2015. λ= 13.2–13.7 nm ± 1/1450 Δλ/λ 4xNA= {0.25, 0.33, 0.42, 0.50, 0.625} CRA= 6° (typical); 8°, 10° for NA > 0.33 σ= 0.05–1 + (fully programmable) t.
