWater Droplet containing Resist Components
BlobComponents : Resist
HoleSimilar case : i-Line, KrFCause:Rinse ShortageWater Droplet containing Resist Components
ResidueComponents : NA
on Si
onResist
Line
Area Assumed CauseDefect-type and AnalysisPicture
Similar case : i-LineCause:Rinse ShortageWater Droplet containing Resist Components
BlobComponents : Resist
Similar case : KrF, i-ArFCause:Rinse ShortageWater Droplet containing Resist Components
BlobComponents : Resist
Similar case : KrF, ArF, i-ArFCause:Chemical-flare during PEBununiformly-distributed Resin during coat
Un-resolvingComponents : Resist
Similar case : KrF, ArF, i-ArFCause:Chemical-flare during PEBununiformly-distributed Resin during coat
BridgeComponents from Raman-
spectroscopy: NA
Si
KrF
ArF
KrF
KrF
3.2 Assumed cause and countermeasure
SDC :98% reduction
i-Line Residuei-Line
i-Line
i-Line
Similar case : KrF, ArF, i-ArFCause:Resist surface condition after developWater Droplet containing Developer Components
BlobComponents : Developer
HoleSimilar case : i-Line, KrF, ArFCause:Rinse ShortageWater Droplet containing Resist Components
ResidueComponents : NA
on Si
onResist
Line
Similar case : i-LineCause:Rinse ShortageWater Droplet containing Resist Components
BlobComponents : NA
Similar case : KrF, ArF, i-ArFCause:Resist surface condition after developWater Droplet containing Resist Components
BlobComponents : Developer
Similar case : KrF, ArF, i-ArFCause:Bubbles in the Resist-piping or Filter
BubbleComponents : NA
Similar case : ArF, i-ArFCause:Chemical-flare during PEBununiformly-distributed Resin during coat
BridgeComponents : NA ArF
ArF
i-Line
KrF
i-ArF
ArF
ArF
ArF
KrF
i-Line 5. AcknowledgementWe would like to thank Rika Harui, Thermo Fisher Scientific K.K., for Raman analysis.
Resist-filterCoating process improvement
Bubbles in the Resist-piping or FilterBubble
Rinse process improvementSDC-RinseACID-Rinse
Rinse ShortageWater Droplet containing ResistResidue
Develop process improvementACID-Rinse (CO2-water)
Resist Surface Condition after Dev.Water Droplet containing Developer
Resist-filterCoating process improvementBaking process improvement
Chemical-flare during PEBUn-uniformly-distributed Resin
BridgeUn-resolving
Rinse process improvementRinse Time : longerFlow-rate : higherWafer rotational speed : faster
SDC-Rinse (SOKUDO-Defect-Cleaning)
Rinse ShortageWater Droplet containing ResistBlob
CountermeasureCauseDefect-Type
EUV Resist B
3.3 Countermeasure from i-Line to immersion-ArF resistNext step, we try applying these solutions to EUV resist.
ACID-Rinse :0 Blob
ArF Blob
FutureNext step, we will confirm the defects with EUV-exposure-tool.We will try reducing Blob and Residue
by applying solution and improvement from i-Line to immersion-ArF.Blob : Develop and Rinse-process improvementResidue : Rinse-process improvement
